DOI: 10.1017/s1551929500052457. TEM Sample Preparation Using Focused Ion Beam

TEM Sample Preparation Using Focused Ion Beam - Capabilities And Limits

10.1017/s1551929500052457

Crossref journal-article

Oxford University Press (OUP)

Microscopy Today (286)

Abstract

Abstract TEM sample preparation using Focused Ion Beam (FIB) methods becomes more and more interesting for microscopists because the technique allows for reliable and very efficient sample preparation. The first application of TEM sample preparation by FIB-cutting was reported more than 10 years ago. Meanwhile, a lot of experience has been gathered that allows one to discuss the capabilities and limits of the FIB technique in detail. Several TEM sample preparation techniques are known that all include FIB-cutting but differ in sample pre-preparation, sample handling, etc. This paper focuses on the actual FIB process, FIB tools are closely related to Scanning Electron Microscopes, but instead of an electron beam an ion beam (mostly Ga+ ions) is used to remove and deposit material.

Bibliography

Engelmann, H., Volkmann, B., Ritz, Y., Saage, H., Stegmann, H., de Robiliard, Q., & Zschech, E. (2003). TEM Sample Preparation Using Focused Ion Beam - Capabilities And Limits. Microscopy Today, 11(2), 22â25.

Authors 7

HJ Engelmann (first)
B Volkmann (additional)
Y Ritz (additional)
H Saage (additional)
H Stegmann (additional)
Q de Robiliard (additional)
E Zschech (additional)

References 7 Referenced 9

{'key': '2023010802094084900_ref001', 'author': 'Kirkr'} by Kirkr
{'key': '2023010802094084900_ref002', 'author': 'Giannuzzi', 'year': '1999'} by Giannuzzi (1999)
{'issue': '(5)', 'key': '2023010802094084900_ref003', 'volume': '64', 'author': 'Orloff', 'year': '1993', 'journal-title': 'Rev. ScL Jnstrum'} / Rev. ScL Jnstrum by Orloff (1993)
{'issue': '(3)', 'key': '2023010802094084900_ref004', 'volume': '39', 'author': 'Engelmann', 'year': '2002', 'journal-title': 'Pract. Metallogr'} / Pract. Metallogr by Engelmann (2002)
{'key': '2023010802094084900_ref005', 'author': 'Engelmann'} by Engelmann
{'key': '2023010802094084900_ref006', 'author': 'Barna', 'year': '1999'} by Barna (1999)
{'key': '2023010802094084900_ref007', 'year': '2002'} (2002)

Dates

Type	When
Created	7 years, 5 months ago (March 14, 2018, 9:05 a.m.)
Deposited	2 years, 6 months ago (Feb. 14, 2023, 4:11 p.m.)
Indexed	1 year, 4 months ago (April 1, 2024, 3:18 p.m.)
Issued	22 years, 4 months ago (April 1, 2003)
Published	22 years, 4 months ago (April 1, 2003)
Published Online	7 years, 5 months ago (March 14, 2018)
Published Print	22 years, 4 months ago (April 1, 2003)

Funders 0

None

BibTeX

@article{Engelmann_2003, title={TEM Sample Preparation Using Focused Ion Beam - Capabilities And Limits}, volume={11}, ISSN={1551-9295}, url={http://dx.doi.org/10.1017/s1551929500052457}, DOI={10.1017/s1551929500052457}, number={2}, journal={Microscopy Today}, publisher={Oxford University Press (OUP)}, author={Engelmann, HJ and Volkmann, B and Ritz, Y and Saage, H and Stegmann, H and de Robiliard, Q and Zschech, E}, year={2003}, month=apr, pages={22–25} }

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