DOI: 10.1017/s1431927607070845. Review of Atom Probe FIB-Based Specimen Preparation Methods

Review of Atom Probe FIB-Based Specimen Preparation Methods

10.1017/s1431927607070845

Crossref journal-article

Oxford University Press (OUP)

Microscopy and Microanalysis (286)

Abstract

Several FIB-based methods that have been developed to fabricate needle-shaped atom probe specimens from a variety of specimen geometries, and site-specific regions are reviewed. These methods have enabled electronic device structures to be characterized. The atom probe may be used to quantify the level and range of gallium implantation and has demonstrated that the use of low accelerating voltages during the final stages of milling can dramatically reduce the extent of gallium implantation.

Bibliography

Miller, M. K., Russell, K. F., Thompson, K., Alvis, R., & Larson, D. J. (2007). Review of Atom Probe FIB-Based Specimen Preparation Methods. Microscopy and Microanalysis, 13(6), 428â436.

Authors 5

Michael K. Miller (first)
Kaye F. Russell (additional)
Keith Thompson (additional)
Roger Alvis (additional)
David J. Larson (additional)

References 26 Referenced 367

10.1016/j.ultramic.2006.06.008
10.1016/S0968-4328(99)00005-0
Ziegler, J.F. , Biersack, J.P. & Littmark, U. (1977–1985).The Stopping and Range of Ions in Matter,vols. 2–6.New York:Pergamon Press.
10.1016/j.intermet.2006.01.040
10.1016/j.physb.2006.12.024
10.1016/j.ultramicrosopy.2007.02.023
10.1016/S0304-3991(98)00058-8
10.1016/j.ultramic.2004.01.010
10.1002/(SICI)1097-0029(19980515)41:4<285::AID-JEMT1>3.0.CO;2-Q
Anderson, R. & Klepeis, S.J. (1997).Specimen Preparation for Transmission Electron Microscopy of Materials, IV, Anderson, R. & Walck, S.D. (Eds.), pp.187–192.Pittsburgh, PA:Materials Research Society.
10.1017/S1431927606065317
Larson, D.J. , Foord, D.T. , Petford-Long, A.K. , Liew, H. , Blamire, M.G. , Cerezo, A. & Smith, G.D.W. (1999a).Field-ion specimen preparation using focused ion-beam milling.Ultramicroscopy 79,287–293. (10.1016/S0304-3991(99)00055-8)
10.1017/S1431927604883466
Larson, D.J. , Russell, K.F. & Miller, M.K. (1999b).Effect of the specimen aspect ratio on the reconstruction of atom probe tomography data.Microsc Microanal 5,930–931. (10.1017/S1431927600017979)
10.1016/j.ultramic.2004.10.011
10.1116/1.585846
Giannuzzi, L.A. & Stevie, F.A. (2004).Introduction to Focused Ion Beams.New York:Kluwer Academic Press.
10.1016/j.ultramicrosopy.2007.02.024
10.1017/S1431927604883193
10.1017/S1431927606065457
10.1016/S1044-5803(99)00055-8
10.1017/S1431927606062817
10.1116/1.591194
Larson, D.J. , Wissman, B.D. , Viellieux, R.J. , Martens, R.L. , Gribb, T.T. , Erskine, H.F. , Kelly, T.F. & Tabat, N. (2001).Advances in sharp needle fabrication from multilayer thin film structures.Microsc Microanal 7,24–31. (10.1007/S100050010058)
10.1116/1.1445165
10.1017/S143192760606394X

Dates

Type	When
Created	17 years, 9 months ago (Nov. 15, 2007, 7:37 a.m.)
Deposited	2 years, 6 months ago (Feb. 14, 2023, 3:39 p.m.)
Indexed	1 week, 1 day ago (Aug. 12, 2025, 6:09 p.m.)
Issued	17 years, 9 months ago (Nov. 14, 2007)
Published	17 years, 9 months ago (Nov. 14, 2007)
Published Online	17 years, 9 months ago (Nov. 14, 2007)
Published Print	17 years, 8 months ago (Dec. 1, 2007)

Funders 0

None

BibTeX

@article{Miller_2007, title={Review of Atom Probe FIB-Based Specimen Preparation Methods}, volume={13}, ISSN={1435-8115}, url={http://dx.doi.org/10.1017/s1431927607070845}, DOI={10.1017/s1431927607070845}, number={6}, journal={Microscopy and Microanalysis}, publisher={Oxford University Press (OUP)}, author={Miller, Michael K. and Russell, Kaye F. and Thompson, Keith and Alvis, Roger and Larson, David J.}, year={2007}, month=nov, pages={428–436} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        12
      ]
    ],
    "date-time": "2025-08-12T22:09:07Z",
    "timestamp": 1755036547508
  },
  "reference-count": 26,
  "publisher": "Oxford University Press (OUP)",
  "issue": "6",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2007,
            11,
            14
          ]
        ],
        "date-time": "2007-11-14T00:00:00Z",
        "timestamp": 1194998400000
      },
      "content-version": "unspecified",
      "delay-in-days": 0,
      "URL": "https://www.cambridge.org/core/terms"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2007,
        12
      ]
    ]
  },
  "abstract": "<jats:p>Several FIB-based methods that have been developed to fabricate needle-shaped atom probe specimens from a variety of specimen geometries, and site-specific regions are reviewed. These methods have enabled electronic device structures to be characterized. The atom probe may be used to quantify the level and range of gallium implantation and has demonstrated that the use of low accelerating voltages during the final stages of milling can dramatically reduce the extent of gallium implantation.</jats:p>",
  "DOI": "10.1017/s1431927607070845",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2007,
        11,
        15
      ]
    ],
    "date-time": "2007-11-15T12:37:18Z",
    "timestamp": 1195130238000
  },
  "page": "428-436",
  "source": "Crossref",
  "is-referenced-by-count": 367,
  "title": "Review of Atom Probe FIB-Based Specimen Preparation Methods",
  "prefix": "10.1093",
  "volume": "13",
  "author": [
    {
      "given": "Michael K.",
      "family": "Miller",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Kaye F.",
      "family": "Russell",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Keith",
      "family": "Thompson",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Roger",
      "family": "Alvis",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "David J.",
      "family": "Larson",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "286",
  "published-online": {
    "date-parts": [
      [
        2007,
        11,
        14
      ]
    ]
  },
  "reference": [
    {
      "key": "S1431927607070845_ref023",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/j.ultramic.2006.06.008"
    },
    {
      "key": "S1431927607070845_ref006",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/S0968-4328(99)00005-0"
    },
    {
      "key": "S1431927607070845_ref026",
      "unstructured": "Ziegler, J.F. , Biersack, J.P. & Littmark, U. (1977\u20131985).The Stopping and Range of Ions in Matter,vols. 2\u20136.New York:Pergamon Press."
    },
    {
      "key": "S1431927607070845_ref016",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/j.intermet.2006.01.040"
    },
    {
      "key": "S1431927607070845_ref002",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/j.physb.2006.12.024"
    },
    {
      "key": "S1431927607070845_ref018",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/j.ultramicrosopy.2007.02.023"
    },
    {
      "key": "S1431927607070845_ref010",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/S0304-3991(98)00058-8"
    },
    {
      "key": "S1431927607070845_ref021",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/j.ultramic.2004.01.010"
    },
    {
      "key": "S1431927607070845_ref005",
      "doi-asserted-by": "publisher",
      "DOI": "10.1002/(SICI)1097-0029(19980515)41:4<285::AID-JEMT1>3.0.CO;2-Q"
    },
    {
      "key": "S1431927607070845_ref001",
      "unstructured": "Anderson, R. & Klepeis, S.J. (1997).Specimen Preparation for Transmission Electron Microscopy of Materials, IV, Anderson, R. & Walck, S.D. (Eds.), pp.187\u2013192.Pittsburgh, PA:Materials Research Society."
    },
    {
      "key": "S1431927607070845_ref004",
      "doi-asserted-by": "publisher",
      "DOI": "10.1017/S1431927606065317"
    },
    {
      "key": "S1431927607070845_ref011",
      "doi-asserted-by": "crossref",
      "unstructured": "Larson, D.J. , Foord, D.T. , Petford-Long, A.K. , Liew, H. , Blamire, M.G. , Cerezo, A. & Smith, G.D.W. (1999a).Field-ion specimen preparation using focused ion-beam milling.Ultramicroscopy 79,287\u2013293.",
      "DOI": "10.1016/S0304-3991(99)00055-8"
    },
    {
      "key": "S1431927607070845_ref024",
      "doi-asserted-by": "publisher",
      "DOI": "10.1017/S1431927604883466"
    },
    {
      "key": "S1431927607070845_ref013",
      "doi-asserted-by": "crossref",
      "unstructured": "Larson, D.J. , Russell, K.F. & Miller, M.K. (1999b).Effect of the specimen aspect ratio on the reconstruction of atom probe tomography data.Microsc Microanal 5,930\u2013931.",
      "DOI": "10.1017/S1431927600017979"
    },
    {
      "key": "S1431927607070845_ref019",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/j.ultramic.2004.10.011"
    },
    {
      "key": "S1431927607070845_ref025",
      "doi-asserted-by": "publisher",
      "DOI": "10.1116/1.585846"
    },
    {
      "key": "S1431927607070845_ref007",
      "unstructured": "Giannuzzi, L.A. & Stevie, F.A. (2004).Introduction to Focused Ion Beams.New York:Kluwer Academic Press."
    },
    {
      "key": "S1431927607070845_ref020",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/j.ultramicrosopy.2007.02.024"
    },
    {
      "key": "S1431927607070845_ref003",
      "doi-asserted-by": "publisher",
      "DOI": "10.1017/S1431927604883193"
    },
    {
      "key": "S1431927607070845_ref022",
      "doi-asserted-by": "publisher",
      "DOI": "10.1017/S1431927606065457"
    },
    {
      "key": "S1431927607070845_ref008",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/S1044-5803(99)00055-8"
    },
    {
      "key": "S1431927607070845_ref017",
      "doi-asserted-by": "publisher",
      "DOI": "10.1017/S1431927606062817"
    },
    {
      "key": "S1431927607070845_ref012",
      "doi-asserted-by": "publisher",
      "DOI": "10.1116/1.591194"
    },
    {
      "key": "S1431927607070845_ref014",
      "doi-asserted-by": "crossref",
      "unstructured": "Larson, D.J. , Wissman, B.D. , Viellieux, R.J. , Martens, R.L. , Gribb, T.T. , Erskine, H.F. , Kelly, T.F. & Tabat, N. (2001).Advances in sharp needle fabrication from multilayer thin film structures.Microsc Microanal 7,24\u201331.",
      "DOI": "10.1007/S100050010058"
    },
    {
      "key": "S1431927607070845_ref009",
      "doi-asserted-by": "publisher",
      "DOI": "10.1116/1.1445165"
    },
    {
      "key": "S1431927607070845_ref015",
      "doi-asserted-by": "publisher",
      "DOI": "10.1017/S143192760606394X"
    }
  ],
  "container-title": "Microscopy and Microanalysis",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://www.cambridge.org/core/services/aop-cambridge-core/content/view/S1431927607070845",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        2,
        14
      ]
    ],
    "date-time": "2023-02-14T20:39:10Z",
    "timestamp": 1676407150000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://academic.oup.com/mam/article/13/6/428/6912594"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2007,
        11,
        14
      ]
    ]
  },
  "references-count": 26,
  "journal-issue": {
    "issue": "6",
    "published-print": {
      "date-parts": [
        [
          2007,
          12
        ]
      ]
    }
  },
  "alternative-id": [
    "S1431927607070845"
  ],
  "URL": "http://dx.doi.org/10.1017/S1431927607070845",
  "relation": {},
  "ISSN": [
    "1431-9276",
    "1435-8115"
  ],
  "subject": [],
  "container-title-short": "Microsc Microanal",
  "published": {
    "date-parts": [
      [
        2007,
        11,
        14
      ]
    ]
  }
}