DOI: 10.1021/am5032105. Atomic Layer Deposition of a High-<i>k</i> Dielectric on MoS<sub>2</sub> Using Trimethylaluminum and Ozone

Atomic Layer Deposition of a High-k Dielectric on MoS2 Using Trimethylaluminum and Ozone

10.1021/am5032105

Crossref journal-article

American Chemical Society (ACS)

ACS Applied Materials & Interfaces (316)

Bibliography

Cheng, L., Qin, X., Lucero, A. T., Azcatl, A., Huang, J., Wallace, R. M., Cho, K., & Kim, J. (2014). Atomic Layer Deposition of a High-k Dielectric on MoS2 Using Trimethylaluminum and Ozone. ACS Applied Materials & Interfaces, 6(15), 11834â11838.

Authors 8

Lanxia Cheng (first)
Xiaoye Qin (additional)
Antonio T. Lucero (additional)
Angelica Azcatl (additional)
Jie Huang (additional)
Robert M. Wallace (additional)
Kyeongjae Cho (additional)
Jiyoung Kim (additional)

References 31 Referenced 115

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Dates

Type	When
Created	11 years, 1 month ago (July 15, 2014, 4:36 p.m.)
Deposited	2 years, 4 months ago (April 15, 2023, 12:05 a.m.)
Indexed	1 month, 1 week ago (July 16, 2025, 7:46 a.m.)
Issued	11 years, 1 month ago (July 21, 2014)
Published	11 years, 1 month ago (July 21, 2014)
Published Online	11 years, 1 month ago (July 21, 2014)
Published Print	11 years ago (Aug. 13, 2014)

Funders 2

LEAST
National Institute of Standards and Technology 10.13039/100000161
Region: Americas
gov (National government)
Labels4
1. U.S. National Institute of Standards and Technology
2. National Institute for Standards and Technology
3. U.S. Department of Commerce's National Institute of Standards and Technology
4. NIST

BibTeX

@article{Cheng_2014, title={Atomic Layer Deposition of a High-k Dielectric on MoS2 Using Trimethylaluminum and Ozone}, volume={6}, ISSN={1944-8252}, url={http://dx.doi.org/10.1021/am5032105}, DOI={10.1021/am5032105}, number={15}, journal={ACS Applied Materials & Interfaces}, publisher={American Chemical Society (ACS)}, author={Cheng, Lanxia and Qin, Xiaoye and Lucero, Antonio T. and Azcatl, Angelica and Huang, Jie and Wallace, Robert M. and Cho, Kyeongjae and Kim, Jiyoung}, year={2014}, month=jul, pages={11834–11838} }

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