DOI: 10.1017/s1431927600017852. Effect of Surface Roughness on STEM Samples Prepared by FIB

Effect of Surface Roughness on STEM Samples Prepared by FIB

10.1017/s1431927600017852

Crossref journal-article

Oxford University Press (OUP)

Microscopy and Microanalysis (286)

Abstract

Abstract The Scanning Transmission Electron Microscope (STEM) can provide images beyond Scanning Electron Microscope (SEM) capability, on samples which do not have to be prepared to the degree required for Transmission Electron Microscopy (TEM). For some applications, such as semiconductor production, speed of analysis is critical. This paper explores Focused Ion Beam (FIB) sample preparation for STEM. The samples were prepared using an Hitachi FB-2000A FEB tool. Two analysis regions of similar thickness were cut. The rough sample was milled using a 500 pA beam and no polish cut. The smooth sample was prepared by cutting first with a 500 pA beam, and then using additional, smaller diameter beams, concluding with a 30 pA beam. This resulted in a sample surface polished to a degree similar to that used for TEM specimens. The samples were imaged in an Hitachi HD-2000 STEM at 200KeV. Transmission electron images taken at 100 kx are shown in Figure 1 of the rough sample and of the smooth sample.

Bibliography

Vartuli, C., Stevie, F., & Kamino, T. (1999). Effect of Surface Roughness on STEM Samples Prepared by FIB. Microscopy and Microanalysis, 5(S2), 906â907.

Authors 3

CB Vartuli (first)
FA Stevie (additional)
T Kamino (additional)

References 0 Referenced 1

None

Dates

Type	When
Created	5 years, 1 month ago (July 2, 2020, 4:37 a.m.)
Deposited	11 months, 3 weeks ago (Sept. 9, 2024, 2:10 p.m.)
Indexed	11 months, 3 weeks ago (Sept. 9, 2024, 3:10 p.m.)
Issued	26 years ago (Aug. 1, 1999)
Published	26 years ago (Aug. 1, 1999)
Published Online	26 years ago (Aug. 1, 1999)
Published Print	26 years ago (Aug. 1, 1999)

Funders 0

None

BibTeX

@article{Vartuli_1999, title={Effect of Surface Roughness on STEM Samples Prepared by FIB}, volume={5}, ISSN={1431-9276}, url={http://dx.doi.org/10.1017/s1431927600017852}, DOI={10.1017/s1431927600017852}, number={S2}, journal={Microscopy and Microanalysis}, publisher={Oxford University Press (OUP)}, author={Vartuli, CB and Stevie, FA and Kamino, T}, year={1999}, month=aug, pages={906–907} }

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