DOI: 10.1021/cm049542w. Low-Temperature Deposition of Conformal Copper Films in Supercritical CO<sub>2</sub>by Catalytic Hydrogen Reduction of Copper Hexafluoroacetylacetonate

Low-Temperature Deposition of Conformal Copper Films in Supercritical CO2by Catalytic Hydrogen Reduction of Copper Hexafluoroacetylacetonate

10.1021/cm049542w

Crossref journal-article

American Chemical Society (ACS)

Chemistry of Materials (316)

Bibliography

Ohde, H., Kramer, S., Moore, S., & Wai, C. M. (2004). Low-Temperature Deposition of Conformal Copper Films in Supercritical CO2by Catalytic Hydrogen Reduction of Copper Hexafluoroacetylacetonate. Chemistry of Materials, 16(21), 4028â4031.

Authors 4

Hiroyuki Ohde (first)
Steve Kramer (additional)
Scott Moore (additional)
Chien M. Wai (additional)

References 24 Referenced 34

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10.1149/1.1430230 / J. Electrochem. Soc by Shim K. (2002)
{'key': 'cm049542wb00003/cm049542wb00003_1', 'first-page': '2256', 'volume': '1999', 'author': 'Kobayashi A.', 'journal-title': 'J. Vac. Sci. Technol. B'} / J. Vac. Sci. Technol. B by Kobayashi A.
10.1143/JJAP.37.6358 / Jpn. J. Appl. Phys by Kobayashi A. (1998)
{'key': 'cm049542wb00005/cm049542wb00005_1', 'first-page': '2642', 'volume': '2001', 'author': 'Kim Y.', 'journal-title': 'J. Vac. Sci. Technol. A'} / J. Vac. Sci. Technol. A by Kim Y.
10.1063/1.107370 / Appl. Phys. Lett by Cohen S. L. (1992)
10.1149/1.2048432 / J. Electrochem. Soc by Chen Y. D. (1995)
10.1063/1.351630 / J. Appl. Phys by Lecohier B. (1992)
{'key': 'cm049542wb00009/cm049542wb00009_1', 'first-page': '868', 'volume': '5', 'author': 'Douglas M. A.', 'year': '1999', 'journal-title': 'U.S. Patent'} / U.S. Patent by Douglas M. A. (1999)
{'key': 'cm049542wb00010/cm049542wb00010_1', 'first-page': '908', 'volume': '5', 'author': 'McCullough K. J.', 'year': '1999', 'journal-title': 'U.S. Patent'} / U.S. Patent by McCullough K. J. (1999)
{'key': 'cm049542wb00011/cm049542wb00011_1', 'first-page': '024', 'volume': '6', 'author': 'Wallace R. M.', 'year': '2000', 'journal-title': 'U.S. Patent'} / U.S. Patent by Wallace R. M. (2000)
{'key': 'cm049542wb00012/cm049542wb00012_1', 'first-page': '602', 'volume': '6', 'author': 'Chandra M.', 'year': '2003', 'journal-title': 'U.S. Patent'} / U.S. Patent by Chandra M. (2003)
10.1063/1.113115 / Appl. Phys. Lett by Namatsu H. (1995)
10.1016/S0167-9317(99)00033-7 / Microelectron. Eng by Namatsu H. (1999)
10.1021/ja034091m / J. Am. Chem. Soc by Bessel C. A. (2003)
{'key': 'cm049542wb00016/cm049542wb00016_1', 'first-page': '623', 'volume': '6', 'author': 'McClain J. B.', 'year': '2003', 'journal-title': 'U.S. Patent'} / U.S. Patent by McClain J. B. (2003)
10.1021/cm981016f / Chem. Mater by Watkins J. J. (1999)
10.1021/cm000118e / Chem. Mater by Blackburn J. M. (2000)
{'volume-title': 'Science', 'year': '2001', 'author': 'Blackburn J. M.', 'key': 'cm049542wb00019/cm049542wb00019_1'} / Science by Blackburn J. M. (2001)
10.1021/cm021814c / Chem. Mater by Cabaňas A. (2003)
10.1016/S0167-9317(02)00783-9 / Microelectron. Eng by Cabaňas A. (2002)
10.1016/S0167-9317(02)00826-2 / Microelectron. Eng by Kondoh E. (2002)
{'key': 'cm049542wb00023/cm049542wb00023_1', 'first-page': '653', 'volume': '6', 'author': 'Wai C. M.', 'year': '2003', 'journal-title': 'U.S. Patent'} / U.S. Patent by Wai C. M. (2003)
10.1016/j.susc.2003.08.041 / Surf. Sci by McCormick J. R. (2003)

Dates

Type	When
Created	20 years, 10 months ago (Oct. 12, 2004, 12:34 a.m.)
Deposited	8 months ago (Dec. 18, 2024, 6:35 p.m.)
Indexed	2 weeks, 2 days ago (Aug. 6, 2025, 9:49 a.m.)
Issued	20 years, 11 months ago (Sept. 18, 2004)
Published	20 years, 11 months ago (Sept. 18, 2004)
Published Online	20 years, 11 months ago (Sept. 18, 2004)
Published Print	20 years, 10 months ago (Oct. 1, 2004)

Funders 0

None

BibTeX

@article{Ohde_2004, title={Low-Temperature Deposition of Conformal Copper Films in Supercritical CO2by Catalytic Hydrogen Reduction of Copper Hexafluoroacetylacetonate}, volume={16}, ISSN={1520-5002}, url={http://dx.doi.org/10.1021/cm049542w}, DOI={10.1021/cm049542w}, number={21}, journal={Chemistry of Materials}, publisher={American Chemical Society (ACS)}, author={Ohde, Hiroyuki and Kramer, Steve and Moore, Scott and Wai, Chien M.}, year={2004}, month=sep, pages={4028–4031} }

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