DOI: 10.1017/s1431927613006302. Xe+ FIB Milling and Measurement of Amorphous Silicon Damage

Xe+ FIB Milling and Measurement of Amorphous Silicon Damage

10.1017/s1431927613006302

Crossref journal-article

Oxford University Press (OUP)

Microscopy and Microanalysis (286)

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Bibliography

Kelley, R. D., Song, K., Van Leer, B., Wall, D., & Kwakman, L. (2013). Xe+ FIB Milling and Measurement of Amorphous Silicon Damage. Microscopy and Microanalysis, 19(S2), 862â863.

Authors 5

R.D. Kelley (first)
K. Song (additional)
B. Van Leer (additional)
D. Wall (additional)
L. Kwakman (additional)

References 0 Referenced 58

None

Dates

Type	When
Created	9 years, 10 months ago (Oct. 13, 2015, 5:36 p.m.)
Deposited	2 years, 6 months ago (Feb. 14, 2023, 4:06 p.m.)
Indexed	3 weeks, 6 days ago (July 24, 2025, 7:55 a.m.)
Issued	12 years ago (Aug. 1, 2013)
Published	12 years ago (Aug. 1, 2013)
Published Online	11 years, 10 months ago (Oct. 9, 2013)
Published Print	12 years ago (Aug. 1, 2013)

Funders 0

None

BibTeX

@article{Kelley_2013, title={Xe+ FIB Milling and Measurement of Amorphous Silicon Damage}, volume={19}, ISSN={1435-8115}, url={http://dx.doi.org/10.1017/s1431927613006302}, DOI={10.1017/s1431927613006302}, number={S2}, journal={Microscopy and Microanalysis}, publisher={Oxford University Press (OUP)}, author={Kelley, R.D. and Song, K. and Van Leer, B. and Wall, D. and Kwakman, L.}, year={2013}, month=aug, pages={862–863} }

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