DOI: 10.1017/s1431927622000496. Focused Ion Beam Preparation of Low Melting Point Metals: Lessons Learned From Indium

Focused Ion Beam Preparation of Low Melting Point Metals: Lessons Learned From Indium

10.1017/s1431927622000496

Crossref journal-article

Oxford University Press (OUP)

Microscopy and Microanalysis (286)

Abstract

Indium (In) and other low melting point metals are used as interconnects in a variety of hybridized circuits and a full understanding of the metallurgy of these interconnects is important to the reliability and performance of the devices. This paper shows that room temperature focused ion beam (FIB) preparation of cross-sections, using Ga+ or Xe+ can result in artifacts that obscure the true In microbump structure. The use of modified milling strategies to minimize the increased local sample temperature are shown to produce cross-sections that are representative of the In bump microstructure in some sample configurations. Furthermore, cooling of the sample to cryogenic temperatures is shown to reliably eliminate artifacts in FIB prepared cross-sections of In bumps allowing the true bump microstructure to be observed.

Bibliography

Michael, J. R., Perry, D. L., Cummings, D. P., Walraven, J. A., & Jordan, M. B. (2022). Focused Ion Beam Preparation of Low Melting Point Metals: Lessons Learned From Indium. Microscopy and Microanalysis, 28(3), 603â610.

Authors 5

Joseph R. Michael (first)
Daniel L. Perry (additional)
Damion P. Cummings (additional)
Jeremy A. Walraven (additional)
Matthew B. Jordan (additional)

References 45 Referenced 9

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{'key': 'S1431927622000496_ref23', 'first-page': '331', 'article-title': 'Calculation of local temperature rise in focused-ion-beam sample preparation', 'volume': '44', 'author': 'Ishitani', 'year': '1995', 'journal-title': 'Microscopy'} / Microscopy / Calculation of local temperature rise in focused-ion-beam sample preparation by Ishitani (1995)
{'volume-title': 'Introduction to Focused ion Beams: Instrumentation, Theory, Techniques and Practice', 'year': '2004', 'author': 'Giannuzzi', 'key': 'S1431927622000496_ref19'} / Introduction to Focused ion Beams: Instrumentation, Theory, Techniques and Practice by Giannuzzi (2004)
10.1016/0039-6028(76)90258-2
10.1007/BF02663677
10.1016/j.microrel.2010.09.031
{'key': 'S1431927622000496_ref35', 'article-title': 'Electrical and morphological characterizations of 3D interconnections for quantum computation', 'author': 'Thomas', 'year': '2021', 'journal-title': 'IEEE Trans Compon Packag Manuf Technol'} / IEEE Trans Compon Packag Manuf Technol / Electrical and morphological characterizations of 3D interconnections for quantum computation by Thomas (2021)
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{'key': 'S1431927622000496_ref41', 'first-page': '278', 'article-title': 'ASM handbook', 'volume': '9', 'author': 'Vander Voort', 'year': '2004', 'journal-title': 'Metallogr Microstruct'} / Metallogr Microstruct / ASM handbook by Vander Voort (2004)
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{'key': 'S1431927622000496_ref26', 'first-page': '13', 'article-title': 'Phase stabilities and interfacial reactions of the Cu–In binary systems', 'volume': '31', 'author': 'Lin', 'year': '2020', 'journal-title': 'J Mater Sci: Mater Electron'} / J Mater Sci: Mater Electron / Phase stabilities and interfacial reactions of the Cu–In binary systems by Lin (2020)
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Dates

Type	When
Created	3 years, 4 months ago (March 22, 2022, 5:40 a.m.)
Deposited	2 years, 6 months ago (Feb. 14, 2023, 4:33 p.m.)
Indexed	2 months, 1 week ago (June 12, 2025, 8:28 a.m.)
Issued	3 years, 4 months ago (March 22, 2022)
Published	3 years, 4 months ago (March 22, 2022)
Published Online	3 years, 4 months ago (March 22, 2022)
Published Print	3 years, 2 months ago (June 1, 2022)

Funders 1

Department of Energy, NNSA
Awards1
1. DE-NA0003525

BibTeX

@article{Michael_2022, title={Focused Ion Beam Preparation of Low Melting Point Metals: Lessons Learned From Indium}, volume={28}, ISSN={1435-8115}, url={http://dx.doi.org/10.1017/s1431927622000496}, DOI={10.1017/s1431927622000496}, number={3}, journal={Microscopy and Microanalysis}, publisher={Oxford University Press (OUP)}, author={Michael, Joseph R. and Perry, Daniel L. and Cummings, Damion P. and Walraven, Jeremy A. and Jordan, Matthew B.}, year={2022}, month=mar, pages={603–610} }

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