DOI: 10.1021/jp027701y. Structural Characterization of Mesoporous Organosilica Films for Ultralow-<i>k</i> Dielectrics

Structural Characterization of Mesoporous Organosilica Films for Ultralow-k Dielectrics

10.1021/jp027701y

Crossref journal-article

American Chemical Society (ACS)

The Journal of Physical Chemistry B (316)

Bibliography

de Theije, F. K., Balkenende, A. R., Verheijen, M. A., Baklanov, M. R., Mogilnikov, K. P., & Furukawa, Y. (2003). Structural Characterization of Mesoporous Organosilica Films for Ultralow-k Dielectrics. The Journal of Physical Chemistry B, 107(18), 4280â4289.

Authors 6

Femke K. de Theije (first)
A. Ruud Balkenende (additional)
Marcel A. Verheijen (additional)
Mikhail R. Baklanov (additional)
Konstantin P. Mogilnikov (additional)
Yukiko Furukawa (additional)

References 33 Referenced 105

{'key': 'jp027701yb00001/jp027701yb00001_1', 'volume-title': 'Microchip Fabrication:\u2009 A Practical Guide to Semiconductor Processing', 'volume': '1', 'author': 'Zant P. V.', 'year': '2000', 'edition': '4'} / Microchip Fabrication: A Practical Guide to Semiconductor Processing by Zant P. V. (2000)
International TechnologyRoad mapfor Semiconductors; Semiconductor Industry Association: Austin, TX, 2001.
10.1147/rd.443.0379 / IBM J. Mater. Res. Develop. by Theis T. N. (2000)
{'key': 'jp027701yb00004/jp027701yb00004_1', 'volume-title': 'Solid State Technol', 'author': 'Lin X. W.', 'year': '2000'} / Solid State Technol by Lin X. W. (2000)
{'key': 'jp027701yb00005/jp027701yb00005_1', 'volume-title': 'Semiconductor International', 'author': 'Peters L.', 'year': '1999'} / Semiconductor International by Peters L. (1999)
International TechnologyRoad mapfor Semiconductors; Semiconductor Industry Association: Austin, TX, 1999.
{'key': 'jp027701yb00007/jp027701yb00007_1', 'volume-title': 'International Sematech ultralow-k workshop', 'author': 'Miller R. D.', 'year': '2002'} / International Sematech ultralow-k workshop by Miller R. D. (2002)
{'key': 'jp027701yb00008/jp027701yb00008_1', 'volume-title': 'International Sematech ultralow-k workshop', 'author': 'Atsushi S.', 'year': '2002'} / International Sematech ultralow-k workshop by Atsushi S. (2002)
{'key': 'jp027701yb00009/jp027701yb00009_1', 'volume-title': 'http://www.jysong.idv.tw/cu/articles/cu0010.htm', 'author': 'Golden J. H.', 'year': '2001'} / http://www.jysong.idv.tw/cu/articles/cu0010.htm by Golden J. H. (2001)
{'key': 'jp027701yb00010/jp027701yb00010_1', 'volume-title': 'International Sematech ultralow-k workshop', 'author': 'Fan H.', 'year': '2002'} / International Sematech ultralow-k workshop by Fan H. (2002)
10.1039/CC9960001367 / Chem. Commun. by Burkett S. (1996)
10.1016/S0040-6090(96)09163-8 / Thin Solid Films by Schneider D. (1997)
10.1063/1.1478775 / Appl. Phys. Lett. by Flannery C. M. (2002)
10.1149/1.1517771 / Electrochem. Sol. State Lett. by Mogilnikov K. P. (2002)
10.1119/1.12734 / Am. J. Phys. by Aspnes D. E. (1982)
10.1002/adma.200390028 / Adv. Mater. by Balkenende A. R. (2003)
10.1021/ja974025i / J. Am. Chem. Soc. by Zhao D. (1998)
10.1038/368317a0 / Nature by Huo Q. (1994)
10.1021/cm00044a016 / Chem. Mater. by Huo Q. (1994)
10.1023/A:1020776121896 / J. Sol-Gel Sci. Technol. by Alonso B. (2003)
10.1111/j.1365-2818.1986.tb02768.x / J. Microscopy by Jacobs J. W. M. (1986)
10.1016/S0167-9317(02)00807-9 / Microelectron. Eng. by Baklanov M. R. (2002)
10.2109/jcersj.106.353 / J. Ceram. Soc. Jpn. by Takei T. (1998)
{'key': 'jp027701yb00024/jp027701yb00024_1', 'volume-title': 'Surface Area and Porosity', 'author': 'Gregg S. J.', 'year': '1967'} / Surface Area and Porosity by Gregg S. J. (1967)
10.1021/jp026106t / J. Phys. Chem. B by Bordiga S. (2002)
10.1149/1.2044168 / J. Eletrochem. Soc. by Nakano T. (1995)
10.1366/0003702011953469 / Appl. Spectrosc. by Wang C. Y. (2001)
10.1038/416304a / Nature by Inagaki S. (2002)
10.1038/nature00785 / Nature by Davis M. E. (2002)
10.1038/38699 / Nature by Lu Y. (1997)
10.1039/b003178j / J. Mater. Chem. by Grosso D. (2000)
10.1098/rspa.1909.0021 / Proc. R. Soc. London Ser. A by Stoney G. (1909)
10.1149/1.1485776 / J. Electrochem. Soc. by Chang T. C. (2002)

Dates

Type	When
Created	22 years, 4 months ago (May 1, 2003, 1 a.m.)
Deposited	3 years, 11 months ago (Oct. 4, 2021, 10:15 a.m.)
Indexed	1 month, 3 weeks ago (July 16, 2025, 8:44 a.m.)
Issued	22 years, 4 months ago (April 11, 2003)
Published	22 years, 4 months ago (April 11, 2003)
Published Online	22 years, 4 months ago (April 11, 2003)
Published Print	22 years, 4 months ago (May 1, 2003)

Funders 0

None

BibTeX

@article{de_Theije_2003, title={Structural Characterization of Mesoporous Organosilica Films for Ultralow-k Dielectrics}, volume={107}, ISSN={1520-5207}, url={http://dx.doi.org/10.1021/jp027701y}, DOI={10.1021/jp027701y}, number={18}, journal={The Journal of Physical Chemistry B}, publisher={American Chemical Society (ACS)}, author={de Theije, Femke K. and Balkenende, A. Ruud and Verheijen, Marcel A. and Baklanov, Mikhail R. and Mogilnikov, Konstantin P. and Furukawa, Yukiko}, year={2003}, month=apr, pages={4280–4289} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        16
      ]
    ],
    "date-time": "2025-07-16T12:44:08Z",
    "timestamp": 1752669848261
  },
  "reference-count": 33,
  "publisher": "American Chemical Society (ACS)",
  "issue": "18",
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2003,
        5,
        1
      ]
    ]
  },
  "DOI": "10.1021/jp027701y",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2003,
        5,
        1
      ]
    ],
    "date-time": "2003-05-01T05:00:28Z",
    "timestamp": 1051765228000
  },
  "page": "4280-4289",
  "source": "Crossref",
  "is-referenced-by-count": 105,
  "title": "Structural Characterization of Mesoporous Organosilica Films for Ultralow-<i>k</i> Dielectrics",
  "prefix": "10.1021",
  "volume": "107",
  "author": [
    {
      "given": "Femke K.",
      "family": "de Theije",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Philips Research Laboratories, Prof. Holstlaan 4 (WA11), 5656 AA Eindhoven, The Netherlands, Philips Centre for Industrial Technology, Prof. Holstlaan 4 (WY42), 5656 AA Eindhoven, The Netherlands, XPEQT at IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, and Philips Research Leuven, Kapeldreef 75, B-3001 Leuven, Belgium"
        }
      ]
    },
    {
      "given": "A. Ruud",
      "family": "Balkenende",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Philips Research Laboratories, Prof. Holstlaan 4 (WA11), 5656 AA Eindhoven, The Netherlands, Philips Centre for Industrial Technology, Prof. Holstlaan 4 (WY42), 5656 AA Eindhoven, The Netherlands, XPEQT at IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, and Philips Research Leuven, Kapeldreef 75, B-3001 Leuven, Belgium"
        }
      ]
    },
    {
      "given": "Marcel A.",
      "family": "Verheijen",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Philips Research Laboratories, Prof. Holstlaan 4 (WA11), 5656 AA Eindhoven, The Netherlands, Philips Centre for Industrial Technology, Prof. Holstlaan 4 (WY42), 5656 AA Eindhoven, The Netherlands, XPEQT at IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, and Philips Research Leuven, Kapeldreef 75, B-3001 Leuven, Belgium"
        }
      ]
    },
    {
      "given": "Mikhail R.",
      "family": "Baklanov",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Philips Research Laboratories, Prof. Holstlaan 4 (WA11), 5656 AA Eindhoven, The Netherlands, Philips Centre for Industrial Technology, Prof. Holstlaan 4 (WY42), 5656 AA Eindhoven, The Netherlands, XPEQT at IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, and Philips Research Leuven, Kapeldreef 75, B-3001 Leuven, Belgium"
        }
      ]
    },
    {
      "given": "Konstantin P.",
      "family": "Mogilnikov",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Philips Research Laboratories, Prof. Holstlaan 4 (WA11), 5656 AA Eindhoven, The Netherlands, Philips Centre for Industrial Technology, Prof. Holstlaan 4 (WY42), 5656 AA Eindhoven, The Netherlands, XPEQT at IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, and Philips Research Leuven, Kapeldreef 75, B-3001 Leuven, Belgium"
        }
      ]
    },
    {
      "given": "Yukiko",
      "family": "Furukawa",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Philips Research Laboratories, Prof. Holstlaan 4 (WA11), 5656 AA Eindhoven, The Netherlands, Philips Centre for Industrial Technology, Prof. Holstlaan 4 (WY42), 5656 AA Eindhoven, The Netherlands, XPEQT at IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, and Philips Research Leuven, Kapeldreef 75, B-3001 Leuven, Belgium"
        }
      ]
    }
  ],
  "member": "316",
  "published-online": {
    "date-parts": [
      [
        2003,
        4,
        11
      ]
    ]
  },
  "reference": [
    {
      "key": "jp027701yb00001/jp027701yb00001_1",
      "volume-title": "Microchip Fabrication:\u2009 A Practical Guide to Semiconductor Processing",
      "volume": "1",
      "author": "Zant P. V.",
      "year": "2000",
      "edition": "4"
    },
    {
      "key": "jp027701yb00002/jp027701yb00002_1",
      "unstructured": "International TechnologyRoad mapfor Semiconductors; Semiconductor Industry Association:\u2009 Austin, TX, 2001."
    },
    {
      "key": "jp027701yb00003/jp027701yb00003_1",
      "doi-asserted-by": "crossref",
      "first-page": "379",
      "DOI": "10.1147/rd.443.0379",
      "volume": "44",
      "author": "Theis T. N.",
      "year": "2000",
      "journal-title": "IBM J. Mater. Res. Develop."
    },
    {
      "key": "jp027701yb00004/jp027701yb00004_1",
      "volume-title": "Solid State Technol",
      "author": "Lin X. W.",
      "year": "2000"
    },
    {
      "key": "jp027701yb00005/jp027701yb00005_1",
      "volume-title": "Semiconductor International",
      "author": "Peters L.",
      "year": "1999"
    },
    {
      "key": "jp027701yb00006/jp027701yb00006_1",
      "unstructured": "International TechnologyRoad mapfor Semiconductors; Semiconductor Industry Association:\u2009 Austin, TX, 1999."
    },
    {
      "key": "jp027701yb00007/jp027701yb00007_1",
      "volume-title": "International Sematech ultralow-k workshop",
      "author": "Miller R. D.",
      "year": "2002"
    },
    {
      "key": "jp027701yb00008/jp027701yb00008_1",
      "volume-title": "International Sematech ultralow-k workshop",
      "author": "Atsushi S.",
      "year": "2002"
    },
    {
      "key": "jp027701yb00009/jp027701yb00009_1",
      "volume-title": "http://www.jysong.idv.tw/cu/articles/cu0010.htm",
      "author": "Golden J. H.",
      "year": "2001"
    },
    {
      "key": "jp027701yb00010/jp027701yb00010_1",
      "volume-title": "International Sematech ultralow-k workshop",
      "author": "Fan H.",
      "year": "2002"
    },
    {
      "key": "jp027701yb00011/jp027701yb00011_1",
      "doi-asserted-by": "crossref",
      "first-page": "1367",
      "DOI": "10.1039/CC9960001367",
      "author": "Burkett S.",
      "year": "1996",
      "journal-title": "Chem. Commun."
    },
    {
      "key": "jp027701yb00012/jp027701yb00012_1",
      "doi-asserted-by": "crossref",
      "first-page": "107",
      "DOI": "10.1016/S0040-6090(96)09163-8",
      "volume": "295",
      "author": "Schneider D.",
      "year": "1997",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "jp027701yb00013/jp027701yb00013_1",
      "doi-asserted-by": "crossref",
      "first-page": "4594",
      "DOI": "10.1063/1.1478775",
      "volume": "80",
      "author": "Flannery C. M.",
      "year": "2002",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "jp027701yb00014/jp027701yb00014_1",
      "doi-asserted-by": "crossref",
      "first-page": "F29",
      "DOI": "10.1149/1.1517771",
      "volume": "5",
      "author": "Mogilnikov K. P.",
      "year": "2002",
      "journal-title": "Electrochem. Sol. State Lett."
    },
    {
      "key": "jp027701yb00015/jp027701yb00015_1",
      "doi-asserted-by": "crossref",
      "first-page": "704",
      "DOI": "10.1119/1.12734",
      "author": "Aspnes D. E.",
      "year": "1982",
      "journal-title": "Am. J. Phys."
    },
    {
      "key": "jp027701yb00016/jp027701yb00016_1",
      "doi-asserted-by": "crossref",
      "first-page": "140",
      "DOI": "10.1002/adma.200390028",
      "volume": "15",
      "author": "Balkenende A. R.",
      "year": "2003",
      "journal-title": "Adv. Mater."
    },
    {
      "key": "jp027701yb00017/jp027701yb00017_1",
      "doi-asserted-by": "crossref",
      "first-page": "6024",
      "DOI": "10.1021/ja974025i",
      "volume": "120",
      "author": "Zhao D.",
      "year": "1998",
      "journal-title": "J. Am. Chem. Soc."
    },
    {
      "key": "jp027701yb00018/jp027701yb00018_1",
      "doi-asserted-by": "crossref",
      "first-page": "317",
      "DOI": "10.1038/368317a0",
      "volume": "368",
      "author": "Huo Q.",
      "year": "1994",
      "journal-title": "Nature"
    },
    {
      "key": "jp027701yb00019/jp027701yb00019_1",
      "doi-asserted-by": "crossref",
      "first-page": "1176",
      "DOI": "10.1021/cm00044a016",
      "volume": "6",
      "author": "Huo Q.",
      "year": "1994",
      "journal-title": "Chem. Mater."
    },
    {
      "key": "jp027701yb00020/jp027701yb00020_1",
      "doi-asserted-by": "crossref",
      "first-page": "587",
      "DOI": "10.1023/A:1020776121896",
      "volume": "26",
      "author": "Alonso B.",
      "year": "2003",
      "journal-title": "J. Sol-Gel Sci. Technol."
    },
    {
      "key": "jp027701yb00021/jp027701yb00021_1",
      "doi-asserted-by": "crossref",
      "first-page": "103",
      "DOI": "10.1111/j.1365-2818.1986.tb02768.x",
      "volume": "143",
      "author": "Jacobs J. W. M.",
      "year": "1986",
      "journal-title": "J. Microscopy"
    },
    {
      "key": "jp027701yb00022/jp027701yb00022_1",
      "doi-asserted-by": "crossref",
      "first-page": "335",
      "DOI": "10.1016/S0167-9317(02)00807-9",
      "volume": "64",
      "author": "Baklanov M. R.",
      "year": "2002",
      "journal-title": "Microelectron. Eng."
    },
    {
      "key": "jp027701yb00023/jp027701yb00023_1",
      "doi-asserted-by": "crossref",
      "first-page": "353",
      "DOI": "10.2109/jcersj.106.353",
      "volume": "106",
      "author": "Takei T.",
      "year": "1998",
      "journal-title": "J. Ceram. Soc. Jpn."
    },
    {
      "key": "jp027701yb00024/jp027701yb00024_1",
      "volume-title": "Surface Area and Porosity",
      "author": "Gregg S. J.",
      "year": "1967"
    },
    {
      "key": "jp027701yb00025/jp027701yb00025_1",
      "doi-asserted-by": "crossref",
      "first-page": "9892",
      "DOI": "10.1021/jp026106t",
      "volume": "106",
      "author": "Bordiga S.",
      "year": "2002",
      "journal-title": "J. Phys. Chem. B"
    },
    {
      "key": "jp027701yb00026/jp027701yb00026_1",
      "doi-asserted-by": "crossref",
      "first-page": "1303",
      "DOI": "10.1149/1.2044168",
      "volume": "142",
      "author": "Nakano T.",
      "year": "1995",
      "journal-title": "J. Eletrochem. Soc."
    },
    {
      "key": "jp027701yb00027/jp027701yb00027_1",
      "doi-asserted-by": "crossref",
      "first-page": "1347",
      "DOI": "10.1366/0003702011953469",
      "volume": "55",
      "author": "Wang C. Y.",
      "year": "2001",
      "journal-title": "Appl. Spectrosc."
    },
    {
      "key": "jp027701yb00028/jp027701yb00028_1",
      "doi-asserted-by": "crossref",
      "first-page": "304",
      "DOI": "10.1038/416304a",
      "volume": "416",
      "author": "Inagaki S.",
      "year": "2002",
      "journal-title": "Nature"
    },
    {
      "key": "jp027701yb00029/jp027701yb00029_1",
      "doi-asserted-by": "crossref",
      "first-page": "813",
      "DOI": "10.1038/nature00785",
      "volume": "417",
      "author": "Davis M. E.",
      "year": "2002",
      "journal-title": "Nature"
    },
    {
      "key": "jp027701yb00030/jp027701yb00030_1",
      "doi-asserted-by": "crossref",
      "first-page": "364",
      "DOI": "10.1038/38699",
      "volume": "389",
      "author": "Lu Y.",
      "year": "1997",
      "journal-title": "Nature"
    },
    {
      "key": "jp027701yb00031/jp027701yb00031_1",
      "doi-asserted-by": "crossref",
      "first-page": "2085",
      "DOI": "10.1039/b003178j",
      "volume": "10",
      "author": "Grosso D.",
      "year": "2000",
      "journal-title": "J. Mater. Chem."
    },
    {
      "key": "jp027701yb00032/jp027701yb00032_1",
      "doi-asserted-by": "crossref",
      "first-page": "172",
      "DOI": "10.1098/rspa.1909.0021",
      "volume": "82",
      "author": "Stoney G.",
      "year": "1909",
      "journal-title": "Proc. R. Soc. London Ser. A"
    },
    {
      "key": "jp027701yb00033/jp027701yb00033_1",
      "doi-asserted-by": "crossref",
      "first-page": "F81",
      "DOI": "10.1149/1.1485776",
      "volume": "149",
      "author": "Chang T. C.",
      "year": "2002",
      "journal-title": "J. Electrochem. Soc."
    }
  ],
  "container-title": "The Journal of Physical Chemistry B",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.acs.org/doi/pdf/10.1021/jp027701y",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2021,
        10,
        4
      ]
    ],
    "date-time": "2021-10-04T14:15:39Z",
    "timestamp": 1633356939000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.acs.org/doi/10.1021/jp027701y"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2003,
        4,
        11
      ]
    ]
  },
  "references-count": 33,
  "journal-issue": {
    "issue": "18",
    "published-print": {
      "date-parts": [
        [
          2003,
          5,
          1
        ]
      ]
    }
  },
  "alternative-id": [
    "10.1021/jp027701y"
  ],
  "URL": "http://dx.doi.org/10.1021/jp027701y",
  "relation": {},
  "ISSN": [
    "1520-6106",
    "1520-5207"
  ],
  "subject": [],
  "container-title-short": "J. Phys. Chem. B",
  "published": {
    "date-parts": [
      [
        2003,
        4,
        11
      ]
    ]
  }
}