DOI: 10.1023/a:1018530406568. The influence of backgrinding on the fracture strength of 100 mm diameter (1 1 1) p-type silicon wafers

The influence of backgrinding on the fracture strength of 100 mm diameter (1 1 1) p-type silicon wafers

10.1023/a:1018530406568

Crossref journal-article

Springer Science and Business Media LLC

Journal of Materials Science (297)

Bibliography

McGUIRE, K., DANYLUK, S., BAKER, T. L., RUPNOW, J. W., & McLAUGHLIN, D. (1997). The influence of backgrinding on the fracture strength of 100 mm diameter (1 1 1) p-type silicon wafers. Journal of Materials Science, 32(4), 1017â1024.

Authors 5

K McGUIRE (first)
S DANYLUK (additional)
T. L BAKER (additional)
J. W RUPNOW (additional)
D McLAUGHLIN (additional)

References 12 Referenced 17

W. P. RUNYAN, “Silicon SemiconductorTechnology”, (McGraw Hill, New York, 1985) p. 233. / Silicon SemiconductorTechnology by W. P. Runyan (1985)
S. DANYLUK and S. W. LEE, in “ASM Handbook”, Vol. 18, “Friction, Lubrication andWearTechnology”, edited by P. J. Blau (ASM International, Metals Park, Ohio, 1992) p. 685. / Friction, Lubrication andWearTechnology by S. Danyluk (1992)
ASTM F394-74T “Tentative Test Method for Biaxial Flexure Strength (Modulus of Rupture) of Ceramic Substrates”, (American Society for Testing and Materials, Philadelphia, PA, 1974).
C. P. CHEN and M. H. LEIPOLD, Am. Ceram. Soc. Ceram. Bull. 59 (1980) 469. / Am. Ceram. Soc. Ceram. Bull. by C. P. Chen (1980)
S. TIMOSHENKO and S. WOINOWSKY-KRIEGER, “Theory of Plates and Shells”, 2nd Edn (McGraw-Hill, New York, 1959). / Theory of Plates and Shells by S. Timoshenko (1959)
Z. NADAI, Z. Physik 23 (1922) 366. / Z. Physik by Z. Nadai (1922)
W. A. BASSALI, Proc. Cambridge Philos. Soc. 53 (1957) 728. (10.1017/S0305004100032795) / Proc. Cambridge Philos. Soc. by W. A. Bassali (1957)
J. J. WORTMAN and R. A. EVANS, J. Appl. Phys. 36(1) (1965) 153. (10.1063/1.1713863) / J. Appl. Phys. by J. J. Wortman (1965)
F. SHIMURA, “Semiconductor Silicon CrystalTechnology” (Academic Press, San Diego, 1989). / Semiconductor Silicon CrystalTechnology by F. Shimura (1989)
W. WEIBULL, Acta Metall. 11 (1963) 725. (10.1016/0001-6160(63)90011-7) / Acta Metall. by W. Weibull (1963)
RICHARD W. HERTZBERG, “Deformation and Fracture Mechanics of Engineering Materials”, 2nd Edn, (Wiley, New York, 1983). / Deformation and Fracture Mechanics of Engineering Materials by R. W. Hertzberg (1983)
C. P. CHEN and M. LIEPOLD, in “Proceedings of the15th IEEE Photovoltaic Specialists Conference”, Kissimee, 1981 (IEEE, New York) p. 1122.

Dates

Type	When
Created	22 years, 6 months ago (Feb. 6, 2003, 6:01 p.m.)
Deposited	2 months, 1 week ago (June 16, 2025, 7:50 a.m.)
Indexed	2 weeks, 4 days ago (Aug. 5, 2025, 8:50 a.m.)
Issued	28 years, 6 months ago (Feb. 1, 1997)
Published	28 years, 6 months ago (Feb. 1, 1997)
Published Online	28 years, 6 months ago (Feb. 1, 1997)
Published Print	28 years, 6 months ago (Feb. 1, 1997)

Funders 0

None

BibTeX

@article{McGUIRE_1997, title={The influence of backgrinding on the fracture strength of 100 mm diameter (1 1 1) p-type silicon wafers}, volume={32}, ISSN={1573-4803}, url={http://dx.doi.org/10.1023/a:1018530406568}, DOI={10.1023/a:1018530406568}, number={4}, journal={Journal of Materials Science}, publisher={Springer Science and Business Media LLC}, author={McGUIRE, K and DANYLUK, S and BAKER, T. L and RUPNOW, J. W and McLAUGHLIN, D}, year={1997}, month=feb, pages={1017–1024} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        5
      ]
    ],
    "date-time": "2025-08-05T12:50:06Z",
    "timestamp": 1754398206511,
    "version": "3.41.0"
  },
  "reference-count": 12,
  "publisher": "Springer Science and Business Media LLC",
  "issue": "4",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1997,
            2,
            1
          ]
        ],
        "date-time": "1997-02-01T00:00:00Z",
        "timestamp": 854755200000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.springernature.com/gp/researchers/text-and-data-mining"
    },
    {
      "start": {
        "date-parts": [
          [
            1997,
            2,
            1
          ]
        ],
        "date-time": "1997-02-01T00:00:00Z",
        "timestamp": 854755200000
      },
      "content-version": "vor",
      "delay-in-days": 0,
      "URL": "https://www.springernature.com/gp/researchers/text-and-data-mining"
    }
  ],
  "content-domain": {
    "domain": [
      "link.springer.com"
    ],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1997,
        2
      ]
    ]
  },
  "DOI": "10.1023/a:1018530406568",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2003,
        2,
        6
      ]
    ],
    "date-time": "2003-02-06T23:01:37Z",
    "timestamp": 1044572497000
  },
  "page": "1017-1024",
  "update-policy": "https://doi.org/10.1007/springer_crossmark_policy",
  "source": "Crossref",
  "is-referenced-by-count": 17,
  "title": "The influence of backgrinding on the fracture strength of 100 mm diameter (1 1 1) p-type silicon wafers",
  "prefix": "10.1007",
  "volume": "32",
  "author": [
    {
      "given": "K",
      "family": "McGUIRE",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "S",
      "family": "DANYLUK",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "T. L",
      "family": "BAKER",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "J. W",
      "family": "RUPNOW",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "D",
      "family": "McLAUGHLIN",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "297",
  "published-online": {
    "date-parts": [
      [
        1997,
        2,
        1
      ]
    ]
  },
  "reference": [
    {
      "key": "175068_CR1",
      "first-page": "233",
      "volume-title": "Silicon SemiconductorTechnology",
      "author": "W. P. Runyan",
      "year": "1985",
      "unstructured": "W. P. RUNYAN, \u201cSilicon SemiconductorTechnology\u201d, (McGraw Hill, New York, 1985) p. 233."
    },
    {
      "key": "175068_CR2",
      "first-page": "685",
      "volume-title": "Friction, Lubrication andWearTechnology",
      "author": "S. Danyluk",
      "year": "1992",
      "unstructured": "S. DANYLUK and S. W. LEE, in \u201cASM Handbook\u201d, Vol. 18, \u201cFriction, Lubrication andWearTechnology\u201d, edited by P. J. Blau (ASM International, Metals Park, Ohio, 1992) p. 685."
    },
    {
      "key": "175068_CR3",
      "unstructured": "ASTM F394-74T \u201cTentative Test Method for Biaxial Flexure Strength (Modulus of Rupture) of Ceramic Substrates\u201d, (American Society for Testing and Materials, Philadelphia, PA, 1974)."
    },
    {
      "key": "175068_CR4",
      "first-page": "469",
      "volume": "59",
      "author": "C. P. Chen",
      "year": "1980",
      "unstructured": "C. P. CHEN and M. H. LEIPOLD, Am. Ceram. Soc. Ceram. Bull. 59 (1980) 469.",
      "journal-title": "Am. Ceram. Soc. Ceram. Bull."
    },
    {
      "key": "175068_CR5",
      "volume-title": "Theory of Plates and Shells",
      "author": "S. Timoshenko",
      "year": "1959",
      "unstructured": "S. TIMOSHENKO and S. WOINOWSKY-KRIEGER, \u201cTheory of Plates and Shells\u201d, 2nd Edn (McGraw-Hill, New York, 1959).",
      "edition": "2nd Edn"
    },
    {
      "key": "175068_CR6",
      "first-page": "366",
      "volume": "23",
      "author": "Z. Nadai",
      "year": "1922",
      "unstructured": "Z. NADAI, Z. Physik\n23 (1922) 366.",
      "journal-title": "Z. Physik"
    },
    {
      "key": "175068_CR7",
      "doi-asserted-by": "publisher",
      "first-page": "728",
      "DOI": "10.1017/S0305004100032795",
      "volume": "53",
      "author": "W. A. Bassali",
      "year": "1957",
      "unstructured": "W. A. BASSALI, Proc. Cambridge Philos. Soc. 53 (1957) 728.",
      "journal-title": "Proc. Cambridge Philos. Soc."
    },
    {
      "issue": "1",
      "key": "175068_CR8",
      "doi-asserted-by": "publisher",
      "first-page": "153",
      "DOI": "10.1063/1.1713863",
      "volume": "36",
      "author": "J. J. Wortman",
      "year": "1965",
      "unstructured": "J. J. WORTMAN and R. A. EVANS, J. Appl. Phys. 36(1) (1965) 153.",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "175068_CR9",
      "volume-title": "Semiconductor Silicon CrystalTechnology",
      "author": "F. Shimura",
      "year": "1989",
      "unstructured": "F. SHIMURA, \u201cSemiconductor Silicon CrystalTechnology\u201d (Academic Press, San Diego, 1989)."
    },
    {
      "key": "175068_CR10",
      "doi-asserted-by": "publisher",
      "first-page": "725",
      "DOI": "10.1016/0001-6160(63)90011-7",
      "volume": "11",
      "author": "W. Weibull",
      "year": "1963",
      "unstructured": "W. WEIBULL, Acta Metall. 11 (1963) 725.",
      "journal-title": "Acta Metall."
    },
    {
      "key": "175068_CR11",
      "volume-title": "Deformation and Fracture Mechanics of Engineering Materials",
      "author": "R. W. Hertzberg",
      "year": "1983",
      "unstructured": "RICHARD W. HERTZBERG, \u201cDeformation and Fracture Mechanics of Engineering Materials\u201d, 2nd Edn, (Wiley, New York, 1983).",
      "edition": "2nd Edn"
    },
    {
      "key": "175068_CR12",
      "unstructured": "C. P. CHEN and M. LIEPOLD, in \u201cProceedings of the15th IEEE Photovoltaic Specialists Conference\u201d, Kissimee, 1981 (IEEE, New York) p. 1122."
    }
  ],
  "container-title": "Journal of Materials Science",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://link.springer.com/content/pdf/10.1023/A:1018530406568.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://link.springer.com/article/10.1023/A:1018530406568/fulltext.html",
      "content-type": "text/html",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://link.springer.com/content/pdf/10.1023/A:1018530406568.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2025,
        6,
        16
      ]
    ],
    "date-time": "2025-06-16T11:50:58Z",
    "timestamp": 1750074658000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://link.springer.com/10.1023/A:1018530406568"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1997,
        2
      ]
    ]
  },
  "references-count": 12,
  "journal-issue": {
    "issue": "4",
    "published-print": {
      "date-parts": [
        [
          1997,
          2
        ]
      ]
    }
  },
  "alternative-id": [
    "175068"
  ],
  "URL": "http://dx.doi.org/10.1023/A:1018530406568",
  "relation": {},
  "ISSN": [
    "0022-2461",
    "1573-4803"
  ],
  "subject": [],
  "container-title-short": "Journal of Materials Science",
  "published": {
    "date-parts": [
      [
        1997,
        2
      ]
    ]
  },
  "assertion": [
    {
      "value": "1 February 1997",
      "order": 1,
      "name": "first_online",
      "label": "First Online",
      "group": {
        "name": "ArticleHistory",
        "label": "Article History"
      }
    }
  ]
}