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Ultramicroscopy (78)
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Mayer, M., Grévent, C., Szeghalmi, A., Knez, M., Weigand, M., Rehbein, S., Schneider, G., Baretzky, B., & Schütz, G. (2011). Multilayer Fresnel zone plate for soft X-ray microscopy resolves sub-39 nm structures. Ultramicroscopy, 111(12), 1706–1711.

Authors 9
  1. M. Mayer (first)
  2. C. Grévent (additional)
  3. A. Szeghalmi (additional)
  4. M. Knez (additional)
  5. M. Weigand (additional)
  6. S. Rehbein (additional)
  7. G. Schneider (additional)
  8. B. Baretzky (additional)
  9. G. Schütz (additional)
References 49 Referenced 38
  1. 10.1038/nphoton.2010.176 / Nature Photonics / First lasing and operation of an angstrom-wavelength free-electron laser by Emma (2010)
  2. 10.1063/1.1884186 / Review of Scientific Instruments / Liquid-nitrogen-jet laser-plasma source for compact soft X-ray microscopy by Jansson (2005)
  3. 10.1103/PhysRevLett.105.173901 / Physical Review Letters / Bright, coherent, ultrafast soft X-ray harmonics spanning the water window from a tabletop light source by Chen (2010)
  4. J. Park, D. Kim, S. Jeon, K. Lee, J. Lee, et al., Table-top soft X-ray microscope adopting a PMMA phase-reversal zone plate, in: 2009 Conference on Lasers and Electro-Optics and Quantum Electronics and Laser Science Conference (CLEO/QELS 2009), vols. 1–5, 2009, pp. 2460–2461. (10.1364/CLEO.2009.JFA6)
  5. {'key': '10.1016/j.ultramic.2011.09.003_bib5', 'series-title': 'Handbook of Nanofabrication', 'author': 'Wiederrecht', 'year': '2009'} / Handbook of Nanofabrication by Wiederrecht (2009)
  6. 10.1016/j.mee.2006.01.226 / Microelectronic Engineering / Zone-plate-array lithography: a low-cost complement or competitor to scanning-electron-beam lithography by Smith (2006)
  7. 10.1038/nmat2399 / Nature Materials / Near-edge X-ray absorption fine-structure microscopy of organic and magnetic materials by Ade (2009)
  8. 10.1017/S0033583500003139 / Quarterly Reviews of Biophysics / Soft-X-ray microscopes and their biological applications by Kirz (1995)
  9. 10.1080/05704920802352531 / Applied Spectroscopy Reviews / Applications of soft X-ray spectromicroscopy in material and environmental sciences by Yoon (2009)
  10. 10.1007/s00216-003-2007-x / Analytical and Bioanalytical Chemistry / X-ray microscopy: methods and perspectives by Schneider (2003)
  11. 10.1107/S0909049509049905 / Journal of Synchrotron Radiation / X-ray spectromicroscopy in soil and environmental sciences by Thieme (2010)
  12. 10.1039/c0cs00036a / Chemical Society Reviews / Hard and soft X-ray microscopy and tomography in catalysis: bridging the different time and length scales by Grunwaldt (2010)
  13. 10.1016/j.sab.2009.07.003 / Spectrochimica Acta Part B, Atomic Spectroscopy / Hard X-ray micro-spectroscopy at Berliner Elektronenspeicherring für Synchrotronstrahlung II by Erko (2009)
  14. {'key': '10.1016/j.ultramic.2011.09.003_bib14', 'article-title': 'Fluorescence X-ray micro-spectroscopy activities at ESRF', 'volume': 'vol. 186', 'author': 'Salome', 'year': '2009'} / Fluorescence X-ray micro-spectroscopy activities at ESRF by Salome (2009)
  15. 10.1021/cr0206667 / Chemical Reviews / Ultrafast X-ray absorption spectroscopy by Bressler (2004)
  16. 10.1088/0953-4075/43/19/194014 / Journal of Physics B, Atomic, Molecular and Optical Physics / Time-resolved imaging using X-ray free electron lasers by Barty (2010)
  17. 10.1103/PhysRevLett.90.047403 / Physical Review Letters / Observing photochemical transients by ultrafast X-ray absorption spectroscopy by Saes (2003)
  18. 10.1063/1.1723698 / Applied Physics Letters / High-resolution imaging of fast magnetization dynamics in magnetic nanostructures by Stoll (2004)
  19. D.T. Attwood, Soft X-rays and Extreme Ultraviolet Radiation—Principles and Applications, Cambridge University Press, pp. 337–394.
  20. 10.1038/nature03719 / Nature / Soft X-ray microscopy at a spatial resolution better than 15nm by Chao (2005)
  21. 10.1103/PhysRevLett.99.264801 / Physical Review Letters / Zone-doubling technique to produce ultrahigh-resolution X-ray optics by Jefimovs (2007)
  22. 10.1103/PhysRevLett.103.110801 / Physical Review Letters / Ultrahigh-resolution soft-X-ray microscopy with zone plates in high orders of diffraction by Rehbein (2009)
  23. 10.1016/j.ultramic.2009.07.005 / Ultramicroscopy / Advanced thin film technology for ultrahigh resolution X-ray microscopy by Vila-Comamala (2009)
  24. D. Rudolph, G. Schmahl, High power zone plates for a soft X-ray microscope, in: D.F. Parsons (Ed.), Annals of the New York Academy of Sciences, vol. 342, Ultrasoft X-ray Microscopy: Its Application to Biological and Physical Sciences; Meeting, June 13–15, 1979,. VIII+402P. New York, NY, USA, Illus, New York Academy of Sciences, 1980, pp. 94–104. (10.1111/j.1749-6632.1980.tb47211.x)
  25. {'key': '10.1016/j.ultramic.2011.09.003_bib25', 'first-page': '103', 'article-title': 'Status of the sputtered sliced zone plates for X-ray microscopy', 'volume': '316', 'author': 'Rudolph', 'year': '1981', 'journal-title': 'Proceedings of the Society of Photo-Optical Instrumentation Engineers'} / Proceedings of the Society of Photo-Optical Instrumentation Engineers / Status of the sputtered sliced zone plates for X-ray microscopy by Rudolph (1981)
  26. 10.1117/12.55632 / Optical Engineering / Tabletop X-ray microscope using 8keV zone plates by Bionta (1990)
  27. 10.1063/1.110968 / Applied Physics Letters / Hard X-ray sputtered-sliced phase zone plates by Bionta (1994)
  28. 10.1143/JJAP.40.4747 / Japanese Journal of Applied Physics Part 1 – Regular Papers short Notes & Review Papers / Suppression of corrugated boundaries in multilayer Fresnel zone plate for hard X-ray synchrotron radiation using cylindrical slit by Yasumoto (2001)
  29. 10.1016/j.vacuum.2005.11.004 / Vacuum / New approaches to fabrication of multilayer Fresnel zone plate for high-energy synchrotron radiation X-rays by Tamura (2006)
  30. 10.1016/j.vacuum.2008.04.046 / Vacuum / Multilevel-type multilayer X-ray lens (Fresnel zone plate) by sputter deposition by Tamura (2008)
  31. 10.1016/j.vacuum.2009.11.012 / Vacuum / Fabrication and testing of sputtered-sliced kinoform style Fresnel zone plate by Tamura (2010)
  32. 10.1016/j.vacuum.2004.01.059 / Vacuum / Novel application of sputtered-sliced concentric multilayers to various optical elements for synchrotron radiation high-brilliance X-ray beamlines at Spring-8 by Tamura (2004)
  33. 10.1107/S0909049596014720 / Journal of Synchrotron Radiation / Hard X-ray microbeam experiment at the Tristan main ring test beamline of the KEK by Suzuki (1997)
  34. 10.1364/AO.46.005964 / Applied Optics-OT / Fabrication of X-ray zone plates by surface-plasma chemical vapour deposition by Golant (2007)
  35. 10.1016/j.nima.2008.12.161 / Nuclear Instruments & Methods in Physics Research Section A, Accelerators, Spectrometers, Detectors and Associated Equipment / Zone plates for hard X-rays fabricated with the SPCVD technology by Artyukov (2009)
  36. 10.1116/1.584103 / Journal of Vacuum Science & Technology B / Moire method and zone plate pattern inaccuracies by Vladimirsky (1988)
  37. B. Kaulich, Phase zone plates for hard X-ray microscopy, in: I. McNulty (Ed.), X-ray Microfocusing: Applications and Techniques, Proceedings of the Society of Photo-optical Instrumentation Engineers SPIE 3449 (1998) 108–117.
  38. 10.1063/1.3114402 / Applied Physics Letters / All dielectric hard X-ray mirror by atomic layer deposition by Szeghalmi (2009)
  39. 10.1063/1.1142711 / Review of Scientific Instrument / Coherent hard X-ray focusing optics and applications by Yun (1992)
  40. 10.1016/0030-4018(92)90182-Q / Optics Communications / Coupled wave description of the diffraction by zone plates with high aspect ratios by Maser (1992)
  41. 10.1126/science.278.5345.1934 / Science / Growth of SiO2 at room temperature with the use of catalyzed sequential half-reactions by Klaus (1997)
  42. 10.1016/S0039-6028(99)01119-X / Surface Science / Atomic layer deposition of SiO2 at room temperature using NH3-catalyzed sequential surface reactions by Klaus (2000)
  43. 10.1149/1.1768548 / Journal of the Electrochemical Society / ALD of SiO2 at room temperature using TEOS and H2O with NH3 as the catalyst by Ferguson (2004)
  44. 10.1126/science.1073552 / Science / Rapid vapor deposition of highly conformal silica nanolaminates by Hausmann (2002)
  45. 10.1002/anie.200800245 / Angewandte Chemie—International Edition in English / A practical, self-catalytic, atomic layer deposition of silicon dioxide by Bachmann (2008)
  46. 10.1016/S0040-6090(02)00117-7 / Thin Solid Films / Atomic layer deposition (ALD): from precursors to thin film structures by Leskela (2002)
  47. 10.1063/1.3463201 / AIP Conference Proceedings / The X-ray microscopy beamline UE46-PGM2 at BESSY by Follath (2010)
  48. 10.1002/adma.201000766 / Advanced Materials / High-speed spatial atomic-layer deposition of aluminum oxide layers for solar cell passivation by Poodt (2010)
  49. 10.1107/S0909049510028487 / Journal of Synchrotron Radiation / Beam-induced damage on diffractive hard X-ray optics by Nygard (2010)
Dates
Type When
Created 13 years, 11 months ago (Sept. 18, 2011, 5 a.m.)
Deposited 2 years, 6 months ago (Feb. 14, 2023, 10:45 a.m.)
Indexed 1 year ago (Aug. 20, 2024, 7:18 a.m.)
Issued 13 years, 8 months ago (Dec. 1, 2011)
Published 13 years, 8 months ago (Dec. 1, 2011)
Published Print 13 years, 8 months ago (Dec. 1, 2011)
Funders 0

None

@article{Mayer_2011, title={Multilayer Fresnel zone plate for soft X-ray microscopy resolves sub-39 nm structures}, volume={111}, ISSN={0304-3991}, url={http://dx.doi.org/10.1016/j.ultramic.2011.09.003}, DOI={10.1016/j.ultramic.2011.09.003}, number={12}, journal={Ultramicroscopy}, publisher={Elsevier BV}, author={Mayer, M. and Grévent, C. and Szeghalmi, A. and Knez, M. and Weigand, M. and Rehbein, S. and Schneider, G. and Baretzky, B. and Schütz, G.}, year={2011}, month=dec, pages={1706–1711} }