DOI: 10.1017/s1431927600035030. Revisiting the FIB TEM Lift-Out Specimen Preparation Technique

Revisiting the FIB TEM Lift-Out Specimen Preparation Technique

10.1017/s1431927600035030

Crossref journal-article

Oxford University Press (OUP)

Microscopy and Microanalysis (286)

Abstract

Abstract In recent years, the focused ion beam (FIB) instrument has developed into a mainstay tool for the production of specimens for both scanning and transmission electron microscopy ((S)TEM). The inception and subsequent development of the FIB TEM lift-out (LO) technique has enabled electron transparent membranes of generally uniform thickness to be produced for TEM analysis. In general, the primary advantage of the FIB is that site specific sections may be fabricated quickly (e.g., &lt; 1 hour) and reproducibly. Specifically, the FIB LO technique has been used extensively in our laboratories to produce on the order of a thousand Si-based specimens per year and hundreds of other specimens per year that have included metals, ceramics, composites, biological materials, geological materials, polymers, particles, and fibers, prepared in cross-section, plan view, and from fracture surfaces.

Bibliography

Giannuzzi, L. A., & Stevie, F. A. (2000). Revisiting the FIB TEM Lift-Out Specimen Preparation Technique. Microscopy and Microanalysis, 6(S2), 508â509.

Authors 2

L A Giannuzzi (first)
F A Stevie (additional)

References 9 Referenced 2

10.1557/PROC-480-19 / Mat. Res. Soc. Symp. Proc. by Giannuzzi (1997)
10.1063/1.56881 / Charact. And Metrology for ULSI Technology: 1998 Conference by Stevie (1998)
10.1002/(SICI)1097-0029(19980515)41:4<285::AID-JEMT1>3.0.CO;2-Q / Microscopy Research and Technique by Giannuzzi (1998)
{'issue': '3,4', 'key': '2024091007470915700_ref4', 'first-page': '162', 'volume': 'IV', 'author': 'Giannuzzi', 'year': '1999', 'journal-title': 'J. Process Analytical Chemistry'} / J. Process Analytical Chemistry by Giannuzzi (1999)
10.1007/s11661-998-0116-z / Metallurgical and Materials Transactions A. by Prenitzer (1998)
{'key': '2024091007470915700_ref6', 'first-page': '249', 'article-title': 'Microstructural Science', 'volume': '26', 'author': 'Giannuzzi', 'year': '1999', 'journal-title': 'The 31st Annual Technical Meeting of the International Metallographical Society'} / The 31st Annual Technical Meeting of the International Metallographical Society / Microstructural Science by Giannuzzi (1999)
{'issue': '4', 'key': '2024091007470915700_ref7', 'first-page': '115', 'volume': '20', 'author': 'Giannuzzi', 'year': '1999', 'journal-title': '23rd Ann. Conf. on Comp., Adv. Cer., Mat., and Struct.: B, Cer. Eng. and Sci. Proc'} / 23rd Ann. Conf. on Comp., Adv. Cer., Mat., and Struct.: B, Cer. Eng. and Sci. Proc by Giannuzzi (1999)
{'key': '2024091007470915700_ref8'}
{'key': '2024091007470915700_ref9'}

Dates

Type	When
Created	5 years, 1 month ago (July 2, 2020, 4:36 a.m.)
Deposited	11 months, 1 week ago (Sept. 10, 2024, 7:36 a.m.)
Indexed	11 months, 1 week ago (Sept. 10, 2024, 8:43 a.m.)
Issued	25 years ago (Aug. 1, 2000)
Published	25 years ago (Aug. 1, 2000)
Published Online	25 years ago (Aug. 1, 2000)
Published Print	25 years ago (Aug. 1, 2000)

Funders 0

None

BibTeX

@article{Giannuzzi_2000, title={Revisiting the FIB TEM Lift-Out Specimen Preparation Technique}, volume={6}, ISSN={1431-9276}, url={http://dx.doi.org/10.1017/s1431927600035030}, DOI={10.1017/s1431927600035030}, number={S2}, journal={Microscopy and Microanalysis}, publisher={Oxford University Press (OUP)}, author={Giannuzzi, L A and Stevie, F A}, year={2000}, month=aug, pages={508–509} }

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