DOI: 10.1021/cm000118e. Reactive Deposition of Conformal Palladium Films from Supercritical Carbon Dioxide Solution

Reactive Deposition of Conformal Palladium Films from Supercritical Carbon Dioxide Solution

10.1021/cm000118e

Crossref journal-article

American Chemical Society (ACS)

Chemistry of Materials (316)

Bibliography

Blackburn, J. M., Long, D. P., & Watkins, J. J. (2000). Reactive Deposition of Conformal Palladium Films from Supercritical Carbon Dioxide Solution. Chemistry of Materials, 12(9), 2625â2631.

Authors 3

Jason M. Blackburn (first)
David P. Long (additional)
James J. Watkins (additional)

References 28 Referenced 75

{'key': 'cm000118eb00001/cm000118eb00001_1', 'volume-title': 'Inorganic Membranes for Separation and Reaction', 'author': 'Hsieh H. P.', 'year': '1996'} / Inorganic Membranes for Separation and Reaction by Hsieh H. P. (1996)
10.1002/cjce.5450690503 / Can. J. Chem. Eng. by Shu J. (1991)
10.1149/1.2043887 / J. Electrochem. Soc. by Hughes R. C. (1995)
10.1063/1.105674 / Appl. Phys. Lett. by Mak C. Y. (1991)
10.1021/la00006a001 / Langmuir by Potochnik S. J. (1995)
10.1016/0040-6090(93)90211-7 / Thin Solid Films by Dubin V. M. (1993)
10.1021/cm9802595 / J. Chem. Mater. by Zhang Y. (1998)
{'key': 'cm000118eb00008/cm000118eb00008_1', 'volume-title': 'Chemical Vapor Deposition Principles and Applications', 'author': 'Hitchman M. L.', 'year': '1993'} / Chemical Vapor Deposition Principles and Applications by Hitchman M. L. (1993)
10.1002/9783527615858 / The Chemistry of Metal CVD by Kodas T. T. (1994)
10.1021/cm970159j / Chem. Mater. by Bhaskaran V. (1997)
10.1002/cvde.19970030206 / Chem. Vap. Deposition by Bhaskaran V. (1997)
10.1021/cm960106m / Chem. Mater. by Hierso J.-C. (1996)
10.1002/cvde.19950010103 / Chem. Vap. Deposition by Hampden-Smith M. J. (1995)
10.1002/adma.19940060109 / J. Adv. Mater. by Yuan Z. (1994)
10.1021/la970167e / Langmuir by Jeon N. L. (1997)
10.1021/ja00077a092 / J. Am. Chem. Soc. by Lin W. B. (1993)
{'key': 'cm000118eb00017/cm000118eb00017_1', 'volume-title': 'Method of Chemically Depositing Material on a Substrate. U.S. Patent 5,789,025', 'author': 'Watkins J. J.', 'year': '1998'} / Method of Chemically Depositing Material on a Substrate. U.S. Patent 5,789,025 by Watkins J. J. (1998)
10.1021/cm981016f / J. Chem. Mater. by Watkins J. J. (1999)
10.1016/S0039-9140(96)02008-5 / Talanta by Smart N. G. (1997)
10.1021/ic00127a015 / Inorg. Chem. by Lagalante A. F. (1995)
{'key': 'cm000118eb00021/cm000118eb00021_1', 'volume-title': 'Supercritical Fluid Extraction:\u2009 Principles and Practice', 'author': 'McHugh M. A.', 'year': '1986'} / Supercritical Fluid Extraction: Principles and Practice by McHugh M. A. (1986)
10.1246/bcsj.42.805 / Bull. Chem. Soc. Jpn. by Imamura S. (1968)
{'key': 'cm000118eb00023/cm000118eb00023_1', 'first-page': '1969', 'author': 'Sakakibara M.', 'year': '1969', 'journal-title': 'Chem. Commun.'} / Chem. Commun. by Sakakibara M. (1969)
10.1021/ma00116a004 / J. Macromolecules by Watkins J. J. (1995)
10.1021/ja00216a073 / J. Am. Chem. Soc. by Gozum J. E. (1988)
{'key': 'cm000118eb00026/cm000118eb00026_1', 'volume-title': 'Manuscript in preparation', 'author': 'Li J.', 'year': '1999'} / Manuscript in preparation by Li J. (1999)
10.1021/ja00218a024 / J. Am. Chem. Soc. by Miller T. M. (1988)
{'key': 'cm000118eb00028/cm000118eb00028_1', 'volume-title': 'The Chemistry of Metal CVD', 'author': 'Zinn A. A.', 'year': '1994'} / The Chemistry of Metal CVD by Zinn A. A. (1994)

Dates

Type	When
Created	23 years ago (July 26, 2002, 1:54 a.m.)
Deposited	2 years, 5 months ago (March 8, 2023, 10:48 a.m.)
Indexed	3 weeks, 4 days ago (July 30, 2025, 11:26 a.m.)
Issued	25 years ago (Aug. 17, 2000)
Published	25 years ago (Aug. 17, 2000)
Published Online	25 years ago (Aug. 17, 2000)
Published Print	24 years, 11 months ago (Sept. 1, 2000)

Funders 0

None

BibTeX

@article{Blackburn_2000, title={Reactive Deposition of Conformal Palladium Films from Supercritical Carbon Dioxide Solution}, volume={12}, ISSN={1520-5002}, url={http://dx.doi.org/10.1021/cm000118e}, DOI={10.1021/cm000118e}, number={9}, journal={Chemistry of Materials}, publisher={American Chemical Society (ACS)}, author={Blackburn, Jason M. and Long, David P. and Watkins, James J.}, year={2000}, month=aug, pages={2625–2631} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        30
      ]
    ],
    "date-time": "2025-07-30T15:26:11Z",
    "timestamp": 1753889171007
  },
  "reference-count": 28,
  "publisher": "American Chemical Society (ACS)",
  "issue": "9",
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2000,
        9,
        1
      ]
    ]
  },
  "DOI": "10.1021/cm000118e",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        26
      ]
    ],
    "date-time": "2002-07-26T05:54:00Z",
    "timestamp": 1027662840000
  },
  "page": "2625-2631",
  "source": "Crossref",
  "is-referenced-by-count": 75,
  "title": "Reactive Deposition of Conformal Palladium Films from Supercritical Carbon Dioxide Solution",
  "prefix": "10.1021",
  "volume": "12",
  "author": [
    {
      "given": "Jason M.",
      "family": "Blackburn",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Department of Chemical Engineering, The University of Massachusetts, Amherst, Massachusetts 01003"
        }
      ]
    },
    {
      "given": "David P.",
      "family": "Long",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Chemical Engineering, The University of Massachusetts, Amherst, Massachusetts 01003"
        }
      ]
    },
    {
      "given": "James J.",
      "family": "Watkins",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Chemical Engineering, The University of Massachusetts, Amherst, Massachusetts 01003"
        }
      ]
    }
  ],
  "member": "316",
  "published-online": {
    "date-parts": [
      [
        2000,
        8,
        17
      ]
    ]
  },
  "reference": [
    {
      "key": "cm000118eb00001/cm000118eb00001_1",
      "volume-title": "Inorganic Membranes for Separation and Reaction",
      "author": "Hsieh H. P.",
      "year": "1996"
    },
    {
      "key": "cm000118eb00002/cm000118eb00002_1",
      "doi-asserted-by": "crossref",
      "first-page": "1036",
      "DOI": "10.1002/cjce.5450690503",
      "volume": "69",
      "author": "Shu J.",
      "year": "1991",
      "journal-title": "Can. J. Chem. Eng."
    },
    {
      "key": "cm000118eb00003/cm000118eb00003_1",
      "doi-asserted-by": "crossref",
      "first-page": "249",
      "DOI": "10.1149/1.2043887",
      "volume": "142",
      "author": "Hughes R. C.",
      "year": "1995",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "cm000118eb00004/cm000118eb00004_1",
      "doi-asserted-by": "crossref",
      "first-page": "3449",
      "DOI": "10.1063/1.105674",
      "volume": "59",
      "author": "Mak C. Y.",
      "year": "1991",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "cm000118eb00005/cm000118eb00005_1",
      "doi-asserted-by": "crossref",
      "first-page": "1841",
      "DOI": "10.1021/la00006a001",
      "volume": "11",
      "author": "Potochnik S. J.",
      "year": "1995",
      "journal-title": "Langmuir"
    },
    {
      "key": "cm000118eb00006/cm000118eb00006_1",
      "doi-asserted-by": "crossref",
      "first-page": "94",
      "DOI": "10.1016/0040-6090(93)90211-7",
      "volume": "226",
      "author": "Dubin V. M.",
      "year": "1993",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "cm000118eb00007/cm000118eb00007_1",
      "doi-asserted-by": "crossref",
      "first-page": "2293",
      "DOI": "10.1021/cm9802595",
      "volume": "10",
      "author": "Zhang Y.",
      "year": "1998",
      "journal-title": "J. Chem. Mater."
    },
    {
      "key": "cm000118eb00008/cm000118eb00008_1",
      "volume-title": "Chemical Vapor Deposition Principles and Applications",
      "author": "Hitchman M. L.",
      "year": "1993"
    },
    {
      "key": "cm000118eb00009/cm000118eb00009_1",
      "doi-asserted-by": "crossref",
      "DOI": "10.1002/9783527615858",
      "volume-title": "The Chemistry of Metal CVD",
      "author": "Kodas T. T.",
      "year": "1994"
    },
    {
      "key": "cm000118eb00010/cm000118eb00010_1",
      "doi-asserted-by": "crossref",
      "first-page": "2822",
      "DOI": "10.1021/cm970159j",
      "volume": "9",
      "author": "Bhaskaran V.",
      "year": "1997",
      "journal-title": "Chem. Mater."
    },
    {
      "key": "cm000118eb00011/cm000118eb00011_1",
      "doi-asserted-by": "crossref",
      "first-page": "85",
      "DOI": "10.1002/cvde.19970030206",
      "volume": "3",
      "author": "Bhaskaran V.",
      "year": "1997",
      "journal-title": "Chem. Vap. Deposition"
    },
    {
      "key": "cm000118eb00012/cm000118eb00012_1",
      "doi-asserted-by": "crossref",
      "first-page": "2481",
      "DOI": "10.1021/cm960106m",
      "volume": "8",
      "author": "Hierso J.-C.",
      "year": "1996",
      "journal-title": "Chem. Mater."
    },
    {
      "key": "cm000118eb00013/cm000118eb00013_1",
      "doi-asserted-by": "crossref",
      "first-page": "8",
      "DOI": "10.1002/cvde.19950010103",
      "volume": "1",
      "author": "Hampden-Smith M. J.",
      "year": "1995",
      "journal-title": "Chem. Vap. Deposition"
    },
    {
      "key": "cm000118eb00014/cm000118eb00014_1",
      "doi-asserted-by": "crossref",
      "first-page": "51",
      "DOI": "10.1002/adma.19940060109",
      "volume": "6",
      "author": "Yuan Z.",
      "year": "1994",
      "journal-title": "J. Adv. Mater."
    },
    {
      "key": "cm000118eb00015/cm000118eb00015_1",
      "doi-asserted-by": "crossref",
      "first-page": "3833",
      "DOI": "10.1021/la970167e",
      "volume": "13",
      "author": "Jeon N. L.",
      "year": "1997",
      "journal-title": "Langmuir"
    },
    {
      "key": "cm000118eb00016/cm000118eb00016_1",
      "doi-asserted-by": "crossref",
      "first-page": "11644",
      "DOI": "10.1021/ja00077a092",
      "volume": "115",
      "author": "Lin W. B.",
      "year": "1993",
      "journal-title": "J. Am. Chem. Soc."
    },
    {
      "key": "cm000118eb00017/cm000118eb00017_1",
      "volume-title": "Method of Chemically Depositing Material on a Substrate. U.S. Patent 5,789,025",
      "author": "Watkins J. J.",
      "year": "1998"
    },
    {
      "key": "cm000118eb00018/cm000118eb00018_1",
      "doi-asserted-by": "crossref",
      "first-page": "213",
      "DOI": "10.1021/cm981016f",
      "volume": "11",
      "author": "Watkins J. J.",
      "year": "1999",
      "journal-title": "J. Chem. Mater."
    },
    {
      "key": "cm000118eb00019/cm000118eb00019_1",
      "doi-asserted-by": "crossref",
      "first-page": "137",
      "DOI": "10.1016/S0039-9140(96)02008-5",
      "volume": "44",
      "author": "Smart N. G.",
      "year": "1997",
      "journal-title": "Talanta"
    },
    {
      "key": "cm000118eb00020/cm000118eb00020_1",
      "doi-asserted-by": "crossref",
      "first-page": "5781",
      "DOI": "10.1021/ic00127a015",
      "volume": "34",
      "author": "Lagalante A. F.",
      "year": "1995",
      "journal-title": "Inorg. Chem."
    },
    {
      "key": "cm000118eb00021/cm000118eb00021_1",
      "volume-title": "Supercritical Fluid Extraction:\u2009 Principles and Practice",
      "author": "McHugh M. A.",
      "year": "1986"
    },
    {
      "key": "cm000118eb00022/cm000118eb00022_1",
      "doi-asserted-by": "crossref",
      "first-page": "805",
      "DOI": "10.1246/bcsj.42.805",
      "volume": "42",
      "author": "Imamura S.",
      "year": "1968",
      "journal-title": "Bull. Chem. Soc. Jpn."
    },
    {
      "key": "cm000118eb00023/cm000118eb00023_1",
      "first-page": "1969",
      "author": "Sakakibara M.",
      "year": "1969",
      "journal-title": "Chem. Commun."
    },
    {
      "key": "cm000118eb00024/cm000118eb00024_1",
      "doi-asserted-by": "crossref",
      "first-page": "4067",
      "DOI": "10.1021/ma00116a004",
      "volume": "28",
      "author": "Watkins J. J.",
      "year": "1995",
      "journal-title": "J. Macromolecules"
    },
    {
      "key": "cm000118eb00025/cm000118eb00025_1",
      "doi-asserted-by": "crossref",
      "first-page": "2688",
      "DOI": "10.1021/ja00216a073",
      "volume": "110",
      "author": "Gozum J. E.",
      "year": "1988",
      "journal-title": "J. Am. Chem. Soc."
    },
    {
      "key": "cm000118eb00026/cm000118eb00026_1",
      "volume-title": "Manuscript in preparation",
      "author": "Li J.",
      "year": "1999"
    },
    {
      "key": "cm000118eb00027/cm000118eb00027_1",
      "doi-asserted-by": "crossref",
      "first-page": "3146",
      "DOI": "10.1021/ja00218a024",
      "volume": "110",
      "author": "Miller T. M.",
      "year": "1988",
      "journal-title": "J. Am. Chem. Soc."
    },
    {
      "key": "cm000118eb00028/cm000118eb00028_1",
      "volume-title": "The Chemistry of Metal CVD",
      "author": "Zinn A. A.",
      "year": "1994"
    }
  ],
  "container-title": "Chemistry of Materials",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.acs.org/doi/pdf/10.1021/cm000118e",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        3,
        8
      ]
    ],
    "date-time": "2023-03-08T15:48:52Z",
    "timestamp": 1678290532000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.acs.org/doi/10.1021/cm000118e"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2000,
        8,
        17
      ]
    ]
  },
  "references-count": 28,
  "journal-issue": {
    "issue": "9",
    "published-print": {
      "date-parts": [
        [
          2000,
          9,
          1
        ]
      ]
    }
  },
  "alternative-id": [
    "10.1021/cm000118e"
  ],
  "URL": "http://dx.doi.org/10.1021/cm000118e",
  "relation": {},
  "ISSN": [
    "0897-4756",
    "1520-5002"
  ],
  "subject": [],
  "container-title-short": "Chem. Mater.",
  "published": {
    "date-parts": [
      [
        2000,
        8,
        17
      ]
    ]
  }
}