DOI: 10.1017/s1431927615013720. Theory and New Applications of<i>Ex Situ</i>Lift Out

Theory and New Applications ofEx SituLift Out

10.1017/s1431927615013720

Crossref journal-article

Oxford University Press (OUP)

Microscopy and Microanalysis (286)

Abstract

AbstractTheex situlift out (EXLO) adhesion forces are reviewed and new applications of EXLO for focused ion beam (FIB)-prepared specimens are described. EXLO is used to manipulate electron transparent specimens on microelectromechanical systems carrier devices designed forin situelectron microscope analysis. A new patented grid design without a support film is described for EXLO. This new slotted grid design provides a surface for holding the specimen in place and also allows for post lift out processing. Specimens may be easily manipulated into a backside orientation to reduce FIB curtaining artifacts with this slotted grid. Large EXLO specimens can be manipulated from Xe+plasma FIB prepared specimens. Finally, applications of EXLO and manipulation of FIB specimens using a vacuum probe lift out method are shown. The vacuum probe provides more control for placing specimens on the new slotted grids and also allows for easy manipulation into a backside configuration.

Bibliography

Giannuzzi, L. A., Yu, Z., Yin, D., Harmer, M. P., Xu, Q., Smith, N. S., Chan, L., Hiller, J., Hess, D., & Clark, T. (2015). Theory and New Applications ofEx SituLift Out. Microscopy and Microanalysis, 21(4), 1034â1048.

Authors 10

Lucille A. Giannuzzi (first)
Zhiyang Yu (additional)
Denise Yin (additional)
Martin P. Harmer (additional)
Qiang Xu (additional)
Noel S. Smith (additional)
Lisa Chan (additional)
Jon Hiller (additional)
Dustin Hess (additional)
Trevor Clark (additional)

References 45 Referenced 30

10.1016/S1359-6462(02)00376-7
10.1007/b101190
10.1557/mrs.2014.53
10.1109/JMEMS.2009.2016284
10.1017/S1431927602101577 / Microsc Microanal / FIB damage in silicon: Amorphization or redeposition? by Rajsiri (2002)
10.1007/s11768-005-0052-z
{'key': 'S1431927615013720_ref4', 'volume-title': 'Advanced Micropipette Techniques for Cell Physiology', 'author': 'Brown', 'year': '1986'} / Advanced Micropipette Techniques for Cell Physiology by Brown (1986)
Chan L. , Hiller J.M. & Giannuzzi L.A. (2014). Ex situ lift out of PFIB prepared site specific specimens. ISTFA, ASM International, 9–13 November, Houston, pp. 283–286.
10.1116/1.1318069
10.1557/PROC-480-19
Giannuzzi L.A. (2014 a). Method and apparatus for ex-situ lift out specimen preparation. US Patent No. 8,740,209, June 3.
Petrovic D. , Popovic G. , Chatzitheodoridis E. , Del Medico O. , Almansa A. , Sümecz F. , Brenner W. & Detter H. (2002). Gripping tools for handling and assembly of microcomponents. 23rd International Conference on Microelectronics, IEEE, 12–15 May, Yugoslavia, pp. 247–250. (10.1109/MIEL.2002.1003186)
Tesch P. , Smith N. , Martin N. & Kinion D. (2008). High current focused ion beam instrument for destructive physical analysis applications. ISTFA, 2–6 November, Portland, pp. 7–13. (10.31399/asm.cp.istfa2008p0007)
10.1017/S1431927614003420
10.1116/1.1368198
10.1017/S1431927602105459 / Microsc Microanal / Auger analysis of focused ion beam prepared lift out specimens by Rossie (2002)
10.1017/S1431927603441044 / Micros Microanal / Avoiding the curtaining effect: backside milling by FIB INLO by Schwarz (2003)
Lue J.L. , Chang T.F. , Chen J.C. & Wang T. (2007). A method for precise TEM sample preparation using the FIB ex-situ lift out technique with a modified copper ring in semiconductor devices. AIP Conf Proc 931, 507–511. (10.1063/1.2799426)
10.1017/S1431927610059957
10.1017/S1431927602105502 / Microsc Microanal / “H-Bar Lift-Out” and “Plan-View Lift-Out”: Robust, re-thinnable FIB-TEM preparation for ex-situ cross-sectional and plan-view FIB specimen preparation by Patterson (2002)
Leslie A.J. , Pey K.L. , Sim K.S. , Beh M.T.F. & Goh G.P. (1995). TEM sample preparation using FIB: Practical problems and artifacts. 21st International Symposium for Testing and Failure Analysis, ASM International, 5–10 November, Santa Clara, pp. 353–362.
10.1017/S1431927611004107
10.1017/S143192761400974X
10.1002/sia.1063
Codourey A. , Rodriguez M. & Pappas I. (1997). A task-oriented teleoperation system for assembly in the microworld. Proceedings of ICAR’97: International Conference on Advanced Robotics, Monterey, CA, USA, July 7–9. (10.1109/ICAR.1997.620188)
{'key': 'S1431927615013720_ref1', 'volume-title': 'Physical Chemistry of Surfaces', 'author': 'Adamson', 'year': '1997'} / Physical Chemistry of Surfaces by Adamson (1997)
10.1002/jemt.20673
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10.1017/S1431927614003213
10.1017/S1431927614013476
10.1017/S1431927612005016
Giannuzzi L.A. (2012 b). Routine backside FIB milling with EXpressLO™. ISTFA, pp. 388–390. (10.31399/asm.cp.istfa2012p0388)
10.1017/S1431927613006521
Giannuzzi L.A. (2014 b). Method for ex-situ lift out specimen preparation. US Patent No. 8,789,826, 11–15 November, Phoenix.
Herlinger L.R. , Chevacharoenkul S. & Erwin D.C. (1996). TEM sample preparation using a focused ion beam and a probe manipulator. 22nd International Symposium for Testing and Failure Analysis, ASM International, 18–22 November, Los Angeles, pp. 199–205. (10.31399/asm.cp.istfa1996p0199)
10.1017/S1431927612005119
10.1017/S1431927613006302
Lee J.C. & Lee B.H. (2005). The versatile application for in-situ lift out TEM sample preparation by micromanipulator and nanomotor. ISTFA, 6–10 November, San Jose, pp. 322–326.
10.3390/ijms131012773
10.1116/1.586537
Rajsiri S. (2002). Redeposition effects on FIB milled surfaces. MS Thesis, University of Central Florida, Orlando.
Rossie B.B. , Shorner T.L. , Brown S.R. , Anderson S.D. , Jamison M.M. & Stevie F.A. (2001). A method for thinning FIB prepared TEM specimens after lift out. Microsc Microanal 7(2), 940–941. (10.1017/S1431927600030774)
10.1016/j.ultramic.2009.12.010
{'key': 'S1431927615013720_ref44', 'first-page': '1761', 'article-title': 'Vacuum tool for handling microobjects with a nanorobot', 'volume': '2', 'author': 'Zesch', 'year': '1997', 'journal-title': 'IEEE Int Conf Robot Autom'} / IEEE Int Conf Robot Autom / Vacuum tool for handling microobjects with a nanorobot by Zesch (1997)
10.1002/sia.1448

Dates

Type	When
Created	10 years, 1 month ago (July 16, 2015, 5:31 a.m.)
Deposited	2 years, 6 months ago (Feb. 14, 2023, 4:04 p.m.)
Indexed	4 weeks ago (July 23, 2025, 8:04 a.m.)
Issued	10 years, 1 month ago (July 16, 2015)
Published	10 years, 1 month ago (July 16, 2015)
Published Online	10 years, 1 month ago (July 16, 2015)
Published Print	10 years ago (Aug. 1, 2015)

Funders 0

None

BibTeX

@article{Giannuzzi_2015, title={Theory and New Applications ofEx SituLift Out}, volume={21}, ISSN={1435-8115}, url={http://dx.doi.org/10.1017/s1431927615013720}, DOI={10.1017/s1431927615013720}, number={4}, journal={Microscopy and Microanalysis}, publisher={Oxford University Press (OUP)}, author={Giannuzzi, Lucille A. and Yu, Zhiyang and Yin, Denise and Harmer, Martin P. and Xu, Qiang and Smith, Noel S. and Chan, Lisa and Hiller, Jon and Hess, Dustin and Clark, Trevor}, year={2015}, month=jul, pages={1034–1048} }

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  ],
  "subject": [],
  "container-title-short": "Microsc Microanal",
  "published": {
    "date-parts": [
      [
        2015,
        7,
        16
      ]
    ]
  }
}