DOI: 10.1021/cm9605330. Chemical Vapor Deposition of Metallic Thin Films Using Homonuclear and Heteronuclear Metal Carbonyls

Chemical Vapor Deposition of Metallic Thin Films Using Homonuclear and Heteronuclear Metal Carbonyls

10.1021/cm9605330

Crossref journal-article

American Chemical Society (ACS)

Chemistry of Materials (316)

Bibliography

Boyd, E. P., Ketchum, D. R., Deng, H., & Shore, S. G. (1997). Chemical Vapor Deposition of Metallic Thin Films Using Homonuclear and Heteronuclear Metal Carbonyls. Chemistry of Materials, 9(5), 1154â1158.

Authors 4

Edwin P. Boyd (first)
Douglas R. Ketchum (additional)
Haibin Deng (additional)
Sheldon G. Shore (additional)

References 21 Referenced 62

{'key': 'cm9605330b00001/cm9605330b00001_1', 'volume-title': 'Chemical Vapor Deposition:\u2009 Principles and Applications', 'author': 'Hitchman M. L.', 'year': '1993'} / Chemical Vapor Deposition: Principles and Applications by Hitchman M. L. (1993)
10.1038/374788a0 / Nature by Weber W. (1995)
{'key': 'cm9605330b00001/cm9605330b00001_3', 'volume-title': 'The Materials Science of Thin Films', 'author': 'Ohring M.', 'year': '1992'} / The Materials Science of Thin Films by Ohring M. (1992)
10.1038/scientificamerican1086-136 / Sci. Am. by Chaudhari P. (1986)
10.1116/1.584212 / J. Vac. Sci. Technol. B by Gross M. E. (1988)
10.1021/la00054a028 / Langmuir by Zaera F. (1991)
10.1016/0009-2614(84)85020-4 / Chem. Phys. Lett. by Foord J. S. (1984)
10.1063/1.93359 / Appl. Phys. Lett. by Kaplan R. (1982)
10.1109/20.104470 / IEEE Trans. Magn. by Armstrong J. V. (1990)
10.1116/1.573473 / J. Vac. Sci. Technol. A by Berry A. D. (1986)
10.1021/cm00036a008 / Chem. Mater. by Senzaki Y. (1993)
10.1109/20.281114 / IEEE Trans. Magn. by Zhou L. (1993)
10.1039/DT9800000383 / J. Chem. Soc., Dalton Trans. by Eady C. R. (1980)
{'key': 'cm9605330b00011/cm9605330b00011_1', 'first-page': '1005', 'volume': '90', 'author': 'Chini P.', 'year': '1960', 'journal-title': 'Gazz. Chim. Ital.'} / Gazz. Chim. Ital. by Chini P. (1960)
10.1021/ja00465a027 / J. Am. Chem. Soc. by Geoffroy G. L. (1977)
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10.1149/1.2113647 / J. Electrochem. Soc. by Green M. L. (1985)
{'key': 'cm9605330b00015/cm9605330b00015_1', 'volume-title': 'Handbook of Auger Electron Spectroscopy', 'author': 'Davis L. E.', 'year': '1978'} / Handbook of Auger Electron Spectroscopy by Davis L. E. (1978)
10.1016/0040-6090(74)90126-6 / Thin Solid Films by Lehwald S. (1974)
10.1016/0167-577X(91)90145-V / Mater. Lett. by Liu D. K. (1991)
10.1021/ic00274a004 / Inorg. Chem. by Czekaj C. L. (1988)

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 1:07 a.m.)
Deposited	3 years, 10 months ago (Oct. 9, 2021, 5:11 p.m.)
Indexed	1 year ago (Aug. 20, 2024, 4:29 a.m.)
Issued	28 years, 3 months ago (May 1, 1997)
Published	28 years, 3 months ago (May 1, 1997)
Published Online	28 years, 3 months ago (May 15, 1997)
Published Print	28 years, 3 months ago (May 1, 1997)

Funders 0

None

BibTeX

@article{Boyd_1997, title={Chemical Vapor Deposition of Metallic Thin Films Using Homonuclear and Heteronuclear Metal Carbonyls}, volume={9}, ISSN={1520-5002}, url={http://dx.doi.org/10.1021/cm9605330}, DOI={10.1021/cm9605330}, number={5}, journal={Chemistry of Materials}, publisher={American Chemical Society (ACS)}, author={Boyd, Edwin P. and Ketchum, Douglas R. and Deng, Haibin and Shore, Sheldon G.}, year={1997}, month=may, pages={1154–1158} }

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