Nanoscale holographic interferometry for strain measurements in electronic devices
10.1038/nature07049
Crossref journal-article
Springer Science and Business Media LLC
Nature (297)
Bibliography

Hÿtch, M., Houdellier, F., Hüe, F., & Snoeck, E. (2008). Nanoscale holographic interferometry for strain measurements in electronic devices. Nature, 453(7198), 1086–1089.

Authors 4
  1. Martin Hÿtch (first)
  2. Florent Houdellier (additional)
  3. Florian Hüe (additional)
  4. Etienne Snoeck (additional)
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Dates
Type When
Created 17 years, 2 months ago (June 18, 2008, 1:45 p.m.)
Deposited 2 years, 3 months ago (May 18, 2023, 2:16 p.m.)
Indexed 2 weeks, 2 days ago (Aug. 6, 2025, 9:50 a.m.)
Issued 17 years, 2 months ago (June 1, 2008)
Published 17 years, 2 months ago (June 1, 2008)
Published Print 17 years, 2 months ago (June 1, 2008)
Funders 0

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@article{H_tch_2008, title={Nanoscale holographic interferometry for strain measurements in electronic devices}, volume={453}, ISSN={1476-4687}, url={http://dx.doi.org/10.1038/nature07049}, DOI={10.1038/nature07049}, number={7198}, journal={Nature}, publisher={Springer Science and Business Media LLC}, author={Hÿtch, Martin and Houdellier, Florent and Hüe, Florian and Snoeck, Etienne}, year={2008}, month=jun, pages={1086–1089} }