DOI: 10.1038/21602. The electronic structure at the atomic scale of ultrathin gate oxides

The electronic structure at the atomic scale of ultrathin gate oxides

10.1038/21602

Crossref journal-article

Springer Science and Business Media LLC

Nature (297)

Bibliography

Muller, D. A., Sorsch, T., Moccio, S., Baumann, F. H., Evans-Lutterodt, K., & Timp, G. (1999). The electronic structure at the atomic scale of ultrathin gate oxides. Nature, 399(6738), 758â761.

Authors 6

D. A. Muller (first)
T. Sorsch (additional)
S. Moccio (additional)
F. H. Baumann (additional)
K. Evans-Lutterodt (additional)
G. Timp (additional)

References 20 Referenced 860

Semiconductor Industry Association The National Technology Roadmap for Semiconductors 71–81 (>Sematech, Austi, 1997).
Timp, G. et al. in IEDM Technical Digest 615–618 (IEDM, San Francisco, 1998).
Cryot-Lackmann, F. Sur le calcul de la cohesion et de la tension superficielle des mataux de transition par une methode de liasions fortes. J. Phys. Chem. Solids 29, 1235–1243 (1968). (10.1016/0022-3697(68)90216-3) / J. Phys. Chem. Solids by F Cryot-Lackmann (1968)
Ourmazd, A., Taylor, D. W., Rentschler, J. A. & Bevk, J. Si to SiO2transformation: interfacial structure and mechanism. Phys. Rev. Lett. 59, 213–216 (1987). (10.1103/PhysRevLett.59.213) / Phys. Rev. Lett. by A Ourmazd (1987)
Himpsel, F., McFeely, F. R., Taleb-Ibrahimi, A., Yarmoff, J. A. & Hollinger, G. Microscopic structure of the SiO2/Si interface. Phys. Rev. B 38, 6084–6096 (1988). (10.1103/PhysRevB.38.6084) / Phys. Rev. B by F Himpsel (1988)
Grunthaner, F. J. & Grunthaner, P. J. Chemical and electronic structure of the Si/SiO2 interface. Mater. Sci. Rep. 1, 65–160 (1986). (10.1016/S0920-2307(86)80001-9) / Mater. Sci. Rep. by FJ Grunthaner (1986)
Pasquarello, A., Hybertsen, M. S. & Car, R. Theory of Si 2p core-level shifts at the Si(001)-SiO2 interface. Phys. Rev. B 53, 10942–10950 (1996). (10.1103/PhysRevB.53.10942) / Phys. Rev. B by A Pasquarello (1996)
McFeely, F. R., Zhang, K. Z., Banaszak Holl, M. M., Lee, S. & Bender, J. E. An inquiry concerning the principles of the Si 2p core-level photoemission shift assignments at the Si/SiO2 interface. J. Vac. Sci. Technol. B 14, 2824–2830 (1996). (10.1116/1.588840) / J. Vac. Sci. Technol. B by FR McFeely (1996)
Muller, D. A., Tzou, Y., Raj, R. & Silcox, J. Mapping sp2 and sp3 states of carbon at sub-nanometre spatial resolution. Nature 366, 725–727 (1993). (10.1038/366725a0) / Nature by DA Muller (1993)
Muller, D. A., Subramanian, S., Sass, S. L., Silcox, J. & Batson, P. E. Near atomic scale studies of electronic structure at grain boundaries in Ni3Al. Phys. Rev. Lett. 75, 4744–4747 (1995). (10.1103/PhysRevLett.75.4744) / Phys. Rev. Lett. by DA Muller (1995)
Batson, P. E. Simultaneous STEM imaging and electron energy-loss spectroscopy with atomic column sensitivity. Nature 366, 727–728 (1993). (10.1038/366727a0) / Nature by PE Batson (1993)
Browning, N. D., Chisholm, M. M. & Pennycook, S. J. Atomic-resolution chemical analysis using a scanning transmission electron microscope. Nature 366, 143–146 (1993). (10.1038/366143a0) / Nature by ND Browning (1993)
Muller, D. A. & Silcox, J. Delocalization in inelastic scattering. Ultramicroscopy 59, 195–213 (1995). (10.1016/0304-3991(95)00029-Z) / Ultramicroscopy by DA Muller (1995)
Egerton, R. F. Electron Energy Loss Spectroscopy in the Electron Microscope2nd edn (Plenum, New York, 1996). (10.1007/978-1-4757-5099-7)
Colliex, C. & Jouffrey, B. Diffusion inelastique des electrons dans une solide par excitation de niveaus atomiques profonds. Phil. Mag. 25, 491–514 (1972). (10.1080/14786437208226818) / Phil. Mag. by C Colliex (1972)
Müller, J. E. & Wilkins, J. Band-structure approach to the x-ray spectra of metals. Phys. Rev. B 29, 4331–4348 (1984). (10.1103/PhysRevB.29.4331) / Phys. Rev. B by JE Müller (1984)
Muller, D. A. et al. Atomic scale observations of metal-induced gap states at {222} MgO/Cu interfaces. Phys. Rev. Lett. 80, 4741–4744 (1998). (10.1103/PhysRevLett.80.4741) / Phys. Rev. Lett. by DA Muller (1998)
Brown, G. E. J, Waychunas, G. A., Stohr, J. & Sette, F. Near-edge structure of oxygen in inorganic oxides: effect of local geometry and cation type. J. Phys. 47, (Colloque C8) 685–689 (1986). (10.1051/jphys:01986004703049100) / J. Phys. by GEJ Brown (1986)
Wallis, D., Gaskell, P. H. & Brydson, R. Oxygen K near-edge spectra of amorphous silicon suboxides. J.Microsc. 180, 307–312 (1993). (10.1111/j.1365-2818.1995.tb03690.x) / J.Microsc. by D Wallis (1993)
Zangwill, A. Physics at Surfaces(Cambridge Univ. Press, New York, 1988). (10.1017/CBO9780511622564)

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 4:41 a.m.)
Deposited	3 years, 8 months ago (Dec. 1, 2021, 3:39 p.m.)
Indexed	3 weeks, 3 days ago (Aug. 2, 2025, 12:01 a.m.)
Issued	26 years, 2 months ago (June 1, 1999)
Published	26 years, 2 months ago (June 1, 1999)
Published Online	26 years, 2 months ago (June 24, 1999)
Published Print	26 years, 2 months ago (June 1, 1999)

Funders 0

None

BibTeX

@article{Muller_1999, title={The electronic structure at the atomic scale of ultrathin gate oxides}, volume={399}, ISSN={1476-4687}, url={http://dx.doi.org/10.1038/21602}, DOI={10.1038/21602}, number={6738}, journal={Nature}, publisher={Springer Science and Business Media LLC}, author={Muller, D. A. and Sorsch, T. and Moccio, S. and Baumann, F. H. and Evans-Lutterodt, K. and Timp, G.}, year={1999}, month=jun, pages={758–761} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        2
      ]
    ],
    "date-time": "2025-08-02T04:01:48Z",
    "timestamp": 1754107308119
  },
  "reference-count": 20,
  "publisher": "Springer Science and Business Media LLC",
  "issue": "6738",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1999,
            6,
            1
          ]
        ],
        "date-time": "1999-06-01T00:00:00Z",
        "timestamp": 928195200000
      },
      "content-version": "unspecified",
      "delay-in-days": 0,
      "URL": "http://www.springer.com/tdm"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1999,
        6
      ]
    ]
  },
  "DOI": "10.1038/21602",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        26
      ]
    ],
    "date-time": "2002-07-26T08:41:22Z",
    "timestamp": 1027672882000
  },
  "page": "758-761",
  "source": "Crossref",
  "is-referenced-by-count": 860,
  "title": "The electronic structure at the atomic scale of ultrathin gate oxides",
  "prefix": "10.1038",
  "volume": "399",
  "author": [
    {
      "given": "D. A.",
      "family": "Muller",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "T.",
      "family": "Sorsch",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "S.",
      "family": "Moccio",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "F. H.",
      "family": "Baumann",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "K.",
      "family": "Evans-Lutterodt",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "G.",
      "family": "Timp",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "297",
  "published-online": {
    "date-parts": [
      [
        1999,
        6,
        24
      ]
    ]
  },
  "reference": [
    {
      "key": "BF21602_CR1",
      "unstructured": "Semiconductor Industry Association The National Technology Roadmap for Semiconductors 71\u201381 (&gt;Sematech, Austi, 1997)."
    },
    {
      "key": "BF21602_CR2",
      "unstructured": "Timp, G. et al. in IEDM Technical Digest 615\u2013618 (IEDM, San Francisco, 1998)."
    },
    {
      "key": "BF21602_CR3",
      "doi-asserted-by": "publisher",
      "first-page": "1235",
      "DOI": "10.1016/0022-3697(68)90216-3",
      "volume": "29",
      "author": "F Cryot-Lackmann",
      "year": "1968",
      "unstructured": "Cryot-Lackmann, F. Sur le calcul de la cohesion et de la tension superficielle des mataux de transition par une methode de liasions fortes. J. Phys. Chem. Solids 29, 1235\u20131243 (1968).",
      "journal-title": "J. Phys. Chem. Solids"
    },
    {
      "key": "BF21602_CR4",
      "doi-asserted-by": "publisher",
      "first-page": "213",
      "DOI": "10.1103/PhysRevLett.59.213",
      "volume": "59",
      "author": "A Ourmazd",
      "year": "1987",
      "unstructured": "Ourmazd, A., Taylor, D. W., Rentschler, J. A. & Bevk, J. Si to SiO2transformation: interfacial structure and mechanism. Phys. Rev. Lett. 59, 213\u2013216 (1987).",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "BF21602_CR5",
      "doi-asserted-by": "publisher",
      "first-page": "6084",
      "DOI": "10.1103/PhysRevB.38.6084",
      "volume": "38",
      "author": "F Himpsel",
      "year": "1988",
      "unstructured": "Himpsel, F., McFeely, F. R., Taleb-Ibrahimi, A., Yarmoff, J. A. & Hollinger, G. Microscopic structure of the SiO2/Si interface. Phys. Rev. B 38, 6084\u20136096 (1988).",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "BF21602_CR6",
      "doi-asserted-by": "publisher",
      "first-page": "65",
      "DOI": "10.1016/S0920-2307(86)80001-9",
      "volume": "1",
      "author": "FJ Grunthaner",
      "year": "1986",
      "unstructured": "Grunthaner, F. J. & Grunthaner, P. J. Chemical and electronic structure of the Si/SiO2 interface. Mater. Sci. Rep. 1, 65\u2013160 (1986).",
      "journal-title": "Mater. Sci. Rep."
    },
    {
      "key": "BF21602_CR7",
      "doi-asserted-by": "publisher",
      "first-page": "10942",
      "DOI": "10.1103/PhysRevB.53.10942",
      "volume": "53",
      "author": "A Pasquarello",
      "year": "1996",
      "unstructured": "Pasquarello, A., Hybertsen, M. S. & Car, R. Theory of Si 2p core-level shifts at the Si(001)-SiO2 interface. Phys. Rev. B 53, 10942\u201310950 (1996).",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "BF21602_CR8",
      "doi-asserted-by": "publisher",
      "first-page": "2824",
      "DOI": "10.1116/1.588840",
      "volume": "14",
      "author": "FR McFeely",
      "year": "1996",
      "unstructured": "McFeely, F. R., Zhang, K. Z., Banaszak Holl, M. M., Lee, S. & Bender, J. E. An inquiry concerning the principles of the Si 2p core-level photoemission shift assignments at the Si/SiO2 interface. J. Vac. Sci. Technol. B 14, 2824\u20132830 (1996).",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "BF21602_CR9",
      "doi-asserted-by": "publisher",
      "first-page": "725",
      "DOI": "10.1038/366725a0",
      "volume": "366",
      "author": "DA Muller",
      "year": "1993",
      "unstructured": "Muller, D. A., Tzou, Y., Raj, R. & Silcox, J. Mapping sp2 and sp3 states of carbon at sub-nanometre spatial resolution. Nature 366, 725\u2013727 (1993).",
      "journal-title": "Nature"
    },
    {
      "key": "BF21602_CR10",
      "doi-asserted-by": "publisher",
      "first-page": "4744",
      "DOI": "10.1103/PhysRevLett.75.4744",
      "volume": "75",
      "author": "DA Muller",
      "year": "1995",
      "unstructured": "Muller, D. A., Subramanian, S., Sass, S. L., Silcox, J. & Batson, P. E. Near atomic scale studies of electronic structure at grain boundaries in Ni3Al. Phys. Rev. Lett. 75, 4744\u20134747 (1995).",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "BF21602_CR11",
      "doi-asserted-by": "publisher",
      "first-page": "727",
      "DOI": "10.1038/366727a0",
      "volume": "366",
      "author": "PE Batson",
      "year": "1993",
      "unstructured": "Batson, P. E. Simultaneous STEM imaging and electron energy-loss spectroscopy with atomic column sensitivity. Nature 366, 727\u2013728 (1993).",
      "journal-title": "Nature"
    },
    {
      "key": "BF21602_CR12",
      "doi-asserted-by": "publisher",
      "first-page": "143",
      "DOI": "10.1038/366143a0",
      "volume": "366",
      "author": "ND Browning",
      "year": "1993",
      "unstructured": "Browning, N. D., Chisholm, M. M. & Pennycook, S. J. Atomic-resolution chemical analysis using a scanning transmission electron microscope. Nature 366, 143\u2013146 (1993).",
      "journal-title": "Nature"
    },
    {
      "key": "BF21602_CR13",
      "doi-asserted-by": "publisher",
      "first-page": "195",
      "DOI": "10.1016/0304-3991(95)00029-Z",
      "volume": "59",
      "author": "DA Muller",
      "year": "1995",
      "unstructured": "Muller, D. A. & Silcox, J. Delocalization in inelastic scattering. Ultramicroscopy 59, 195\u2013213 (1995).",
      "journal-title": "Ultramicroscopy"
    },
    {
      "key": "BF21602_CR14",
      "doi-asserted-by": "crossref",
      "unstructured": "Egerton, R. F. Electron Energy Loss Spectroscopy in the Electron Microscope2nd edn (Plenum, New York, 1996).",
      "DOI": "10.1007/978-1-4757-5099-7"
    },
    {
      "key": "BF21602_CR15",
      "doi-asserted-by": "publisher",
      "first-page": "491",
      "DOI": "10.1080/14786437208226818",
      "volume": "25",
      "author": "C Colliex",
      "year": "1972",
      "unstructured": "Colliex, C. & Jouffrey, B. Diffusion inelastique des electrons dans une solide par excitation de niveaus atomiques profonds. Phil. Mag. 25, 491\u2013514 (1972).",
      "journal-title": "Phil. Mag."
    },
    {
      "key": "BF21602_CR16",
      "doi-asserted-by": "publisher",
      "first-page": "4331",
      "DOI": "10.1103/PhysRevB.29.4331",
      "volume": "29",
      "author": "JE M\u00fcller",
      "year": "1984",
      "unstructured": "M\u00fcller, J. E. & Wilkins, J. Band-structure approach to the x-ray spectra of metals. Phys. Rev. B 29, 4331\u20134348 (1984).",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "BF21602_CR17",
      "doi-asserted-by": "publisher",
      "first-page": "4741",
      "DOI": "10.1103/PhysRevLett.80.4741",
      "volume": "80",
      "author": "DA Muller",
      "year": "1998",
      "unstructured": "Muller, D. A. et al. Atomic scale observations of metal-induced gap states at {222} MgO/Cu interfaces. Phys. Rev. Lett. 80, 4741\u20134744 (1998).",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "BF21602_CR18",
      "doi-asserted-by": "publisher",
      "first-page": "685",
      "DOI": "10.1051/jphys:01986004703049100",
      "volume": "47",
      "author": "GEJ Brown",
      "year": "1986",
      "unstructured": "Brown, G. E. J, Waychunas, G. A., Stohr, J. & Sette, F. Near-edge structure of oxygen in inorganic oxides: effect of local geometry and cation type. J. Phys. 47, (Colloque C8) 685\u2013689 (1986).",
      "journal-title": "J. Phys."
    },
    {
      "key": "BF21602_CR19",
      "doi-asserted-by": "publisher",
      "first-page": "307",
      "DOI": "10.1111/j.1365-2818.1995.tb03690.x",
      "volume": "180",
      "author": "D Wallis",
      "year": "1993",
      "unstructured": "Wallis, D., Gaskell, P. H. & Brydson, R. Oxygen K near-edge spectra of amorphous silicon suboxides. J.Microsc. 180, 307\u2013312 (1993).",
      "journal-title": "J.Microsc."
    },
    {
      "key": "BF21602_CR20",
      "doi-asserted-by": "crossref",
      "unstructured": "Zangwill, A. Physics at Surfaces(Cambridge Univ. Press, New York, 1988).",
      "DOI": "10.1017/CBO9780511622564"
    }
  ],
  "container-title": "Nature",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "http://www.nature.com/articles/21602.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "http://www.nature.com/articles/21602",
      "content-type": "text/html",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "http://www.nature.com/articles/21602.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2021,
        12,
        1
      ]
    ],
    "date-time": "2021-12-01T20:39:08Z",
    "timestamp": 1638391148000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://www.nature.com/articles/21602"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1999,
        6
      ]
    ]
  },
  "references-count": 20,
  "journal-issue": {
    "issue": "6738",
    "published-print": {
      "date-parts": [
        [
          1999,
          6
        ]
      ]
    }
  },
  "alternative-id": [
    "BF21602"
  ],
  "URL": "http://dx.doi.org/10.1038/21602",
  "relation": {},
  "ISSN": [
    "0028-0836",
    "1476-4687"
  ],
  "subject": [],
  "container-title-short": "Nature",
  "published": {
    "date-parts": [
      [
        1999,
        6
      ]
    ]
  }
}