DOI: 10.1017/s1431927612000244. Data Processing for Atomic Resolution Electron Energy Loss Spectroscopy

Data Processing for Atomic Resolution Electron Energy Loss Spectroscopy

10.1017/s1431927612000244

Crossref journal-article

Oxford University Press (OUP)

Microscopy and Microanalysis (286)

Abstract

AbstractThe high beam current and subangstrom resolution of aberration-corrected scanning transmission electron microscopes has enabled electron energy loss spectroscopy (EELS) mapping with atomic resolution. These spectral maps are often dose limited and spatially oversampled, leading to low counts/channel and are thus highly sensitive to errors in background estimation. However, by taking advantage of redundancy in the dataset map, one can improve background estimation and increase chemical sensitivity. We consider two such approaches—linear combination of power laws and local background averaging—that reduce background error and improve signal extraction. Principal component analysis (PCA) can also be used to analyze spectrum images, but the poor peak-to-background ratio in EELS can lead to serious artifacts if raw EELS data are PCA filtered. We identify common artifacts and discuss alternative approaches. These algorithms are implemented within the Cornell Spectrum Imager, an open source software package for spectroscopic analysis.

Bibliography

Cueva, P., Hovden, R., Mundy, J. A., Xin, H. L., & Muller, D. A. (2012). Data Processing for Atomic Resolution Electron Energy Loss Spectroscopy. Microscopy and Microanalysis, 18(4), 667â675.

Authors 5

Paul Cueva (first)
Robert Hovden (additional)
Julia A. Mundy (additional)
Huolin L. Xin (additional)
David A. Muller (additional)

References 28 Referenced 112

10.1103/PhysRevLett.99.086102
10.1016/0304-3991(82)90101-2
10.1080/14786440109462720
{'key': 'S1431927612000244_ref026', 'first-page': '245', 'article-title': 'Optimal background estimation in EELS', 'volume': '145', 'author': 'Unser', 'year': '1987', 'journal-title': 'J Microsc'} / J Microsc / Optimal background estimation in EELS by Unser (1987)
10.1080/14786437508229296
10.1038/nmat2380
10.1111/j.1365-2818.1985.tb02565.x
10.1002/sia.1657
10.1080/01621459.1989.10478752
10.1126/science.1148820
10.1063/1.1714956
10.1111/j.1365-2818.1987.tb02816.x
10.1016/j.ultramic.2004.06.004
10.1002/3527605495.ch3 / Transmission Electron Energy Loss Spectrometry in Materials Science and the EELS Atlas by Leapman (2004)
10.1016/j.ultramic.2010.03.008
10.1038/nature00972
10.1007/978-1-4419-9583-4
10.1016/S0304-3991(01)00155-3
10.1111/j.1365-2818.1981.tb01303.x
10.1016/0304-3991(91)90108-I
10.1016/j.ultramic.2006.04.016
{'key': 'S1431927612000244_ref024', 'first-page': '153', 'volume-title': 'Microbeam Analysis', 'author': 'Rez', 'year': '1983'} / Microbeam Analysis by Rez (1983)
10.1017/S1431927606067481
10.1016/0304-3991(89)90304-5
10.1016/0304-3991(90)90070-3
10.1016/S0304-3991(99)00042-X
10.1366/000370209787598843
10.1016/j.ultramic.2007.07.010

Dates

Type	When
Created	13 years, 2 months ago (June 15, 2012, 5:14 a.m.)
Deposited	1 year, 3 months ago (April 25, 2024, 10:12 a.m.)
Indexed	1 week, 6 days ago (Aug. 7, 2025, 4:59 a.m.)
Issued	13 years, 2 months ago (June 15, 2012)
Published	13 years, 2 months ago (June 15, 2012)
Published Online	13 years, 2 months ago (June 15, 2012)
Published Print	13 years ago (Aug. 1, 2012)

Funders 0

None

BibTeX

@article{Cueva_2012, title={Data Processing for Atomic Resolution Electron Energy Loss Spectroscopy}, volume={18}, ISSN={1435-8115}, url={http://dx.doi.org/10.1017/s1431927612000244}, DOI={10.1017/s1431927612000244}, number={4}, journal={Microscopy and Microanalysis}, publisher={Oxford University Press (OUP)}, author={Cueva, Paul and Hovden, Robert and Mundy, Julia A. and Xin, Huolin L. and Muller, David A.}, year={2012}, month=jun, pages={667–675} }

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