DOI: 10.1021/cm0006594. Atmospheric Pressure Atomic Layer Epitaxy of ZnO Using a Chloride Source

Atmospheric Pressure Atomic Layer Epitaxy of ZnO Using a Chloride Source

10.1021/cm0006594

Crossref journal-article

American Chemical Society (ACS)

Chemistry of Materials (316)

Bibliography

Kaiya, K., Yoshii, N., Omichi, K., Takahashi, N., Nakamura, T., Okamoto, S., & Yamamoto, H. (2001). Atmospheric Pressure Atomic Layer Epitaxy of ZnO Using a Chloride Source. Chemistry of Materials, 13(6), 1952â1956.

Authors 7

Kazuhiko Kaiya (first)
Naoki Yoshii (additional)
Kouji Omichi (additional)
Naoyuki Takahashi (additional)
Takato Nakamura (additional)
Shinji Okamoto (additional)
Hajime Yamamoto (additional)

References 9 Referenced 23

10.1016/S0169-4332(96)01004-5 / Appl. Surf. Sci. by Ritala M. (1997)
10.1016/0040-6090(85)90254-8 / Thin Solid Films by Tammennmaa M. (1985)
10.1016/0169-4332(94)90192-9 / Appl. Surf. Sci. by Lujala V. (1994)
10.1016/S0169-4332(96)01022-7 / Appl. Surf. Sci. by Yamada A. (1997)
10.1016/S0254-0584(98)00264-8 / Mater. Chem. Phys. by Ott A. W. (1999)
JCPDS File No. 36-1451, 1990. (10.1002/aic.690360921)
{'key': 'cm0006594b00005/cm0006594b00005_1', 'first-page': '23', 'volume': '41', 'author': 'Niinisto L.', 'year': '1996', 'journal-title': 'Met. Sci. Eng.'} / Met. Sci. Eng. by Niinisto L. (1996)
10.1149/1.2054920 / J. Electrochem. Soc. by Tanimoto S. (1994)
10.1016/S0039-6028(87)80199-1 / Surf. Sci. by Pakkanen T. A. (1987)

Dates

Type	When
Created	18 years, 2 months ago (May 30, 2007, 11:44 a.m.)
Deposited	3 years, 10 months ago (Oct. 4, 2021, 5:17 a.m.)
Indexed	1 year, 5 months ago (March 12, 2024, 4:22 a.m.)
Issued	24 years, 2 months ago (May 26, 2001)
Published	24 years, 2 months ago (May 26, 2001)
Published Online	24 years, 2 months ago (May 26, 2001)
Published Print	24 years, 2 months ago (June 1, 2001)

Funders 0

None

BibTeX

@article{Kaiya_2001, title={Atmospheric Pressure Atomic Layer Epitaxy of ZnO Using a Chloride Source}, volume={13}, ISSN={1520-5002}, url={http://dx.doi.org/10.1021/cm0006594}, DOI={10.1021/cm0006594}, number={6}, journal={Chemistry of Materials}, publisher={American Chemical Society (ACS)}, author={Kaiya, Kazuhiko and Yoshii, Naoki and Omichi, Kouji and Takahashi, Naoyuki and Nakamura, Takato and Okamoto, Shinji and Yamamoto, Hajime}, year={2001}, month=may, pages={1952–1956} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        3,
        12
      ]
    ],
    "date-time": "2024-03-12T08:22:36Z",
    "timestamp": 1710231756046
  },
  "reference-count": 9,
  "publisher": "American Chemical Society (ACS)",
  "issue": "6",
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2001,
        6,
        1
      ]
    ]
  },
  "DOI": "10.1021/cm0006594",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2007,
        5,
        30
      ]
    ],
    "date-time": "2007-05-30T15:44:03Z",
    "timestamp": 1180539843000
  },
  "page": "1952-1956",
  "source": "Crossref",
  "is-referenced-by-count": 23,
  "title": "Atmospheric Pressure Atomic Layer Epitaxy of ZnO Using a Chloride Source",
  "prefix": "10.1021",
  "volume": "13",
  "author": [
    {
      "given": "Kazuhiko",
      "family": "Kaiya",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Graduate School of Science and Engineering, and Department of Materials Science and Technology, Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8561, Japan, Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0101, Japan, and Department of Engineering, Tokyo University of Technology, 1404 Katakura, Hachioji, Tokyo 192-8580, Japan"
        }
      ]
    },
    {
      "given": "Naoki",
      "family": "Yoshii",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Graduate School of Science and Engineering, and Department of Materials Science and Technology, Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8561, Japan, Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0101, Japan, and Department of Engineering, Tokyo University of Technology, 1404 Katakura, Hachioji, Tokyo 192-8580, Japan"
        }
      ]
    },
    {
      "given": "Kouji",
      "family": "Omichi",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Graduate School of Science and Engineering, and Department of Materials Science and Technology, Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8561, Japan, Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0101, Japan, and Department of Engineering, Tokyo University of Technology, 1404 Katakura, Hachioji, Tokyo 192-8580, Japan"
        }
      ]
    },
    {
      "given": "Naoyuki",
      "family": "Takahashi",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Graduate School of Science and Engineering, and Department of Materials Science and Technology, Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8561, Japan, Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0101, Japan, and Department of Engineering, Tokyo University of Technology, 1404 Katakura, Hachioji, Tokyo 192-8580, Japan"
        }
      ]
    },
    {
      "given": "Takato",
      "family": "Nakamura",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Graduate School of Science and Engineering, and Department of Materials Science and Technology, Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8561, Japan, Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0101, Japan, and Department of Engineering, Tokyo University of Technology, 1404 Katakura, Hachioji, Tokyo 192-8580, Japan"
        }
      ]
    },
    {
      "given": "Shinji",
      "family": "Okamoto",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Graduate School of Science and Engineering, and Department of Materials Science and Technology, Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8561, Japan, Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0101, Japan, and Department of Engineering, Tokyo University of Technology, 1404 Katakura, Hachioji, Tokyo 192-8580, Japan"
        }
      ]
    },
    {
      "given": "Hajime",
      "family": "Yamamoto",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Graduate School of Science and Engineering, and Department of Materials Science and Technology, Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8561, Japan, Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0101, Japan, and Department of Engineering, Tokyo University of Technology, 1404 Katakura, Hachioji, Tokyo 192-8580, Japan"
        }
      ]
    }
  ],
  "member": "316",
  "published-online": {
    "date-parts": [
      [
        2001,
        5,
        26
      ]
    ]
  },
  "reference": [
    {
      "key": "cm0006594b00001/cm0006594b00001_1",
      "doi-asserted-by": "crossref",
      "first-page": "223",
      "DOI": "10.1016/S0169-4332(96)01004-5",
      "volume": "112",
      "author": "Ritala M.",
      "year": "1997",
      "journal-title": "Appl. Surf. Sci."
    },
    {
      "key": "cm0006594b00002/cm0006594b00002_1",
      "doi-asserted-by": "crossref",
      "first-page": "125",
      "DOI": "10.1016/0040-6090(85)90254-8",
      "volume": "249",
      "author": "Tammennmaa M.",
      "year": "1985",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "cm0006594b00003/cm0006594b00003_1",
      "doi-asserted-by": "crossref",
      "first-page": "34",
      "DOI": "10.1016/0169-4332(94)90192-9",
      "volume": "82",
      "author": "Lujala V.",
      "year": "1994",
      "journal-title": "Appl. Surf. Sci."
    },
    {
      "key": "cm0006594b00003/cm0006594b00003_2",
      "doi-asserted-by": "crossref",
      "first-page": "216",
      "DOI": "10.1016/S0169-4332(96)01022-7",
      "volume": "112",
      "author": "Yamada A.",
      "year": "1997",
      "journal-title": "Appl. Surf. Sci."
    },
    {
      "key": "cm0006594b00003/cm0006594b00003_3",
      "doi-asserted-by": "crossref",
      "first-page": "132",
      "DOI": "10.1016/S0254-0584(98)00264-8",
      "volume": "58",
      "author": "Ott A. W.",
      "year": "1999",
      "journal-title": "Mater. Chem. Phys."
    },
    {
      "key": "cm0006594b00004/cm0006594b00004_1",
      "doi-asserted-by": "crossref",
      "unstructured": "JCPDS File No. 36-1451, 1990.",
      "DOI": "10.1002/aic.690360921"
    },
    {
      "key": "cm0006594b00005/cm0006594b00005_1",
      "first-page": "23",
      "volume": "41",
      "author": "Niinisto L.",
      "year": "1996",
      "journal-title": "Met. Sci. Eng."
    },
    {
      "key": "cm0006594b00006/cm0006594b00006_1",
      "doi-asserted-by": "crossref",
      "first-page": "1339",
      "DOI": "10.1149/1.2054920",
      "volume": "141",
      "author": "Tanimoto S.",
      "year": "1994",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "cm0006594b00007/cm0006594b00007_1",
      "doi-asserted-by": "crossref",
      "first-page": "456",
      "DOI": "10.1016/S0039-6028(87)80199-1",
      "volume": "188",
      "author": "Pakkanen T. A.",
      "year": "1987",
      "journal-title": "Surf. Sci."
    }
  ],
  "container-title": "Chemistry of Materials",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.acs.org/doi/pdf/10.1021/cm0006594",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2021,
        10,
        4
      ]
    ],
    "date-time": "2021-10-04T09:17:54Z",
    "timestamp": 1633339074000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.acs.org/doi/10.1021/cm0006594"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2001,
        5,
        26
      ]
    ]
  },
  "references-count": 9,
  "journal-issue": {
    "issue": "6",
    "published-print": {
      "date-parts": [
        [
          2001,
          6,
          1
        ]
      ]
    }
  },
  "alternative-id": [
    "10.1021/cm0006594"
  ],
  "URL": "http://dx.doi.org/10.1021/cm0006594",
  "relation": {},
  "ISSN": [
    "0897-4756",
    "1520-5002"
  ],
  "subject": [],
  "container-title-short": "Chem. Mater.",
  "published": {
    "date-parts": [
      [
        2001,
        5,
        26
      ]
    ]
  }
}