DOI: 10.1017/s1431927614003213. High Speed TEM Sample Preparation by Xe FIB

High Speed TEM Sample Preparation by Xe FIB

10.1017/s1431927614003213

Crossref journal-article

Oxford University Press (OUP)

Microscopy and Microanalysis (286)

Bibliography

Delobbe, A., Salord, O., Hrncir, T., David, A., Sudraud, P., & Lopour, F. (2014). High Speed TEM Sample Preparation by Xe FIB. Microscopy and Microanalysis, 20(S3), 298â299.

Authors 6

A. Delobbe (first)
O. Salord (additional)
T. Hrncir (additional)
A. David (additional)
P. Sudraud (additional)
F. Lopour (additional)

References 6 Referenced 18

Giannuzzi LA , Smith NS Microsc. Microanal. 17 2011), p. 646. (10.1017/S1431927611004107)
Szot J , et al J. Vac. Sci. Technol. B 10 1992), p. 575. (10.1116/1.586415)
Delobbe A , Salord O & Sudraud P The European Focused Ion Beam Users Group (EFUG) annual meeting 2011),http://www.imec.be/efug/EFUG20o.html.
Overwijk MHF , van del Heuvel FC , Bulle-Lieuwma CWT J. Vac. Sci. Technol. B 11 1993), p. 2021. (10.1116/1.586537)
Young RJ Cleaver JRA & Ahmed H Microelectron. Eng. 11 1990), p. 409. (10.1016/0167-9317(90)90140-O)
Hrnčíř T , et al ISTFA: Conference Proceedings from the 38th International Symposium for Testing and Failure Analysis 2012), p. 26.

Dates

Type	When
Created	10 years, 11 months ago (Aug. 27, 2014, 9:05 a.m.)
Deposited	2 years, 6 months ago (Feb. 14, 2023, 3:47 p.m.)
Indexed	5 months ago (March 19, 2025, 9:42 a.m.)
Issued	11 years ago (Aug. 1, 2014)
Published	11 years ago (Aug. 1, 2014)
Published Online	10 years, 11 months ago (Aug. 27, 2014)
Published Print	11 years ago (Aug. 1, 2014)

Funders 0

None

BibTeX

@article{Delobbe_2014, title={High Speed TEM Sample Preparation by Xe FIB}, volume={20}, ISSN={1435-8115}, url={http://dx.doi.org/10.1017/s1431927614003213}, DOI={10.1017/s1431927614003213}, number={S3}, journal={Microscopy and Microanalysis}, publisher={Oxford University Press (OUP)}, author={Delobbe, A. and Salord, O. and Hrncir, T. and David, A. and Sudraud, P. and Lopour, F.}, year={2014}, month=aug, pages={298–299} }

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