DOI: 10.1017/s143192760707095x. Overview: Recent Progress in Three-Dimensional Atom Probe Instruments and Applications

Overview: Recent Progress in Three-Dimensional Atom Probe Instruments and Applications

10.1017/s143192760707095x

Crossref journal-article

Oxford University Press (OUP)

Microscopy and Microanalysis (286)

Abstract

Over the last few years there have been significant developments in the field of three-dimensional atom probe (3DAP) analysis. This article reviews some of the technical compromises that have led to different instrument designs and the recent improvements in performance. An instrument has now been developed, based around a novel reflectron configuration combining both energy compensation and focusing elements, that yields a large field of view and very high mass resolution. The use of laser pulsing in the 3DAP, together with developments in specimen preparation methods using a focused ion-beam instrument, have led to a significant widening in the range of materials science problems that can be addressed with the 3DAP. Recent studies of semiconductor materials and devices are described.

Bibliography

Cerezo, A., Clifton, P. H., Lozano-Perez, S., Panayi, P., Sha, G., & Smith, G. D. W. (2007). Overview: Recent Progress in Three-Dimensional Atom Probe Instruments and Applications. Microscopy and Microanalysis, 13(6), 408â417.

Authors 6

Alfred Cerezo (first)
Peter H. Clifton (additional)
Sergio Lozano-Perez (additional)
Peter Panayi (additional)
Gang Sha (additional)
George D.W. Smith (additional)

References 49 Referenced 41

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10.1063/1.2431573

Dates

Type	When
Created	17 years, 9 months ago (Nov. 15, 2007, 7:37 a.m.)
Deposited	1 year, 6 months ago (Feb. 18, 2024, 9:54 p.m.)
Indexed	1 year, 1 month ago (June 22, 2024, 4:32 p.m.)
Issued	17 years, 9 months ago (Nov. 14, 2007)
Published	17 years, 9 months ago (Nov. 14, 2007)
Published Online	17 years, 9 months ago (Nov. 14, 2007)
Published Print	17 years, 8 months ago (Dec. 1, 2007)

Funders 0

None

BibTeX

@article{Cerezo_2007, title={Overview: Recent Progress in Three-Dimensional Atom Probe Instruments and Applications}, volume={13}, ISSN={1435-8115}, url={http://dx.doi.org/10.1017/s143192760707095x}, DOI={10.1017/s143192760707095x}, number={6}, journal={Microscopy and Microanalysis}, publisher={Oxford University Press (OUP)}, author={Cerezo, Alfred and Clifton, Peter H. and Lozano-Perez, Sergio and Panayi, Peter and Sha, Gang and Smith, George D.W.}, year={2007}, month=nov, pages={408–417} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        6,
        22
      ]
    ],
    "date-time": "2024-06-22T20:32:44Z",
    "timestamp": 1719088364585
  },
  "reference-count": 49,
  "publisher": "Oxford University Press (OUP)",
  "issue": "6",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2007,
            11,
            14
          ]
        ],
        "date-time": "2007-11-14T00:00:00Z",
        "timestamp": 1194998400000
      },
      "content-version": "unspecified",
      "delay-in-days": 0,
      "URL": "https://www.cambridge.org/core/terms"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2007,
        12
      ]
    ]
  },
  "abstract": "<jats:p>Over the last few years there have been significant developments in the field of three-dimensional atom probe (3DAP) analysis. This article reviews some of the technical compromises that have led to different instrument designs and the recent improvements in performance. An instrument has now been developed, based around a novel reflectron configuration combining both energy compensation and focusing elements, that yields a large field of view and very high mass resolution. The use of laser pulsing in the 3DAP, together with developments in specimen preparation methods using a focused ion-beam instrument, have led to a significant widening in the range of materials science problems that can be addressed with the 3DAP. Recent studies of semiconductor materials and devices are described.</jats:p>",
  "DOI": "10.1017/s143192760707095x",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2007,
        11,
        15
      ]
    ],
    "date-time": "2007-11-15T12:37:18Z",
    "timestamp": 1195130238000
  },
  "page": "408-417",
  "source": "Crossref",
  "is-referenced-by-count": 41,
  "title": "Overview: Recent Progress in Three-Dimensional Atom Probe Instruments and Applications",
  "prefix": "10.1093",
  "volume": "13",
  "author": [
    {
      "given": "Alfred",
      "family": "Cerezo",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Peter H.",
      "family": "Clifton",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Sergio",
      "family": "Lozano-Perez",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Peter",
      "family": "Panayi",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Gang",
      "family": "Sha",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "George D.W.",
      "family": "Smith",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "286",
  "published-online": {
    "date-parts": [
      [
        2007,
        11,
        14
      ]
    ]
  },
  "reference": [
    {
      "key": "S143192760707095X_ref048",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/S1359-6462(00)00361-4"
    },
    {
      "key": "S143192760707095X_ref040",
      "unstructured": "Smith, G.D.W. , Grovenor, C.R.M. , Delargy, K.M. , Godfrey, T.J. & McCabe, A.R. (1982).Direct comparison of performance of atom probe in pulsed-laser and voltage-pulsed modes. InProceedings of the 29th International Field Emission Symposium, Andr\u00e9n, H.-O. & Norden, H. (Eds.), pp.283\u2013289.Stockholm:Almquist and Wiksell International."
    },
    {
      "key": "S143192760707095X_ref022",
      "doi-asserted-by": "publisher",
      "DOI": "10.1103/PhysRevB.48.6724"
    },
    {
      "key": "S143192760707095X_ref035",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0169-4332(94)90376-X"
    },
    {
      "key": "S143192760707095X_ref016",
      "doi-asserted-by": "publisher",
      "DOI": "10.1017/S1431927607070948"
    },
    {
      "key": "S143192760707095X_ref011",
      "doi-asserted-by": "publisher",
      "DOI": "10.1088/0370-1298/62/1/308"
    },
    {
      "key": "S143192760707095X_ref047",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0039-6028(77)90192-3"
    },
    {
      "key": "S143192760707095X_ref037",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.1686295"
    },
    {
      "key": "S143192760707095X_ref043",
      "doi-asserted-by": "publisher",
      "DOI": "10.1046/j.1365-2818.1999.00637.x"
    },
    {
      "key": "S143192760707095X_ref036",
      "unstructured": "Panayi, P. (2006).Reflectron.International patent application WO2006/120428, published November 16, 2006."
    },
    {
      "key": "S143192760707095X_ref039",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.2149188"
    },
    {
      "key": "S143192760707095X_ref029",
      "doi-asserted-by": "crossref",
      "unstructured": "Miller, M.K. , Cerezo, A. , Hetherington, M.G. & Smith, G.D.W. (1996).Atom Probe Field\u2013Ion Microscopy, pp.447\u2013465.Oxford, UK:Oxford University Press.",
      "DOI": "10.1093/oso/9780198513872.001.0001"
    },
    {
      "key": "S143192760707095X_ref031",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/j.ultramic.2004.10.011"
    },
    {
      "key": "S143192760707095X_ref024",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/j.actamat.2004.03.015"
    },
    {
      "key": "S143192760707095X_ref017",
      "doi-asserted-by": "publisher",
      "DOI": "10.1017/S1431927607070894"
    },
    {
      "key": "S143192760707095X_ref007",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.1148477"
    },
    {
      "key": "S143192760707095X_ref020",
      "doi-asserted-by": "publisher",
      "DOI": "10.1017/S1431927604040565"
    },
    {
      "key": "S143192760707095X_ref015",
      "doi-asserted-by": "crossref",
      "unstructured": "Gault, B. , Vurpillot, F. , Vella, A. , Gilbert, M. , Menand, A. , Blavette, D. & Deconihout, B. (2006b).Design of a femtosecond laser assisted tomographic atom probe.Rev Sci Instrum 77,043705.",
      "DOI": "10.1063/1.2194089"
    },
    {
      "key": "S143192760707095X_ref032",
      "doi-asserted-by": "publisher",
      "DOI": "10.1017/S1431927607070845"
    },
    {
      "key": "S143192760707095X_ref023",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/S0304-3991(99)00055-8"
    },
    {
      "key": "S143192760707095X_ref038",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/S1359-6454(99)00054-3"
    },
    {
      "key": "S143192760707095X_ref028",
      "doi-asserted-by": "publisher",
      "DOI": "10.1103/PhysRevLett.91.036101"
    },
    {
      "key": "S143192760707095X_ref009",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.2191412"
    },
    {
      "key": "S143192760707095X_ref004",
      "doi-asserted-by": "publisher",
      "DOI": "10.1017/S143192760707078X"
    },
    {
      "key": "S143192760707095X_ref041",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/S1044-5803(99)00052-2"
    },
    {
      "key": "S143192760707095X_ref008",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.1139794"
    },
    {
      "key": "S143192760707095X_ref014",
      "doi-asserted-by": "crossref",
      "unstructured": "Gault, B. , Menand, A. , De Geuser, F. & Deconihout, B. (2006a).Investigation of an oxide layer by femtosecond-laser-assisted atom probe tomography.Appl Phys Lett 88,114101.",
      "DOI": "10.1063/1.2186394"
    },
    {
      "key": "S143192760707095X_ref045",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.2181654"
    },
    {
      "key": "S143192760707095X_ref025",
      "doi-asserted-by": "crossref",
      "unstructured": "Larson, D.J. , Wissman, B.D. , Martens, R.L. , Viellieux, R.J. , Kelly, T.F. , Gribb, T.T. , Erskine, H.F. & Tabat, N. (2001).Advances in atom probe specimen fabrication from planar multilayer thin film structures.Microsc Microanal 7,24\u201331.",
      "DOI": "10.1007/S100050010058"
    },
    {
      "key": "S143192760707095X_ref018",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/TNS.2002.803889"
    },
    {
      "key": "S143192760707095X_ref006",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/j.ultramic.2007.02.025"
    },
    {
      "key": "S143192760707095X_ref030",
      "doi-asserted-by": "crossref",
      "unstructured": "Miller, M.K. , Hyde, J.M. , Hetherington, M.G. , Cerezo, A. , Smith, G.D.W. & Elliott, C.M. (1995).Spinodal decomposition in Fe\u2013Cr alloys: Experimental study at the atomic level and comparison with computer models. (3 papers.) Acta Met Mater 43,3385\u20133426.",
      "DOI": "10.1016/0956-7151(95)00040-3"
    },
    {
      "key": "S143192760707095X_ref005",
      "doi-asserted-by": "publisher",
      "DOI": "10.1017/S1431927607070869"
    },
    {
      "key": "S143192760707095X_ref034",
      "unstructured": "M\u00fcller, E.W. , Panitz, J.A. & McLean, S.B. (1956).Atom probe field-ion microscopy.Rev Sci Instrum 39,83\u201386."
    },
    {
      "key": "S143192760707095X_ref002",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/j.susc.2006.05.026"
    },
    {
      "key": "S143192760707095X_ref012",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.1829975"
    },
    {
      "key": "S143192760707095X_ref042",
      "doi-asserted-by": "publisher",
      "DOI": "10.1103/PhysRevB.73.165416"
    },
    {
      "key": "S143192760707095X_ref044",
      "doi-asserted-by": "publisher",
      "DOI": "10.1046/j.1365-2818.2001.00923.x"
    },
    {
      "key": "S143192760707095X_ref049",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/S1359-6454(01)00287-7"
    },
    {
      "key": "S143192760707095X_ref027",
      "unstructured": "Liu, J. , Wu, C.W. & Tsong, T.T. (1991).Measurement of the atomic site specific binding-energy of surface atoms of metals and alloys.Surf Sci 246,157\u2013162."
    },
    {
      "key": "S143192760707095X_ref003",
      "doi-asserted-by": "publisher",
      "DOI": "10.1126/science.286.5448.2317"
    },
    {
      "key": "S143192760707095X_ref019",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.327686"
    },
    {
      "key": "S143192760707095X_ref021",
      "doi-asserted-by": "publisher",
      "DOI": "10.1146/annurev.matsci.37.052506.084239"
    },
    {
      "key": "S143192760707095X_ref033",
      "unstructured": "M\u00fcller, E.W. (1968).Resolution of the atomic structure of a metal surface by the field ion microscope.J Appl Phys 27,474\u2013476."
    },
    {
      "key": "S143192760707095X_ref001",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/j.susc.2007.03.030"
    },
    {
      "key": "S143192760707095X_ref026",
      "doi-asserted-by": "publisher",
      "DOI": "10.1017/S143192760606394X"
    },
    {
      "key": "S143192760707095X_ref046",
      "doi-asserted-by": "publisher",
      "DOI": "10.1051/jphyscol:1984934"
    },
    {
      "key": "S143192760707095X_ref010",
      "unstructured": "Chang, L. , Barnard, S.J. & Smith, G.D.W. (1983).Imaging atom probe study of solute atmospheres surrounding dislocations in iron-carbon alloys. InProceedings of the 30th International Field Emission Symposium, Graham, W.R. & Melmed, A.J. (Eds.), pp.97\u201399.Philadelphia:University of Pennsylvania."
    },
    {
      "key": "S143192760707095X_ref013",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.2431573"
    }
  ],
  "container-title": "Microscopy and Microanalysis",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://www.cambridge.org/core/services/aop-cambridge-core/content/view/S143192760707095X",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        19
      ]
    ],
    "date-time": "2024-02-19T02:54:56Z",
    "timestamp": 1708311296000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://academic.oup.com/mam/article/13/6/408/6912603"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2007,
        11,
        14
      ]
    ]
  },
  "references-count": 49,
  "journal-issue": {
    "issue": "6",
    "published-print": {
      "date-parts": [
        [
          2007,
          12
        ]
      ]
    }
  },
  "alternative-id": [
    "S143192760707095X"
  ],
  "URL": "http://dx.doi.org/10.1017/S143192760707095X",
  "relation": {},
  "ISSN": [
    "1431-9276",
    "1435-8115"
  ],
  "subject": [],
  "container-title-short": "Microsc Microanal",
  "published": {
    "date-parts": [
      [
        2007,
        11,
        14
      ]
    ]
  }
}