DOI: 10.1038/nature00972. Sub-ångstrom resolution using aberration corrected electron optics

Sub-ångstrom resolution using aberration corrected electron optics

10.1038/nature00972

Crossref journal-article

Springer Science and Business Media LLC

Nature (297)

Bibliography

Batson, P. E., Dellby, N., & Krivanek, O. L. (2002). Sub-Ã¥ngstrom resolution using aberration corrected electron optics. Nature, 418(6898), 617â620.

Authors 3

P. E. Batson (first)
N. Dellby (additional)
O. L. Krivanek (additional)

References 20 Referenced 792

Scherzer, O. The theoretical resolution limit of the electron microscope. J. Appl. Phys. 20, 20–29 (1949) (10.1063/1.1698233) / J. Appl. Phys. by O Scherzer (1949)
Haider, M., Uhlemann, S., Schwan, E., Kabius, B. & Urban, K. Electron microscopy image enhanced. Nature 392, 768–769 (1998) (10.1038/33823) / Nature by M Haider (1998)
Crewe, A. V., Isaacson, M. & Johnson, D. A simple scanning electron microscope. Rev. Sci. Instrum. 40, 241–246 (1969) (10.1063/1.1683910) / Rev. Sci. Instrum. by AV Crewe (1969)
Voyles, P. M., Muller, D. A., Grazul, J. L., Citrin, P. H. & Gossmann, H.-J. L. Atomic-scale imaging of individual dopant atoms and clusters in highly n-doped bulk Si. Nature 416, 826–829 (2002) (10.1038/416826a) / Nature by PM Voyles (2002)
Crewe, A. V., Wall, J. & Langmore, J. Visibility of a single atom. Science 168, 1338–1340 (1970) (10.1126/science.168.3937.1338) / Science by AV Crewe (1970)
Pennycook, S. J. & Boatner, L. A. Chemically sensitive structure-imaging with a scanning transmission electron microscope. Nature 336, 565–567 (1988) (10.1038/336565a0) / Nature by SJ Pennycook (1988)
Xu, P., Kirkland, E. J., Silcox, J. & Keyse, R. High resolution imaging of silicon (111) using a 100 KeV STEM. Ultramicroscopy 32, 93–102 (1990) (10.1016/0304-3991(90)90027-J) / Ultramicroscopy by P Xu (1990)
Crewe, A. V., Isaacson, M. & Johnson, D. A high resolution electron spectrometer for use in transmission scanning microscopy. Rev. Sci. Instrum. 42, 411–420 (1971) (10.1063/1.1685116) / Rev. Sci. Instrum. by AV Crewe (1971)
Batson, P. E. Simultaneous STEM imaging and electron-energy-loss-spectroscopy with atomic-column sensitivity. Nature 366, 727–728 (1993) (10.1038/366727a0) / Nature by PE Batson (1993)
Muller, D. A., Tzou, Y., Raj, R. & Silcox, J. High resolution EELS at grain boundaries. Nature 366, 725–727 (1993) (10.1038/366725a0) / Nature by DA Muller (1993)
Browning, N. D., Chisholm, M. F. & Pennycook, S. J. Atomic resolution analysis using a scanning transmission electron microscope. Nature 366, 143–146 (1993) (10.1038/366143a0) / Nature by ND Browning (1993)
Dellby, N., Krivanek, O. L., Nellist, P. D., Batson, P. E. & Lupini, A. R. Progress in aberration-corrected scanning transmission electron microscopy. J. Electron. Microsc. 50, 177–185 (2001) / J. Electron. Microsc. by N Dellby (2001)
Batson, P. E. Structural and electronic characterization of a dissociated 60° dislocation in GeSi. Phys. Rev. B 61, 16633–16641 (2000) (10.1103/PhysRevB.61.16633) / Phys. Rev. B by PE Batson (2000)
Ronchi, V. Forty years of history of a grating interferometer. Appl. Opt. 3, 437–450 (1964) (10.1364/AO.3.000437) / Appl. Opt. by V Ronchi (1964)
Zhang, Z. Y. & Lagally, M. G. Atomistic processes in the early stages of thin film growth. Science 276, 377–383 (1997) (10.1126/science.276.5311.377) / Science by ZY Zhang (1997)
Kirkland, E. J. Advanced Computing in Electron Microscopy (Plenum, New York, 1998) (10.1007/978-1-4757-4406-4) / Advanced Computing in Electron Microscopy by EJ Kirkland (1998)
Kawasaki, T. et al. Development of a 1 MV field emission transmission electron microscope. J. Electron. Microsc. 49, 711–718 (2000) (10.1093/oxfordjournals.jmicro.a023863) / J. Electron. Microsc. by T Kawasaki (2000)
O'Keeffe, M. A. et al. Sub-ångstrom high resolution transmission electron microscopy at 300 keV. Ultramicroscopy 89, 215–241 (2001) (10.1016/S0304-3991(01)00094-8) / Ultramicroscopy by MA O'Keeffe (2001)
Zuo, J., Kim, Y., O'Keeffe, M. & Spence, J. C. H. Direct observation of d holes and Cu-Cu bonding in Cu2O. Nature 401, 49–56 (1999) (10.1038/43403) / Nature by J Zuo (1999)
Batson, P. E. Symmetry selected electron energy loss scattering in diamond. Phys. Rev. Lett. 70, 1822–1825 (1993) (10.1103/PhysRevLett.70.1822) / Phys. Rev. Lett. by PE Batson (1993)

Dates

Type	When
Created	22 years, 11 months ago (Sept. 17, 2002, 8:15 p.m.)
Deposited	2 years, 3 months ago (May 18, 2023, 2:09 p.m.)
Indexed	25 minutes ago (Aug. 26, 2025, 9:48 p.m.)
Issued	23 years ago (Aug. 8, 2002)
Published	23 years ago (Aug. 8, 2002)
Published Print	23 years ago (Aug. 8, 2002)

Funders 0

None

BibTeX

@article{Batson_2002, title={Sub-ångstrom resolution using aberration corrected electron optics}, volume={418}, ISSN={1476-4687}, url={http://dx.doi.org/10.1038/nature00972}, DOI={10.1038/nature00972}, number={6898}, journal={Nature}, publisher={Springer Science and Business Media LLC}, author={Batson, P. E. and Dellby, N. and Krivanek, O. L.}, year={2002}, month=aug, pages={617–620} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        27
      ]
    ],
    "date-time": "2025-08-27T01:48:50Z",
    "timestamp": 1756259330739
  },
  "reference-count": 20,
  "publisher": "Springer Science and Business Media LLC",
  "issue": "6898",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2002,
            8,
            8
          ]
        ],
        "date-time": "2002-08-08T00:00:00Z",
        "timestamp": 1028764800000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "http://www.springer.com/tdm"
    },
    {
      "start": {
        "date-parts": [
          [
            2002,
            8,
            8
          ]
        ],
        "date-time": "2002-08-08T00:00:00Z",
        "timestamp": 1028764800000
      },
      "content-version": "vor",
      "delay-in-days": 0,
      "URL": "http://www.springer.com/tdm"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2002,
        8,
        8
      ]
    ]
  },
  "DOI": "10.1038/nature00972",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        9,
        18
      ]
    ],
    "date-time": "2002-09-18T00:15:48Z",
    "timestamp": 1032308148000
  },
  "page": "617-620",
  "source": "Crossref",
  "is-referenced-by-count": 792,
  "title": "Sub-\u00e5ngstrom resolution using aberration corrected electron optics",
  "prefix": "10.1038",
  "volume": "418",
  "author": [
    {
      "given": "P. E.",
      "family": "Batson",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "N.",
      "family": "Dellby",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "O. L.",
      "family": "Krivanek",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "297",
  "reference": [
    {
      "key": "BFnature00972_CR1",
      "doi-asserted-by": "publisher",
      "first-page": "20",
      "DOI": "10.1063/1.1698233",
      "volume": "20",
      "author": "O Scherzer",
      "year": "1949",
      "unstructured": "Scherzer, O. The theoretical resolution limit of the electron microscope. J. Appl. Phys. 20, 20\u201329 (1949)",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "BFnature00972_CR2",
      "doi-asserted-by": "publisher",
      "first-page": "768",
      "DOI": "10.1038/33823",
      "volume": "392",
      "author": "M Haider",
      "year": "1998",
      "unstructured": "Haider, M., Uhlemann, S., Schwan, E., Kabius, B. & Urban, K. Electron microscopy image enhanced. Nature 392, 768\u2013769 (1998)",
      "journal-title": "Nature"
    },
    {
      "key": "BFnature00972_CR3",
      "doi-asserted-by": "publisher",
      "first-page": "241",
      "DOI": "10.1063/1.1683910",
      "volume": "40",
      "author": "AV Crewe",
      "year": "1969",
      "unstructured": "Crewe, A. V., Isaacson, M. & Johnson, D. A simple scanning electron microscope. Rev. Sci. Instrum. 40, 241\u2013246 (1969)",
      "journal-title": "Rev. Sci. Instrum."
    },
    {
      "key": "BFnature00972_CR4",
      "doi-asserted-by": "publisher",
      "first-page": "826",
      "DOI": "10.1038/416826a",
      "volume": "416",
      "author": "PM Voyles",
      "year": "2002",
      "unstructured": "Voyles, P. M., Muller, D. A., Grazul, J. L., Citrin, P. H. & Gossmann, H.-J. L. Atomic-scale imaging of individual dopant atoms and clusters in highly n-doped bulk Si. Nature 416, 826\u2013829 (2002)",
      "journal-title": "Nature"
    },
    {
      "key": "BFnature00972_CR5",
      "doi-asserted-by": "publisher",
      "first-page": "1338",
      "DOI": "10.1126/science.168.3937.1338",
      "volume": "168",
      "author": "AV Crewe",
      "year": "1970",
      "unstructured": "Crewe, A. V., Wall, J. & Langmore, J. Visibility of a single atom. Science 168, 1338\u20131340 (1970)",
      "journal-title": "Science"
    },
    {
      "key": "BFnature00972_CR6",
      "doi-asserted-by": "publisher",
      "first-page": "565",
      "DOI": "10.1038/336565a0",
      "volume": "336",
      "author": "SJ Pennycook",
      "year": "1988",
      "unstructured": "Pennycook, S. J. & Boatner, L. A. Chemically sensitive structure-imaging with a scanning transmission electron microscope. Nature 336, 565\u2013567 (1988)",
      "journal-title": "Nature"
    },
    {
      "key": "BFnature00972_CR7",
      "doi-asserted-by": "publisher",
      "first-page": "93",
      "DOI": "10.1016/0304-3991(90)90027-J",
      "volume": "32",
      "author": "P Xu",
      "year": "1990",
      "unstructured": "Xu, P., Kirkland, E. J., Silcox, J. & Keyse, R. High resolution imaging of silicon (111) using a 100\u2009KeV STEM. Ultramicroscopy 32, 93\u2013102 (1990)",
      "journal-title": "Ultramicroscopy"
    },
    {
      "key": "BFnature00972_CR8",
      "doi-asserted-by": "publisher",
      "first-page": "411",
      "DOI": "10.1063/1.1685116",
      "volume": "42",
      "author": "AV Crewe",
      "year": "1971",
      "unstructured": "Crewe, A. V., Isaacson, M. & Johnson, D. A high resolution electron spectrometer for use in transmission scanning microscopy. Rev. Sci. Instrum. 42, 411\u2013420 (1971)",
      "journal-title": "Rev. Sci. Instrum."
    },
    {
      "key": "BFnature00972_CR9",
      "doi-asserted-by": "publisher",
      "first-page": "727",
      "DOI": "10.1038/366727a0",
      "volume": "366",
      "author": "PE Batson",
      "year": "1993",
      "unstructured": "Batson, P. E. Simultaneous STEM imaging and electron-energy-loss-spectroscopy with atomic-column sensitivity. Nature 366, 727\u2013728 (1993)",
      "journal-title": "Nature"
    },
    {
      "key": "BFnature00972_CR10",
      "doi-asserted-by": "publisher",
      "first-page": "725",
      "DOI": "10.1038/366725a0",
      "volume": "366",
      "author": "DA Muller",
      "year": "1993",
      "unstructured": "Muller, D. A., Tzou, Y., Raj, R. & Silcox, J. High resolution EELS at grain boundaries. Nature 366, 725\u2013727 (1993)",
      "journal-title": "Nature"
    },
    {
      "key": "BFnature00972_CR11",
      "doi-asserted-by": "publisher",
      "first-page": "143",
      "DOI": "10.1038/366143a0",
      "volume": "366",
      "author": "ND Browning",
      "year": "1993",
      "unstructured": "Browning, N. D., Chisholm, M. F. & Pennycook, S. J. Atomic resolution analysis using a scanning transmission electron microscope. Nature 366, 143\u2013146 (1993)",
      "journal-title": "Nature"
    },
    {
      "key": "BFnature00972_CR12",
      "first-page": "177",
      "volume": "50",
      "author": "N Dellby",
      "year": "2001",
      "unstructured": "Dellby, N., Krivanek, O. L., Nellist, P. D., Batson, P. E. & Lupini, A. R. Progress in aberration-corrected scanning transmission electron microscopy. J. Electron. Microsc. 50, 177\u2013185 (2001)",
      "journal-title": "J. Electron. Microsc."
    },
    {
      "key": "BFnature00972_CR13",
      "doi-asserted-by": "publisher",
      "first-page": "16633",
      "DOI": "10.1103/PhysRevB.61.16633",
      "volume": "61",
      "author": "PE Batson",
      "year": "2000",
      "unstructured": "Batson, P. E. Structural and electronic characterization of a dissociated 60\u00b0 dislocation in GeSi. Phys. Rev. B 61, 16633\u201316641 (2000)",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "BFnature00972_CR14",
      "doi-asserted-by": "publisher",
      "first-page": "437",
      "DOI": "10.1364/AO.3.000437",
      "volume": "3",
      "author": "V Ronchi",
      "year": "1964",
      "unstructured": "Ronchi, V. Forty years of history of a grating interferometer. Appl. Opt. 3, 437\u2013450 (1964)",
      "journal-title": "Appl. Opt."
    },
    {
      "key": "BFnature00972_CR15",
      "doi-asserted-by": "publisher",
      "first-page": "377",
      "DOI": "10.1126/science.276.5311.377",
      "volume": "276",
      "author": "ZY Zhang",
      "year": "1997",
      "unstructured": "Zhang, Z. Y. & Lagally, M. G. Atomistic processes in the early stages of thin film growth. Science 276, 377\u2013383 (1997)",
      "journal-title": "Science"
    },
    {
      "key": "BFnature00972_CR16",
      "doi-asserted-by": "publisher",
      "DOI": "10.1007/978-1-4757-4406-4",
      "volume-title": "Advanced Computing in Electron Microscopy",
      "author": "EJ Kirkland",
      "year": "1998",
      "unstructured": "Kirkland, E. J. Advanced Computing in Electron Microscopy (Plenum, New York, 1998)"
    },
    {
      "key": "BFnature00972_CR17",
      "doi-asserted-by": "publisher",
      "first-page": "711",
      "DOI": "10.1093/oxfordjournals.jmicro.a023863",
      "volume": "49",
      "author": "T Kawasaki",
      "year": "2000",
      "unstructured": "Kawasaki, T. et al. Development of a 1\u2009MV field emission transmission electron microscope. J. Electron. Microsc. 49, 711\u2013718 (2000)",
      "journal-title": "J. Electron. Microsc."
    },
    {
      "key": "BFnature00972_CR18",
      "doi-asserted-by": "publisher",
      "first-page": "215",
      "DOI": "10.1016/S0304-3991(01)00094-8",
      "volume": "89",
      "author": "MA O'Keeffe",
      "year": "2001",
      "unstructured": "O'Keeffe, M. A. et al. Sub-\u00e5ngstrom high resolution transmission electron microscopy at 300\u2009keV. Ultramicroscopy 89, 215\u2013241 (2001)",
      "journal-title": "Ultramicroscopy"
    },
    {
      "key": "BFnature00972_CR19",
      "doi-asserted-by": "publisher",
      "first-page": "49",
      "DOI": "10.1038/43403",
      "volume": "401",
      "author": "J Zuo",
      "year": "1999",
      "unstructured": "Zuo, J., Kim, Y., O'Keeffe, M. & Spence, J. C. H. Direct observation of d holes and Cu-Cu bonding in Cu2O. Nature 401, 49\u201356 (1999)",
      "journal-title": "Nature"
    },
    {
      "key": "BFnature00972_CR20",
      "doi-asserted-by": "publisher",
      "first-page": "1822",
      "DOI": "10.1103/PhysRevLett.70.1822",
      "volume": "70",
      "author": "PE Batson",
      "year": "1993",
      "unstructured": "Batson, P. E. Symmetry selected electron energy loss scattering in diamond. Phys. Rev. Lett. 70, 1822\u20131825 (1993)",
      "journal-title": "Phys. Rev. Lett."
    }
  ],
  "updated-by": [
    {
      "updated": {
        "date-parts": [
          [
            2002,
            9,
            5
          ]
        ],
        "date-time": "2002-09-05T00:00:00Z",
        "timestamp": 1031184000000
      },
      "DOI": "10.1038/nature01058",
      "type": "erratum",
      "source": "publisher",
      "label": "Erratum"
    }
  ],
  "container-title": "Nature",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "http://www.nature.com/articles/nature00972.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "http://www.nature.com/articles/nature00972",
      "content-type": "text/html",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "http://www.nature.com/doifinder/10.1038/nature00972",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    },
    {
      "URL": "http://www.nature.com/articles/nature00972.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        5,
        18
      ]
    ],
    "date-time": "2023-05-18T18:09:07Z",
    "timestamp": 1684433347000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://www.nature.com/articles/nature00972"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2002,
        8,
        8
      ]
    ]
  },
  "references-count": 20,
  "journal-issue": {
    "issue": "6898",
    "published-print": {
      "date-parts": [
        [
          2002,
          8,
          8
        ]
      ]
    }
  },
  "alternative-id": [
    "BFnature00972"
  ],
  "URL": "http://dx.doi.org/10.1038/nature00972",
  "relation": {},
  "ISSN": [
    "0028-0836",
    "1476-4687"
  ],
  "subject": [],
  "container-title-short": "Nature",
  "published": {
    "date-parts": [
      [
        2002,
        8,
        8
      ]
    ]
  }
}