DOI: 10.1017/s0424820100108015. Incoherent illumination method with conventional electron microscope

Incoherent illumination method with conventional electron microscope

10.1017/s0424820100108015

Crossref journal-article

Cambridge University Press (CUP)

Proceedings, annual meeting, Electron Microscopy Society of America (56)

Abstract

When fine details of thin films are observed, the image are generally composed of both amplitude and phase contrast. The image resolution is sometimes limited by the granular background noise of supporting film which is due to the phase contrast effect by fairly coherent illumination(CI).In the present work, incoherent illumination(ICI) method has been studied to avoid the phase contrast effect using a conventional electron microscope(Hitachi HU-12A).The ICI method was made by enlarging the illumination angle(β) to be equivalent to the glancing angle(α=1.4x10-2 radians) of objective aperture. The large angle illumination was achieved by the strong excitation of an objective lens.At first, the properties of phase contrast in ICI image were studied as functions of beam divergence angle and defocus using a carbon film. Both analytical and experimental investigations show that the granular noise in a phase contrast image decreases as β is increased from l×l0-4 to l×l0-2radians.

Bibliography

Nagata, F., Matsuda, T., Komoda, T., & Hama, K. (1978). Incoherent illumination method with conventional electron microscope. Proceedings, Annual Meeting, Electron Microscopy Society of America, 36(1), 174â175.

Authors 4

Fumio Nagata (first)
Tsuyoshi Matsuda (additional)
Tsutomu Komoda (additional)
Kiyoshi Hama (additional)

References 3 Referenced 1

10.1143/JJAP.14.1815
{'key': 'S0424820100108015_ref0002', 'first-page': '237', 'volume': '25', 'author': 'Nagata', 'year': '1976', 'journal-title': 'J.Electron Microscopy'} / J.Electron Microscopy by Nagata (1976)
{'key': 'S0424820100108015_ref0003', 'first-page': '213', 'volume': '26', 'author': 'Todokoro', 'year': '1977', 'journal-title': 'J.Electron Microscopy'} / J.Electron Microscopy by Todokoro (1977)

Dates

Type	When
Created	5 years, 2 months ago (June 18, 2020, 8:35 a.m.)
Deposited	5 years, 2 months ago (June 18, 2020, 9 a.m.)
Indexed	2 years, 3 months ago (May 12, 2023, 11:30 a.m.)
Issued	47 years, 8 months ago (Jan. 1, 1978)
Published	47 years, 8 months ago (Jan. 1, 1978)
Published Online	5 years, 2 months ago (June 18, 2020)
Published Print	47 years, 8 months ago (Jan. 1, 1978)

Funders 0

None

BibTeX

@article{Nagata_1978, title={Incoherent illumination method with conventional electron microscope}, volume={36}, ISSN={2690-1315}, url={http://dx.doi.org/10.1017/s0424820100108015}, DOI={10.1017/s0424820100108015}, number={1}, journal={Proceedings, annual meeting, Electron Microscopy Society of America}, publisher={Cambridge University Press (CUP)}, author={Nagata, Fumio and Matsuda, Tsuyoshi and Komoda, Tsutomu and Hama, Kiyoshi}, year={1978}, pages={174–175} }

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