DOI: 10.1021/cm050294t. Experimental Techniques for Detection of Components Extracted from Model 193 nm Immersion Lithography Photoresists

Experimental Techniques for Detection of Components Extracted from Model 193 nm Immersion Lithography Photoresists

10.1021/cm050294t

Crossref journal-article

American Chemical Society (ACS)

Chemistry of Materials (316)

Bibliography

Taylor, J. C., LeSuer, R. J., Chambers, C. R., Fan, F.-R. F., Bard, A. J., Conley, W. E., & Willson, C. G. (2005). Experimental Techniques for Detection of Components Extracted from Model 193 nm Immersion Lithography Photoresists. Chemistry of Materials, 17(16), 4194â4203.

Authors 7

J. Christopher Taylor (first)
Robert J. LeSuer (additional)
Charles R. Chambers (additional)
Fu-Ren F. Fan (additional)
Allen J. Bard (additional)
Willard E. Conley (additional)
C. Grant Willson (additional)

References 42 Referenced 14

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{'key': 'cm050294tb00007/cm050294tb00007_1', 'volume-title': 'Proc. SPIE', 'author': 'Switkes M.', 'year': '2002'} / Proc. SPIE by Switkes M. (2002)
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Dates

Type	When
Created	20 years ago (Aug. 2, 2005, 7:12 p.m.)
Deposited	3 years, 11 months ago (Sept. 23, 2021, 2:19 a.m.)
Indexed	1 year, 10 months ago (Oct. 17, 2023, 3:53 p.m.)
Issued	20 years, 1 month ago (July 14, 2005)
Published	20 years, 1 month ago (July 14, 2005)
Published Online	20 years, 1 month ago (July 14, 2005)
Published Print	20 years, 1 month ago (Aug. 1, 2005)

Funders 0

None

BibTeX

@article{Taylor_2005, title={Experimental Techniques for Detection of Components Extracted from Model 193 nm Immersion Lithography Photoresists}, volume={17}, ISSN={1520-5002}, url={http://dx.doi.org/10.1021/cm050294t}, DOI={10.1021/cm050294t}, number={16}, journal={Chemistry of Materials}, publisher={American Chemical Society (ACS)}, author={Taylor, J. Christopher and LeSuer, Robert J. and Chambers, Charles R. and Fan, Fu-Ren F. and Bard, Allen J. and Conley, Willard E. and Willson, C. Grant}, year={2005}, month=jul, pages={4194–4203} }

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      ]
    ]
  },
  "references-count": 42,
  "journal-issue": {
    "issue": "16",
    "published-print": {
      "date-parts": [
        [
          2005,
          8,
          1
        ]
      ]
    }
  },
  "alternative-id": [
    "10.1021/cm050294t"
  ],
  "URL": "http://dx.doi.org/10.1021/cm050294t",
  "relation": {},
  "ISSN": [
    "0897-4756",
    "1520-5002"
  ],
  "subject": [],
  "container-title-short": "Chem. Mater.",
  "published": {
    "date-parts": [
      [
        2005,
        7,
        14
      ]
    ]
  }
}