DOI: 10.1038/nature03090. Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors

Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors

10.1038/nature03090

Crossref journal-article

Springer Science and Business Media LLC

Nature (297)

Bibliography

Nomura, K., Ohta, H., Takagi, A., Kamiya, T., Hirano, M., & Hosono, H. (2004). Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors. Nature, 432(7016), 488â492.

Authors 6

Kenji Nomura (first)
Hiromichi Ohta (additional)
Akihiro Takagi (additional)
Toshio Kamiya (additional)
Masahiro Hirano (additional)
Hideo Hosono (additional)

References 26 Referenced 6,728

Huitema, H. E. A. et al. Plastic transistors in active-matrix displays. Nature 414, 599 (2001) (10.1038/414599a) / Nature by HEA Huitema (2001)
Kagan, C. R. & Andry, P. (eds) Thin Film Transistors (Marcel Dekker, New York, 2003) (10.1201/9780203911778)
Yang, C.-S., Smith, L. L., Arthur, C. B. & Parsons, G. N. Stability of low-temperature amorphous silicon thin film transistors formed on glass and transparent plastic substrates. J. Vac. Sci. Technol. B 18, 683–689 (2000) (10.1116/1.591259) / J. Vac. Sci. Technol. B by C-S Yang (2000)
Carey, P. G., Smith, P. M., Theiss, S. D. & Wickboldt, P. Polysilicon thin film transistors fabricated on low temperature plastic substrates. J. Vac. Sci. Technol. A 17, 1946–1949 (2000) (10.1116/1.581708) / J. Vac. Sci. Technol. A by PG Carey (2000)
Wang, S. C. et al. Device transfer technology by backside etching for poly-Si thin-film transistors on glass/plastic substrate. Jpn. J. Appl. Phys. 42, 1044–1046 (2003) (10.1143/JJAP.42.L1044) / Jpn. J. Appl. Phys. by SC Wang (2003)
Shaw, J. M. & Seidler, P. F. Organic electronics: Introduction. IBM J. Res. Dev. 45, 3–9 (2001) (10.1147/rd.451.0003) / IBM J. Res. Dev. by JM Shaw (2001)
Dimitrakopoulos, C. D. & Malenfant, P. R. L. Organic thin film transistors for large area electronics. Adv. Mater. 14, 99–117 (2002) (10.1002/1521-4095(20020116)14:2<99::AID-ADMA99>3.0.CO;2-9) / Adv. Mater. by CD Dimitrakopoulos (2002)
Choi, H. Y., Kim, S. H. & Jang, J. Self-organized organic thin-film transistors on plastic. Adv. Mater. 16, 732–736 (2004) (10.1002/adma.200306244) / Adv. Mater. by HY Choi (2004)
Lee, J. H. et al. Pentacene thin film transistors fabricated on plastic substrates. Synth. Metals 139, 445–451 (2003) (10.1016/S0379-6779(03)00197-8) / Synth. Metals by JH Lee (2003)
Dimitrakopoulos, C. D. & Mascaro, D. J. Organic thin-film transistors: A review of recent advances. IBM J. Res. Dev. 45, 11–27 (2001) (10.1147/rd.451.0011) / IBM J. Res. Dev. by CD Dimitrakopoulos (2001)
Taur, Y. & Ning, H. T. Fundamentals of Modern VLSI Devices (Cambridge Univ. Press, New York, 1988) / Fundamentals of Modern VLSI Devices by Y Taur (1988)
Kuo, Y. (ed.) Thin Film Transistors: Materials and Processes (Kluwer Academic, Dordrecht, 2004) (10.1007/978-1-4615-0397-2)
Thomas, G. Invisible circuits. Nature 389, 907–908 (1997) (10.1038/39999) / Nature by G Thomas (1997)
Kawazoe, H. et al. P-type electrical conduction in transparent thin films of CuAlO2 . Nature 389, 939–942 (1997) (10.1038/40087) / Nature by H Kawazoe (1997)
Ohta, H. & Hosono, H. Transparent oxide electronics. Mater. Today 7, 42–51 (2004) (10.1016/S1369-7021(04)00288-3) / Mater. Today by H Ohta (2004)
Wager, J. F. Transparent electronics. Science 300, 1245–1246 (2003) (10.1126/science.1085276) / Science by JF Wager (2003)
Hosono, H. Built-in nanostructures in transparent oxides for novel photonic and electronic functions materials. Int. J. Appl. Ceram.Technol 1, 106–118 (2004) (10.1111/j.1744-7402.2004.tb00160.x) / Int. J. Appl. Ceram.Technol by H Hosono (2004)
Madelung, O. (ed.) Technology and Application of Amorphous Silicon (Springer, Berlin, 2000)
Hosono, H. et al. Working hypothesis to explore novel wide band gap electrically conducting amorphous oxides and examples. J. Non-Cryst. Solids 198–200, 165–169 (1996) (10.1016/0022-3093(96)80019-6) / J. Non-Cryst. Solids by H Hosono (1996)
Orita, M. et al. Amorphous transparent conductive oxide InGaO3(ZnO)m (m ≤ 4): a Zn 4s conductor. Phil. Mag. B 81, 501–515 (2001) (10.1080/13642810110045923) / Phil. Mag. B by M Orita (2001)
Mott, N. F. Silicon dioxide and the chalcogenide semiconductors; similarities and differences. Adv. Phys. 26, 363–391 (1977) (10.1080/00018737700101413) / Adv. Phys. by NF Mott (1977)
Narushima, S. et al. Electronic structure and transport properties in the transparent amorphous oxide semiconductor 2CdO·GeO2 . Phys. Rev. B 66, 35203 (2002) (10.1103/PhysRevB.66.035203) / Phys. Rev. B by S Narushima (2002)
Nomura, K. et al. Carrier transport in transparent oxide semiconductor with intrinsic structural randomness probed using single-crystalline InGaO3(ZnO)5 films. Appl. Phys. Lett. 85, 1993–1995 (2004) (10.1063/1.1788897) / Appl. Phys. Lett. by K Nomura (2004)
Nomura, K. et al. Thin film transistor fabricated in single-crystalline transparent oxide semiconductor. Science 300, 1269–1272 (2003) (10.1126/science.1083212) / Science by K Nomura (2003)
Kwo, J. et al. Properties of high k gate dielectrics Gd2O3 and Y2O3 for Si. J. Appl. Phys. 89, 3920–3927 (2001) (10.1063/1.1352688) / J. Appl. Phys. by J Kwo (2001)
Narushima, S. et al. P-type amorphous oxide semiconductor, ZnRh2O4, and room temperature fabrication of amorphous oxide P-N hetero-junction diodes. Adv. Mater. 15, 1409–1413 (2003) (10.1002/adma.200304947) / Adv. Mater. by S Narushima (2003)

Dates

Type	When
Created	20 years, 8 months ago (Nov. 24, 2004, 1:19 p.m.)
Deposited	2 years, 3 months ago (May 18, 2023, 2:28 p.m.)
Indexed	5 hours, 49 minutes ago (Aug. 22, 2025, 12:46 a.m.)
Issued	20 years, 9 months ago (Nov. 1, 2004)
Published	20 years, 9 months ago (Nov. 1, 2004)
Published Print	20 years, 9 months ago (Nov. 1, 2004)

Funders 0

None

BibTeX

@article{Nomura_2004, title={Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors}, volume={432}, ISSN={1476-4687}, url={http://dx.doi.org/10.1038/nature03090}, DOI={10.1038/nature03090}, number={7016}, journal={Nature}, publisher={Springer Science and Business Media LLC}, author={Nomura, Kenji and Ohta, Hiromichi and Takagi, Akihiro and Kamiya, Toshio and Hirano, Masahiro and Hosono, Hideo}, year={2004}, month=nov, pages={488–492} }

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