DOI: 10.1021/cm100057y. Investigation on the Growth Initiation of Ru Thin Films by Atomic Layer Deposition

Investigation on the Growth Initiation of Ru Thin Films by Atomic Layer Deposition

10.1021/cm100057y

Crossref journal-article

American Chemical Society (ACS)

Chemistry of Materials (316)

Bibliography

Kim, S. K., Han, J. H., Kim, G. H., & Hwang, C. S. (2010). Investigation on the Growth Initiation of Ru Thin Films by Atomic Layer Deposition. Chemistry of Materials, 22(9), 2850â2856.

Authors 4

Seong Keun Kim (first)
Jeong Hwan Han (additional)
Gun Hwan Kim (additional)
Cheol Seong Hwang (additional)

References 39 Referenced 79

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Dates

Type	When
Created	15 years, 4 months ago (April 13, 2010, 7:49 a.m.)
Deposited	2 years, 5 months ago (March 14, 2023, 2:34 p.m.)
Indexed	4 weeks, 1 day ago (July 27, 2025, 3:17 a.m.)
Issued	15 years, 4 months ago (April 13, 2010)
Published	15 years, 4 months ago (April 13, 2010)
Published Online	15 years, 4 months ago (April 13, 2010)
Published Print	15 years, 3 months ago (May 11, 2010)

Funders 0

None

BibTeX

@article{Kim_2010, title={Investigation on the Growth Initiation of Ru Thin Films by Atomic Layer Deposition}, volume={22}, ISSN={1520-5002}, url={http://dx.doi.org/10.1021/cm100057y}, DOI={10.1021/cm100057y}, number={9}, journal={Chemistry of Materials}, publisher={American Chemical Society (ACS)}, author={Kim, Seong Keun and Han, Jeong Hwan and Kim, Gun Hwan and Hwang, Cheol Seong}, year={2010}, month=apr, pages={2850–2856} }

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