DOI: 10.1038/nature23905. Layer-by-layer assembly of two-dimensional materials into wafer-scale heterostructures

Layer-by-layer assembly of two-dimensional materials into wafer-scale heterostructures

10.1038/nature23905

Crossref journal-article

Springer Science and Business Media LLC

Nature (297)

Bibliography

Kang, K., Lee, K.-H., Han, Y., Gao, H., Xie, S., Muller, D. A., & Park, J. (2017). Layer-by-layer assembly of two-dimensional materials into wafer-scale heterostructures. Nature, 550(7675), 229â233.

Authors 7

Kibum Kang (first)
Kan-Heng Lee (additional)
Yimo Han (additional)
Hui Gao (additional)
Saien Xie (additional)
David A. Muller (additional)
Jiwoong Park (additional)

References 30 Referenced 539

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Nakamura, S. et al. InGaN-based multi-quantum-well-structure laser diodes. Jpn. J. Appl. Phys. 35, L74–L76 (1996) (10.1143/JJAP.35.L74) / Jpn. J. Appl. Phys. by S Nakamura (1996)
Faist, J. et al. Quantum cascade laser. Science 264, 553–556 (1994) (10.1126/science.264.5158.553) / Science by J Faist (1994)
Geim, A. K. & Grigorieva, I. V. van der Waals heterostructures. Nature 499, 419–425 (2013) (10.1038/nature12385) / Nature by AK Geim (2013)
Liu, Y. et al. van der Waals heterostructures and devices. Nat. Rev. Mater. 1, 16042 (2016) (10.1038/natrevmats.2016.42) / Nat. Rev. Mater. by Y Liu (2016)
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Xu, W. et al. Correlated fluorescence blinking in two-dimensional semiconductor heterostructures. Nature 541, 62–67 (2016) (10.1038/nature20601) / Nature by W Xu (2016)
Hunt, B. et al. Massive Dirac fermions and Hofstadter butterfly in a van der Waals heterostructure. Science 340, 1427–1430 (2013) (10.1126/science.1237240) / Science by B Hunt (2013)
Rivera, P. et al. Valley-polarized exciton dynamics in a 2D semiconductor heterostructure. Science 351, 688–691 (2016) (10.1126/science.aac7820) / Science by P Rivera (2016)
Kim, C.-J. et al. Chiral atomically thin films. Nat. Nanotechnol. 11, 520–524 (2016) (10.1038/nnano.2016.3) / Nat. Nanotechnol. by C-J Kim (2016)
Haigh, S. J. et al. Cross-sectional imaging of individual layers and buried interfaces of graphene-based heterostructures and superlattices. Nat. Mater. 11, 764–767 (2012) (10.1038/nmat3386) / Nat. Mater. by SJ Haigh (2012)
Lee, Y. G. et al. Quantitative analysis of hysteretic reactions at the interface of graphene and SiO2 using the short pulse I–V method. Carbon 60, 453–460 (2013) (10.1016/j.carbon.2013.04.060) / Carbon by YG Lee (2013)
Kretinin, A. V. et al. Electronic properties of graphene encapsulated with different two-dimensional atomic crystals. Nano Lett. 14, 3270–3276 (2014) (10.1021/nl5006542) / Nano Lett. by AV Kretinin (2014)
Chiu, M.-H. et al. Spectroscopic signature for interlayer coupling in MoS2-WSe2 van der Waals stacking. ACS Nano 8, 9649–9656 (2014) (10.1021/nn504229z) / ACS Nano by M-H Chiu (2014)
Liu, K. et al. Evolution of interlayer coupling in twisted molybdenum disulfide bilayers. Nat. Commun. 5, 4966 (2014) (10.1038/ncomms5966) / Nat. Commun. by K Liu (2014)
Kim, D. H. et al. Stretchable and foldable silicon integrated circuits. Science 320, 507–511 (2008) (10.1126/science.1154367) / Science by DH Kim (2008)
Jang, H. et al. Quantum confinement effects in transferrable silicon nanomembranes and their applications on unusual substrates. Nano Lett. 13, 5600–5607 (2013) (10.1021/nl403251e) / Nano Lett. by H Jang (2013)
Li, B. et al. Scalable transfer of suspended two-dimensional single crystals. Nano Lett. 15, 5089–5097 (2015) (10.1021/acs.nanolett.5b01210) / Nano Lett. by B Li (2015)
Kang, K. et al. High-mobility three-atom-thick semiconducting films with wafer-scale homogeneity. Nature 520, 656–660 (2015) (10.1038/nature14417) / Nature by K Kang (2015)
Huang, B. et al. Layer-dependent ferromagnetism in a van der Waals crystal down to the monolayer limit. Nature 546, 270–273 (2017) (10.1038/nature22391) / Nature by B Huang (2017)
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Maraghechi, P., Foroughi-Abari, A., Cadien, K. & Elezzabi, A. Y. Enhanced rectifying response from metal-insulator-insulator-metal junctions. Appl. Phys. Lett. 99, 253503 (2011) (10.1063/1.3671071) / Appl. Phys. Lett. by P Maraghechi (2011)
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Gurarslan, A. et al. Surface-energy-assisted perfect transfer of centimeter-scale monolayer and few-layer MoS2 films onto arbitrary substrates. ACS Nano 8, 11522–11528 (2014) (10.1021/nn5057673) / ACS Nano by A Gurarslan (2014)
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Dates

Type	When
Created	7 years, 11 months ago (Sept. 19, 2017, 12:18 p.m.)
Deposited	2 years, 3 months ago (May 18, 2023, 2:05 p.m.)
Indexed	17 hours, 45 minutes ago (Aug. 21, 2025, 12:51 p.m.)
Issued	7 years, 11 months ago (Sept. 20, 2017)
Published	7 years, 11 months ago (Sept. 20, 2017)
Published Online	7 years, 11 months ago (Sept. 20, 2017)
Published Print	7 years, 10 months ago (Oct. 1, 2017)

Funders 0

None

BibTeX

@article{Kang_2017, title={Layer-by-layer assembly of two-dimensional materials into wafer-scale heterostructures}, volume={550}, ISSN={1476-4687}, url={http://dx.doi.org/10.1038/nature23905}, DOI={10.1038/nature23905}, number={7675}, journal={Nature}, publisher={Springer Science and Business Media LLC}, author={Kang, Kibum and Lee, Kan-Heng and Han, Yimo and Gao, Hui and Xie, Saien and Muller, David A. and Park, Jiwoong}, year={2017}, month=sep, pages={229–233} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        21
      ]
    ],
    "date-time": "2025-08-21T16:51:21Z",
    "timestamp": 1755795081242
  },
  "reference-count": 30,
  "publisher": "Springer Science and Business Media LLC",
  "issue": "7675",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2017,
            9,
            20
          ]
        ],
        "date-time": "2017-09-20T00:00:00Z",
        "timestamp": 1505865600000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "http://www.springer.com/tdm"
    }
  ],
  "content-domain": {
    "domain": [
      "link.springer.com"
    ],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2017,
        10
      ]
    ]
  },
  "DOI": "10.1038/nature23905",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2017,
        9,
        19
      ]
    ],
    "date-time": "2017-09-19T16:18:36Z",
    "timestamp": 1505837916000
  },
  "page": "229-233",
  "update-policy": "http://dx.doi.org/10.1007/springer_crossmark_policy",
  "source": "Crossref",
  "is-referenced-by-count": 539,
  "title": "Layer-by-layer assembly of two-dimensional materials into wafer-scale heterostructures",
  "prefix": "10.1038",
  "volume": "550",
  "author": [
    {
      "given": "Kibum",
      "family": "Kang",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Kan-Heng",
      "family": "Lee",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Yimo",
      "family": "Han",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Hui",
      "family": "Gao",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Saien",
      "family": "Xie",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "David A.",
      "family": "Muller",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Jiwoong",
      "family": "Park",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "297",
  "published-online": {
    "date-parts": [
      [
        2017,
        9,
        20
      ]
    ]
  },
  "reference": [
    {
      "key": "BFnature23905_CR1",
      "first-page": "791",
      "volume-title": "Microelectronic Circuits",
      "author": "AS Sedra",
      "year": "1982",
      "unstructured": "Sedra, A. S. & Smith, K. C. Microelectronic Circuits 2nd edn, 791\u2013801 (Holt, Rinehart and Winston, 1982)"
    },
    {
      "key": "BFnature23905_CR2",
      "doi-asserted-by": "publisher",
      "first-page": "L74",
      "DOI": "10.1143/JJAP.35.L74",
      "volume": "35",
      "author": "S Nakamura",
      "year": "1996",
      "unstructured": "Nakamura, S. et al. InGaN-based multi-quantum-well-structure laser diodes. Jpn. J. Appl. Phys. 35, L74\u2013L76 (1996)",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "BFnature23905_CR3",
      "doi-asserted-by": "publisher",
      "first-page": "553",
      "DOI": "10.1126/science.264.5158.553",
      "volume": "264",
      "author": "J Faist",
      "year": "1994",
      "unstructured": "Faist, J. et al. Quantum cascade laser. Science 264, 553\u2013556 (1994)",
      "journal-title": "Science"
    },
    {
      "key": "BFnature23905_CR4",
      "doi-asserted-by": "publisher",
      "first-page": "419",
      "DOI": "10.1038/nature12385",
      "volume": "499",
      "author": "AK Geim",
      "year": "2013",
      "unstructured": "Geim, A. K. & Grigorieva, I. V. van der Waals heterostructures. Nature 499, 419\u2013425 (2013)",
      "journal-title": "Nature"
    },
    {
      "key": "BFnature23905_CR5",
      "doi-asserted-by": "publisher",
      "first-page": "16042",
      "DOI": "10.1038/natrevmats.2016.42",
      "volume": "1",
      "author": "Y Liu",
      "year": "2016",
      "unstructured": "Liu, Y. et al. van der Waals heterostructures and devices. Nat. Rev. Mater. 1, 16042 (2016)",
      "journal-title": "Nat. Rev. Mater."
    },
    {
      "key": "BFnature23905_CR6",
      "doi-asserted-by": "publisher",
      "first-page": "aac9439",
      "DOI": "10.1126/science.aac9439",
      "volume": "353",
      "author": "KS Novoselov",
      "year": "2016",
      "unstructured": "Novoselov, K. S., Mishchenko, A., Carvalho, A. & Castro Neto, A. H. 2D materials and van der Waals heterostructures. Science 353, aac9439 (2016)",
      "journal-title": "Science"
    },
    {
      "key": "BFnature23905_CR7",
      "doi-asserted-by": "publisher",
      "first-page": "614",
      "DOI": "10.1126/science.1244358",
      "volume": "342",
      "author": "L Wang",
      "year": "2013",
      "unstructured": "Wang, L. et al. One-dimensional electrical contact to a two-dimensional material. Science 342, 614\u2013617 (2013)",
      "journal-title": "Science"
    },
    {
      "key": "BFnature23905_CR8",
      "doi-asserted-by": "publisher",
      "first-page": "62",
      "DOI": "10.1038/nature20601",
      "volume": "541",
      "author": "W Xu",
      "year": "2016",
      "unstructured": "Xu, W. et al. Correlated fluorescence blinking in two-dimensional semiconductor heterostructures. Nature 541, 62\u201367 (2016)",
      "journal-title": "Nature"
    },
    {
      "key": "BFnature23905_CR9",
      "doi-asserted-by": "publisher",
      "first-page": "1427",
      "DOI": "10.1126/science.1237240",
      "volume": "340",
      "author": "B Hunt",
      "year": "2013",
      "unstructured": "Hunt, B. et al. Massive Dirac fermions and Hofstadter butterfly in a van der Waals heterostructure. Science 340, 1427\u20131430 (2013)",
      "journal-title": "Science"
    },
    {
      "key": "BFnature23905_CR10",
      "doi-asserted-by": "publisher",
      "first-page": "688",
      "DOI": "10.1126/science.aac7820",
      "volume": "351",
      "author": "P Rivera",
      "year": "2016",
      "unstructured": "Rivera, P. et al. Valley-polarized exciton dynamics in a 2D semiconductor heterostructure. Science 351, 688\u2013691 (2016)",
      "journal-title": "Science"
    },
    {
      "key": "BFnature23905_CR11",
      "doi-asserted-by": "publisher",
      "first-page": "520",
      "DOI": "10.1038/nnano.2016.3",
      "volume": "11",
      "author": "C-J Kim",
      "year": "2016",
      "unstructured": "Kim, C.-J. et al. Chiral atomically thin films. Nat. Nanotechnol. 11, 520\u2013524 (2016)",
      "journal-title": "Nat. Nanotechnol."
    },
    {
      "key": "BFnature23905_CR12",
      "doi-asserted-by": "publisher",
      "first-page": "764",
      "DOI": "10.1038/nmat3386",
      "volume": "11",
      "author": "SJ Haigh",
      "year": "2012",
      "unstructured": "Haigh, S. J. et al. Cross-sectional imaging of individual layers and buried interfaces of graphene-based heterostructures and superlattices. Nat. Mater. 11, 764\u2013767 (2012)",
      "journal-title": "Nat. Mater."
    },
    {
      "key": "BFnature23905_CR13",
      "doi-asserted-by": "publisher",
      "first-page": "453",
      "DOI": "10.1016/j.carbon.2013.04.060",
      "volume": "60",
      "author": "YG Lee",
      "year": "2013",
      "unstructured": "Lee, Y. G. et al. Quantitative analysis of hysteretic reactions at the interface of graphene and SiO2 using the short pulse I\u2013V method. Carbon 60, 453\u2013460 (2013)",
      "journal-title": "Carbon"
    },
    {
      "key": "BFnature23905_CR14",
      "doi-asserted-by": "publisher",
      "first-page": "3270",
      "DOI": "10.1021/nl5006542",
      "volume": "14",
      "author": "AV Kretinin",
      "year": "2014",
      "unstructured": "Kretinin, A. V. et al. Electronic properties of graphene encapsulated with different two-dimensional atomic crystals. Nano Lett. 14, 3270\u20133276 (2014)",
      "journal-title": "Nano Lett."
    },
    {
      "key": "BFnature23905_CR15",
      "doi-asserted-by": "publisher",
      "first-page": "9649",
      "DOI": "10.1021/nn504229z",
      "volume": "8",
      "author": "M-H Chiu",
      "year": "2014",
      "unstructured": "Chiu, M.-H. et al. Spectroscopic signature for interlayer coupling in MoS2-WSe2 van der Waals stacking. ACS Nano 8, 9649\u20139656 (2014)",
      "journal-title": "ACS Nano"
    },
    {
      "key": "BFnature23905_CR16",
      "doi-asserted-by": "publisher",
      "first-page": "4966",
      "DOI": "10.1038/ncomms5966",
      "volume": "5",
      "author": "K Liu",
      "year": "2014",
      "unstructured": "Liu, K. et al. Evolution of interlayer coupling in twisted molybdenum disulfide bilayers. Nat. Commun. 5, 4966 (2014)",
      "journal-title": "Nat. Commun."
    },
    {
      "key": "BFnature23905_CR17",
      "doi-asserted-by": "publisher",
      "first-page": "507",
      "DOI": "10.1126/science.1154367",
      "volume": "320",
      "author": "DH Kim",
      "year": "2008",
      "unstructured": "Kim, D. H. et al. Stretchable and foldable silicon integrated circuits. Science 320, 507\u2013511 (2008)",
      "journal-title": "Science"
    },
    {
      "key": "BFnature23905_CR18",
      "doi-asserted-by": "publisher",
      "first-page": "5600",
      "DOI": "10.1021/nl403251e",
      "volume": "13",
      "author": "H Jang",
      "year": "2013",
      "unstructured": "Jang, H. et al. Quantum confinement effects in transferrable silicon nanomembranes and their applications on unusual substrates. Nano Lett. 13, 5600\u20135607 (2013)",
      "journal-title": "Nano Lett."
    },
    {
      "key": "BFnature23905_CR19",
      "doi-asserted-by": "publisher",
      "first-page": "5089",
      "DOI": "10.1021/acs.nanolett.5b01210",
      "volume": "15",
      "author": "B Li",
      "year": "2015",
      "unstructured": "Li, B. et al. Scalable transfer of suspended two-dimensional single crystals. Nano Lett. 15, 5089\u20135097 (2015)",
      "journal-title": "Nano Lett."
    },
    {
      "key": "BFnature23905_CR20",
      "doi-asserted-by": "publisher",
      "first-page": "656",
      "DOI": "10.1038/nature14417",
      "volume": "520",
      "author": "K Kang",
      "year": "2015",
      "unstructured": "Kang, K. et al. High-mobility three-atom-thick semiconducting films with wafer-scale homogeneity. Nature 520, 656\u2013660 (2015)",
      "journal-title": "Nature"
    },
    {
      "key": "BFnature23905_CR21",
      "doi-asserted-by": "publisher",
      "first-page": "270",
      "DOI": "10.1038/nature22391",
      "volume": "546",
      "author": "B Huang",
      "year": "2017",
      "unstructured": "Huang, B. et al. Layer-dependent ferromagnetism in a van der Waals crystal down to the monolayer limit. Nature 546, 270\u2013273 (2017)",
      "journal-title": "Nature"
    },
    {
      "key": "BFnature23905_CR22",
      "doi-asserted-by": "publisher",
      "first-page": "033305",
      "DOI": "10.1103/PhysRevB.85.033305",
      "volume": "85",
      "author": "WS Yun",
      "year": "2012",
      "unstructured": "Yun, W. S., Han, S. W., Hong, S. C., Kim, I. G. & Lee, J. D. Thickness and strain effects on electronic structures of transition metal dichalcogenides: 2H-MX2 semiconductors (M = Mo, W; X = S, Se, Te). Phys. Rev. B 85, 033305 (2012)",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "BFnature23905_CR23",
      "doi-asserted-by": "publisher",
      "first-page": "1707",
      "DOI": "10.1021/nl3002205",
      "volume": "12",
      "author": "L Britnell",
      "year": "2012",
      "unstructured": "Britnell, L. et al. Electron tunneling through ultrathin boron nitride crystalline barriers. Nano Lett. 12, 1707\u20131710 (2012)",
      "journal-title": "Nano Lett."
    },
    {
      "key": "BFnature23905_CR24",
      "doi-asserted-by": "publisher",
      "first-page": "1793",
      "DOI": "10.1063/1.1702682",
      "volume": "34",
      "author": "JG Simmons",
      "year": "1963",
      "unstructured": "Simmons, J. G. Generalized formula for the electric tunnel effect between similar electrodes separated by a thin insulating film. J. Appl. Phys. 34, 1793\u20131803 (1963)",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "BFnature23905_CR25",
      "doi-asserted-by": "publisher",
      "first-page": "012111",
      "DOI": "10.1063/1.4774090",
      "volume": "102",
      "author": "J Kang",
      "year": "2013",
      "unstructured": "Kang, J., Tongay, S., Zhou, J., Li, J. & Wu, J. Band offsets and heterostructures of two-dimensional semiconductors. Appl. Phys. Lett. 102, 012111 (2013)",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "BFnature23905_CR26",
      "doi-asserted-by": "publisher",
      "first-page": "253503",
      "DOI": "10.1063/1.3671071",
      "volume": "99",
      "author": "P Maraghechi",
      "year": "2011",
      "unstructured": "Maraghechi, P., Foroughi-Abari, A., Cadien, K. & Elezzabi, A. Y. Enhanced rectifying response from metal-insulator-insulator-metal junctions. Appl. Phys. Lett. 99, 253503 (2011)",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "BFnature23905_CR27",
      "doi-asserted-by": "publisher",
      "first-page": "958",
      "DOI": "10.1126/science.1207186",
      "volume": "334",
      "author": "SH Baek",
      "year": "2011",
      "unstructured": "Baek, S. H. et al. Giant piezoelectricity on Si for hyperactive MEMS. Science 334, 958\u2013961 (2011)",
      "journal-title": "Science"
    },
    {
      "key": "BFnature23905_CR28",
      "doi-asserted-by": "publisher",
      "first-page": "197",
      "DOI": "10.1038/nature18593",
      "volume": "536",
      "author": "J Feng",
      "year": "2016",
      "unstructured": "Feng, J. et al. Single-layer MoS2 nanopores as nanopower generators. Nature 536, 197\u2013200 (2016)",
      "journal-title": "Nature"
    },
    {
      "key": "BFnature23905_CR29",
      "doi-asserted-by": "publisher",
      "first-page": "11522",
      "DOI": "10.1021/nn5057673",
      "volume": "8",
      "author": "A Gurarslan",
      "year": "2014",
      "unstructured": "Gurarslan, A. et al. Surface-energy-assisted perfect transfer of centimeter-scale monolayer and few-layer MoS2 films onto arbitrary substrates. ACS Nano 8, 11522\u201311528 (2014)",
      "journal-title": "ACS Nano"
    },
    {
      "key": "BFnature23905_CR30",
      "doi-asserted-by": "publisher",
      "first-page": "765",
      "DOI": "10.1038/nnano.2015.143",
      "volume": "10",
      "author": "X Xi",
      "year": "2015",
      "unstructured": "Xi, X. et al. Strongly enhanced charge-density-wave order in monolayer NbSe2 . Nat. Nanotechnol. 10, 765\u2013769 (2015)",
      "journal-title": "Nat. Nanotechnol."
    }
  ],
  "container-title": "Nature",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "http://www.nature.com/articles/nature23905.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "http://www.nature.com/articles/nature23905",
      "content-type": "text/html",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "http://www.nature.com/doifinder/10.1038/nature23905",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    },
    {
      "URL": "http://www.nature.com/articles/nature23905.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        5,
        18
      ]
    ],
    "date-time": "2023-05-18T18:05:18Z",
    "timestamp": 1684433118000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://www.nature.com/articles/nature23905"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2017,
        9,
        20
      ]
    ]
  },
  "references-count": 30,
  "journal-issue": {
    "issue": "7675",
    "published-print": {
      "date-parts": [
        [
          2017,
          10
        ]
      ]
    }
  },
  "alternative-id": [
    "BFnature23905"
  ],
  "URL": "http://dx.doi.org/10.1038/nature23905",
  "relation": {},
  "ISSN": [
    "0028-0836",
    "1476-4687"
  ],
  "subject": [],
  "container-title-short": "Nature",
  "published": {
    "date-parts": [
      [
        2017,
        9,
        20
      ]
    ]
  },
  "assertion": [
    {
      "value": "19 December 2016",
      "order": 1,
      "name": "received",
      "label": "Received",
      "group": {
        "name": "ArticleHistory",
        "label": "Article History"
      }
    },
    {
      "value": "26 July 2017",
      "order": 2,
      "name": "accepted",
      "label": "Accepted",
      "group": {
        "name": "ArticleHistory",
        "label": "Article History"
      }
    },
    {
      "value": "20 September 2017",
      "order": 3,
      "name": "first_online",
      "label": "First Online",
      "group": {
        "name": "ArticleHistory",
        "label": "Article History"
      }
    },
    {
      "value": "21 November 2017",
      "order": 4,
      "name": "change_date",
      "label": "Change Date",
      "group": {
        "name": "ArticleHistory",
        "label": "Article History"
      }
    },
    {
      "value": "Correction",
      "order": 5,
      "name": "change_type",
      "label": "Change Type",
      "group": {
        "name": "ArticleHistory",
        "label": "Article History"
      }
    },
    {
      "value": "In the HTML version of the Figure 2 legend, the AFM height image was corrected from '2 mm \u00d7 2 mm' to '2 \u03bcm \u00d7 2 \u03bcm'.",
      "order": 6,
      "name": "change_details",
      "label": "Change Details",
      "group": {
        "name": "ArticleHistory",
        "label": "Article History"
      }
    },
    {
      "value": "The authors declare no competing financial interests.",
      "order": 1,
      "name": "Ethics",
      "group": {
        "name": "EthicsHeading",
        "label": "Competing interests"
      }
    }
  ]
}