Ultralow-k nanoporous organosilicate dielectric films imprinted with dendritic spheres
10.1038/nmat1291
Crossref journal-article
Springer Science and Business Media LLC
Nature Materials (297)
Bibliography

Lee, B., Park, Y.-H., Hwang, Y.-T., Oh, W., Yoon, J., & Ree, M. (2005). Ultralow-k nanoporous organosilicate dielectric films imprinted with dendritic spheres. Nature Materials, 4(2), 147–150.

Authors 6
  1. Byeongdu Lee (first)
  2. Young-Hee Park (additional)
  3. Yong-Taek Hwang (additional)
  4. Weontae Oh (additional)
  5. Jinhwan Yoon (additional)
  6. Moonhor Ree (additional)
References 27 Referenced 224
  1. International Technology Roadmap for Semiconductors (Semiconductor Industry Association, San Jose, 2001).
  2. Morgen, M. et al. Low dielectric constant materials for ULSI interconnects. Annu. Rev. Mater. Sci. 30, 645–680 (2000). (10.1146/annurev.matsci.30.1.645) / Annu. Rev. Mater. Sci. by M Morgen (2000)
  3. Maier, G. Low dielectric constant polymers for microelectronics. Prog. Polym. Sci. 26, 3–65 (2001). (10.1016/S0079-6700(00)00043-5) / Prog. Polym. Sci. by G Maier (2001)
  4. Maex, K. et al. Low dielectric materials for microelectronics. J. Appl. Phys. 93, 8793–8841 (2003). (10.1063/1.1567460) / J. Appl. Phys. by K Maex (2003)
  5. Oh, W. et al. Residual stress evolution in the thin film of polymethylsilsesquioxane. Macromol. Chem. Phys. 203, 791–801 (2002). (10.1002/1521-3935(20020401)203:5/6<801::AID-MACP801>3.0.CO;2-E) / Macromol. Chem. Phys. by W Oh (2002)
  6. Katz, A. & Davis, M. E. Molecular imprinting of bulk, microporous silica. Nature 403, 286–289 (2000). (10.1038/35002032) / Nature by A Katz (2000)
  7. Cho, C. -C. et al. Porous dielectric material with improved pore surface properties for electronic applications. US patent 5,847,443 (1998).
  8. Brinker C. J. Sol-Gel Science: The Physics and Chemistry of Sol-Gel Processing (Academic, San Diego, 1990). / Sol-Gel Science: The Physics and Chemistry of Sol-Gel Processing by CJ Brinker (1990)
  9. Ree, M., Goh, W. H. & Kim, Y. Thin films of organic polymer composites with inorganic aerogels as dielectric materials: polymer chain orientation and properties. Polym. Bull. 35, 215–221 (1995). (10.1007/BF00312917) / Polym. Bull. by M Ree (1995)
  10. Lee, H. -J. et al. Structural comparison of hydrogen silsesquioxane based porous low-k thin films prepared with varying process conditions. Chem. Mater. 14, 1845–1852 (2002). (10.1021/cm011569h) / Chem. Mater. by H-J Lee (2002)
  11. Yang, S. et al. Molecular templating of nanoporous ultralow dielectric constant (∼1.5) organosilicates by tailoring the microphase separation of triblock copolymers. Chem. Mater. 13, 2762–2764 (2001). (10.1021/cm0102786) / Chem. Mater. by S Yang (2001)
  12. Huang, E. et al. Pore size distributions in nanoporous methyl silsesquioxane films as determined by small angle X-ray scattering. Appl. Phys. Lett. 81, 2232–2234 (2002). (10.1063/1.1507841) / Appl. Phys. Lett. by E Huang (2002)
  13. Bolze, J. et al. Synchrotron X-ray reflectivity study on the structure of templated polyorganosilicate thin films and their derived nanoporous analogues. Langmuir 17, 6683–6691 (2001). (10.1021/la010451c) / Langmuir by J Bolze (2001)
  14. Oh, W. et al. Optical, dielectric and thermal properties of nanoscaled films of polyalkylsilsesquioxane composites with star-shaped poly(ε-caprolactone) and their derived nanoporous analogues. Polymer 44, 2519–2527 (2003). (10.1016/S0032-3861(03)00129-0) / Polymer by W Oh (2003)
  15. Nguyen, C. V. et al. Low-dielectric, nanoporous organosilicate films prepared via inorganic/organic polymer hybrid templates. Chem. Mater. 11, 3080–3085 (1999). (10.1021/cm990114d) / Chem. Mater. by CV Nguyen (1999)
  16. Hedrick, J. L. et al. Templating nanoporosity in thin-film dielectric insulators. Adv. Mater. 10, 1049–1053 (1998). (10.1002/(SICI)1521-4095(199809)10:13<1049::AID-ADMA1049>3.0.CO;2-F) / Adv. Mater. by JL Hedrick (1998)
  17. Nguyen, C. et al. Hyperbranched poly(caprolactone)s as nanoporosity templating agents for organosilicates. Macromolecules 33, 4281–4284 (2000). (10.1021/ma991407v) / Macromolecules by C Nguyen (2000)
  18. de Brabander-van den Berg, E. M. M. & Meijer, E. W. Poly(propylenimine) dendrimers: large-scale synthesis via heterogeneously catalysed hydrogenation. Angew. Chem. Int. Edn Engl. 32, 1308–1311 (1993). (10.1002/anie.199313081) / Angew. Chem. Int. Edn Engl. by EMM de Brabander-van den Berg (1993)
  19. Bolze, J. et al. Current status of the synchrotron small-angle X-ray scattering station BL4C1 at the Pohang Accelerator Laboratory. Macromol. Res. 10, 2–12 (2002). (10.1007/BF03218282) / Macromol. Res. by J Bolze (2002)
  20. Lee, B. Synchrotron X-ray Scattering Studies on Morphologies of Poly(ethylene isophthalate-co-terephthalate)s and Nanoporous Poly(methylsilsesquioxane) Composites Thesis, Pohang Univ. Sci. Technol. (2003). / Synchrotron X-ray Scattering Studies on Morphologies of Poly(ethylene isophthalate-co-terephthalate)s and Nanoporous Poly(methylsilsesquioxane) Composites by B Lee (2003)
  21. Omote, K. et al. Small angle X-ray scattering for measuring pore-size distributions in porous low-k films. Appl. Phys. Lett. 82, 544–546 (2003). (10.1063/1.1539546) / Appl. Phys. Lett. by K Omote (2003)
  22. Holy, V., Pietsch, U. & Baumbach, T. High-resolution X-ray scattering from thin films and multilayers. (Springer, Berlin, 1999).
  23. Rauscher, M., Salditt, T. & Spohn, H. Small-angle X-ray scattering under grazing incidence: the cross section in the distorted-wave Born approximation. Phys. Rev. B 52, 16855–16863 (1995). (10.1103/PhysRevB.52.16855) / Phys. Rev. B by M Rauscher (1995)
  24. Parratt, L. G. Surface studies of solids by total reflection of X-rays. Phys. Rev. 95, 359 (1954). (10.1103/PhysRev.95.359) / Phys. Rev. by LG Parratt (1954)
  25. Pedersen, J. S. Determination of size distributions from small-angle scattering data for systems with effective hard-sphere interactions. J. Appl. Cryst. 27, 595–608 (1994). (10.1107/S0021889893013810) / J. Appl. Cryst. by JS Pedersen (1994)
  26. Debye, P., Anderson, H. R. & Brumberger, H. Scattering by an inhomogeneous solid. II. The correlation function and its application. J. Appl. Phys. 28, 679–683 (1957). (10.1063/1.1722830) / J. Appl. Phys. by P Debye (1957)
  27. Prosa, T. J., Bauer, B. J. & Amis, E. J. From stars to spheres: a SAXS analysis of dilute dendrimer solutions. Macromolecules 34, 4897–4906 (2001). (10.1021/ma0002186) / Macromolecules by TJ Prosa (2001)
Dates
Type When
Created 20 years, 7 months ago (Jan. 9, 2005, 1:22 p.m.)
Deposited 3 years, 1 month ago (July 6, 2022, 3 p.m.)
Indexed 3 weeks, 5 days ago (July 28, 2025, 5:08 p.m.)
Issued 20 years, 7 months ago (Jan. 9, 2005)
Published 20 years, 7 months ago (Jan. 9, 2005)
Published Online 20 years, 7 months ago (Jan. 9, 2005)
Published Print 20 years, 6 months ago (Feb. 1, 2005)
Funders 0

None

@article{Lee_2005, title={Ultralow-k nanoporous organosilicate dielectric films imprinted with dendritic spheres}, volume={4}, ISSN={1476-4660}, url={http://dx.doi.org/10.1038/nmat1291}, DOI={10.1038/nmat1291}, number={2}, journal={Nature Materials}, publisher={Springer Science and Business Media LLC}, author={Lee, Byeongdu and Park, Young-Hee and Hwang, Yong-Taek and Oh, Weontae and Yoon, Jinhwan and Ree, Moonhor}, year={2005}, month=jan, pages={147–150} }