DOI: 10.1017/s1431927600023394. A New Method for Pin Point Failure Analysis Using Fib Combined Analytical Tem

A New Method for Pin Point Failure Analysis Using Fib Combined Analytical Tem

10.1017/s1431927600023394

Crossref journal-article

Oxford University Press (OUP)

Microscopy and Microanalysis (286)

Abstract

Abstract Recently, we developed the dedicated FIB system(FB-2000A) for the TEM specimen preparation. The system has ion optics with the maximum ion beam current density of 15 A/cm2 and the minimum ion probe size of l0nm. In the system, the side entry type specimen stage originally designed for high resolution TEM was employed, and the drift rate of the stage during FIB milling is less than lnm/min. The FIB-TEM compatible specimen holder has been developed it made milling of specimen in FIB system and observation of milled specimen in TEM without remounting the specimen possible.. The holder was designed to rotate the specimen around the axis of specimen holder so that both side of milled surfaces can be faced to incident electron beam in TEM. To improve positional resolution in pin point TEM specimen preparation, it is important to know the inside structure of specimen before starting the milling.

Bibliography

Kamino, T., Yaguchi, T., Matsumoto, H., Tomita, M., & Koike, H. (1998). A New Method for Pin Point Failure Analysis Using Fib Combined Analytical Tem. Microscopy and Microanalysis, 4(S2), 654â655.

Authors 5

T Kamino (first)
T Yaguchi (additional)
H Matsumoto (additional)
M Tomita (additional)
H Koike (additional)

References 1 Referenced 4

{'key': '2024090916340221800_ref1', 'volume': '1032', 'author': 'Yaguchi', 'year': '1996', 'journal-title': 'Proc. Microscopy and Microanalysis'} / Proc. Microscopy and Microanalysis by Yaguchi (1996)

Dates

Type	When
Created	5 years, 1 month ago (July 6, 2020, 1:33 a.m.)
Deposited	11 months, 2 weeks ago (Sept. 9, 2024, 1:13 p.m.)
Indexed	11 months, 2 weeks ago (Sept. 9, 2024, 8:07 p.m.)
Issued	27 years, 1 month ago (July 1, 1998)
Published	27 years, 1 month ago (July 1, 1998)
Published Online	27 years, 1 month ago (July 1, 1998)
Published Print	27 years, 1 month ago (July 1, 1998)

Funders 0

None

BibTeX

@article{Kamino_1998, title={A New Method for Pin Point Failure Analysis Using Fib Combined Analytical Tem}, volume={4}, ISSN={1431-9276}, url={http://dx.doi.org/10.1017/s1431927600023394}, DOI={10.1017/s1431927600023394}, number={S2}, journal={Microscopy and Microanalysis}, publisher={Oxford University Press (OUP)}, author={Kamino, T and Yaguchi, T and Matsumoto, H and Tomita, M and Koike, H}, year={1998}, month=jul, pages={654–655} }

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