DOI: 10.1016/j.ultramic.2010.12.025. Atom probe analysis of a 3D finFET with high-k metal gate

Atom probe analysis of a 3D finFET with high-k metal gate

10.1016/j.ultramic.2010.12.025

Crossref journal-article

Elsevier BV

Ultramicroscopy (78)

Bibliography

Gilbert, M., Vandervorst, W., Koelling, S., & Kambham, A. K. (2011). Atom probe analysis of a 3D finFET with high-k metal gate. Ultramicroscopy, 111(6), 530â534.

Authors 4

M. Gilbert (first)
W. Vandervorst (additional)
S. Koelling (additional)
A.K. Kambham (additional)

References 20 Referenced 41

{'key': '10.1016/j.ultramic.2010.12.025_bib1', 'first-page': '1032', 'author': 'Hisamoto', 'year': '1998', 'journal-title': 'IEDM Tech. Dig.'} / IEDM Tech. Dig. by Hisamoto (1998)
10.1109/TSM.2006.884714 / IEEE Trans. Semicond. Manuf. by Garner (2006)
10.1063/1.3033660 / AIP Conf. Proc. by vandervorst (2008)
10.1116/1.3432119 / J. Vac. Sci. Technol. B by Mody (2010)
10.1063/1.1144382 / Rev. Sci. Instrum. by Blavette (1993)
10.1063/1.2194089 / Rev. Sci. Instrum. by Gault (2006)
10.1016/j.apsusc.2008.05.247 / Appl. Surf. Sci. by Ronsheim (2008)
10.1063/1.3236673 / J. Appl. Phys. by Shimizu (2009)
10.1016/j.mee.2007.05.051 / Microelectron. Eng. by Hoummada (2007)
{'key': '10.1016/j.ultramic.2010.12.025_bib10', 'series-title': 'Atom Probe Field Ion Microscopy Clarendon', 'author': 'Miller', 'year': '1996'} / Atom Probe Field Ion Microscopy Clarendon by Miller (1996)
10.1016/S0304-3991(97)00167-8 / Ultramicroscopy by Larson (1998)
10.1103/PhysRevLett.44.1520 / Phys. Rev. Lett. by Haydock (1980)
{'key': '10.1016/j.ultramic.2010.12.025_bib13', 'series-title': 'Atom probe field ion microscopy, field emission and surfaces and interfaces at atomic resolution', 'author': 'Tsong', 'year': '1990'} / Atom probe field ion microscopy, field emission and surfaces and interfaces at atomic resolution by Tsong (1990)
10.1016/0039-6028(78)90410-7 / Surf. Sci. by Tsong (1978)
J. Houard, Atom Probe Workshop, Oxford, 2009.
10.1016/0169-4332(94)00561-3 / Appl. Surf. Sci. by Bas (1995)
10.1063/1.2761825 / J. Appl. Phys. by Grenier (2007)
10.1016/j.ultramic.2008.10.001 / Ultramicroscopy 109 by Shariq (2009)
S. Koelling, et al., IFES 2010 proceedings, in this issue
{'key': '10.1016/j.ultramic.2010.12.025_bib20', 'first-page': '1365', 'author': 'Marquis', 'year': '2010', 'journal-title': 'J. Microsc.'} / J. Microsc. by Marquis (2010)

Dates

Type	When
Created	14 years, 7 months ago (Dec. 29, 2010, 4:26 a.m.)
Deposited	1 year, 4 months ago (April 9, 2024, 9:28 p.m.)
Indexed	1 year, 4 months ago (April 9, 2024, 10:10 p.m.)
Issued	14 years, 3 months ago (May 1, 2011)
Published	14 years, 3 months ago (May 1, 2011)
Published Print	14 years, 3 months ago (May 1, 2011)

Funders 0

None

BibTeX

@article{Gilbert_2011, title={Atom probe analysis of a 3D finFET with high-k metal gate}, volume={111}, ISSN={0304-3991}, url={http://dx.doi.org/10.1016/j.ultramic.2010.12.025}, DOI={10.1016/j.ultramic.2010.12.025}, number={6}, journal={Ultramicroscopy}, publisher={Elsevier BV}, author={Gilbert, M. and Vandervorst, W. and Koelling, S. and Kambham, A.K.}, year={2011}, month=may, pages={530–534} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        4,
        10
      ]
    ],
    "date-time": "2024-04-10T02:10:16Z",
    "timestamp": 1712715016758
  },
  "reference-count": 20,
  "publisher": "Elsevier BV",
  "issue": "6",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2011,
            5,
            1
          ]
        ],
        "date-time": "2011-05-01T00:00:00Z",
        "timestamp": 1304208000000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    },
    {
      "start": {
        "date-parts": [
          [
            2011,
            5,
            1
          ]
        ],
        "date-time": "2011-05-01T00:00:00Z",
        "timestamp": 1304208000000
      },
      "content-version": "stm-asf",
      "delay-in-days": 0,
      "URL": "https://doi.org/10.15223/policy-017"
    },
    {
      "start": {
        "date-parts": [
          [
            2011,
            5,
            1
          ]
        ],
        "date-time": "2011-05-01T00:00:00Z",
        "timestamp": 1304208000000
      },
      "content-version": "stm-asf",
      "delay-in-days": 0,
      "URL": "https://doi.org/10.15223/policy-037"
    },
    {
      "start": {
        "date-parts": [
          [
            2011,
            5,
            1
          ]
        ],
        "date-time": "2011-05-01T00:00:00Z",
        "timestamp": 1304208000000
      },
      "content-version": "stm-asf",
      "delay-in-days": 0,
      "URL": "https://doi.org/10.15223/policy-012"
    },
    {
      "start": {
        "date-parts": [
          [
            2011,
            5,
            1
          ]
        ],
        "date-time": "2011-05-01T00:00:00Z",
        "timestamp": 1304208000000
      },
      "content-version": "stm-asf",
      "delay-in-days": 0,
      "URL": "https://doi.org/10.15223/policy-029"
    },
    {
      "start": {
        "date-parts": [
          [
            2011,
            5,
            1
          ]
        ],
        "date-time": "2011-05-01T00:00:00Z",
        "timestamp": 1304208000000
      },
      "content-version": "stm-asf",
      "delay-in-days": 0,
      "URL": "https://doi.org/10.15223/policy-004"
    }
  ],
  "content-domain": {
    "domain": [
      "elsevier.com",
      "sciencedirect.com"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        2011,
        5
      ]
    ]
  },
  "DOI": "10.1016/j.ultramic.2010.12.025",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2010,
        12,
        29
      ]
    ],
    "date-time": "2010-12-29T09:26:53Z",
    "timestamp": 1293614813000
  },
  "page": "530-534",
  "update-policy": "http://dx.doi.org/10.1016/elsevier_cm_policy",
  "source": "Crossref",
  "is-referenced-by-count": 41,
  "title": "Atom probe analysis of a 3D finFET with high-k metal gate",
  "prefix": "10.1016",
  "volume": "111",
  "author": [
    {
      "given": "M.",
      "family": "Gilbert",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "W.",
      "family": "Vandervorst",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "S.",
      "family": "Koelling",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "A.K.",
      "family": "Kambham",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/j.ultramic.2010.12.025_bib1",
      "first-page": "1032",
      "author": "Hisamoto",
      "year": "1998",
      "journal-title": "IEDM Tech. Dig."
    },
    {
      "issue": "4",
      "key": "10.1016/j.ultramic.2010.12.025_bib2",
      "doi-asserted-by": "crossref",
      "DOI": "10.1109/TSM.2006.884714",
      "volume": "19",
      "author": "Garner",
      "year": "2006",
      "journal-title": "IEEE Trans. Semicond. Manuf."
    },
    {
      "key": "10.1016/j.ultramic.2010.12.025_bib3",
      "doi-asserted-by": "crossref",
      "first-page": "449",
      "DOI": "10.1063/1.3033660",
      "volume": "1066",
      "author": "vandervorst",
      "year": "2008",
      "journal-title": "AIP Conf. Proc."
    },
    {
      "key": "10.1016/j.ultramic.2010.12.025_bib4",
      "doi-asserted-by": "crossref",
      "DOI": "10.1116/1.3432119",
      "volume": "28",
      "author": "Mody",
      "year": "2010",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "10.1016/j.ultramic.2010.12.025_bib5",
      "doi-asserted-by": "crossref",
      "first-page": "2911",
      "DOI": "10.1063/1.1144382",
      "volume": "64",
      "author": "Blavette",
      "year": "1993",
      "journal-title": "Rev. Sci. Instrum."
    },
    {
      "key": "10.1016/j.ultramic.2010.12.025_bib6",
      "doi-asserted-by": "crossref",
      "first-page": "043705",
      "DOI": "10.1063/1.2194089",
      "volume": "77",
      "author": "Gault",
      "year": "2006",
      "journal-title": "Rev. Sci. Instrum."
    },
    {
      "key": "10.1016/j.ultramic.2010.12.025_bib7",
      "doi-asserted-by": "crossref",
      "first-page": "1547",
      "DOI": "10.1016/j.apsusc.2008.05.247",
      "volume": "255",
      "author": "Ronsheim",
      "year": "2008",
      "journal-title": "Appl. Surf. Sci."
    },
    {
      "key": "10.1016/j.ultramic.2010.12.025_bib8",
      "doi-asserted-by": "crossref",
      "first-page": "076102",
      "DOI": "10.1063/1.3236673",
      "volume": "106",
      "author": "Shimizu",
      "year": "2009",
      "journal-title": "J. Appl. Phys."
    },
    {
      "issue": "11",
      "key": "10.1016/j.ultramic.2010.12.025_bib9",
      "doi-asserted-by": "crossref",
      "first-page": "2517",
      "DOI": "10.1016/j.mee.2007.05.051",
      "volume": "84",
      "author": "Hoummada",
      "year": "2007",
      "journal-title": "Microelectron. Eng."
    },
    {
      "key": "10.1016/j.ultramic.2010.12.025_bib10",
      "series-title": "Atom Probe Field Ion Microscopy Clarendon",
      "author": "Miller",
      "year": "1996"
    },
    {
      "key": "10.1016/j.ultramic.2010.12.025_bib11",
      "doi-asserted-by": "crossref",
      "first-page": "273",
      "DOI": "10.1016/S0304-3991(97)00167-8",
      "volume": "73",
      "author": "Larson",
      "year": "1998",
      "journal-title": "Ultramicroscopy"
    },
    {
      "key": "10.1016/j.ultramic.2010.12.025_bib12",
      "doi-asserted-by": "crossref",
      "DOI": "10.1103/PhysRevLett.44.1520",
      "volume": "44",
      "author": "Haydock",
      "year": "1980",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "10.1016/j.ultramic.2010.12.025_bib13",
      "series-title": "Atom probe field ion microscopy, field emission and surfaces and interfaces at atomic resolution",
      "author": "Tsong",
      "year": "1990"
    },
    {
      "key": "10.1016/j.ultramic.2010.12.025_bib14",
      "doi-asserted-by": "crossref",
      "first-page": "211",
      "DOI": "10.1016/0039-6028(78)90410-7",
      "volume": "70",
      "author": "Tsong",
      "year": "1978",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "10.1016/j.ultramic.2010.12.025_bib15",
      "unstructured": "J. Houard, Atom Probe Workshop, Oxford, 2009."
    },
    {
      "key": "10.1016/j.ultramic.2010.12.025_bib16",
      "doi-asserted-by": "crossref",
      "first-page": "298",
      "DOI": "10.1016/0169-4332(94)00561-3",
      "volume": "87\u201388",
      "author": "Bas",
      "year": "1995",
      "journal-title": "Appl. Surf. Sci."
    },
    {
      "key": "10.1016/j.ultramic.2010.12.025_bib17",
      "doi-asserted-by": "crossref",
      "first-page": "033912",
      "DOI": "10.1063/1.2761825",
      "volume": "102",
      "author": "Grenier",
      "year": "2007",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/j.ultramic.2010.12.025_bib18",
      "doi-asserted-by": "crossref",
      "first-page": "472",
      "DOI": "10.1016/j.ultramic.2008.10.001",
      "author": "Shariq",
      "year": "2009",
      "journal-title": "Ultramicroscopy 109"
    },
    {
      "key": "10.1016/j.ultramic.2010.12.025_bib19",
      "unstructured": "S. Koelling, et al., IFES 2010 proceedings, in this issue"
    },
    {
      "key": "10.1016/j.ultramic.2010.12.025_bib20",
      "first-page": "1365",
      "author": "Marquis",
      "year": "2010",
      "journal-title": "J. Microsc."
    }
  ],
  "container-title": "Ultramicroscopy",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0304399110003670?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0304399110003670?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        4,
        10
      ]
    ],
    "date-time": "2024-04-10T01:28:01Z",
    "timestamp": 1712712481000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/S0304399110003670"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2011,
        5
      ]
    ]
  },
  "references-count": 20,
  "journal-issue": {
    "issue": "6",
    "published-print": {
      "date-parts": [
        [
          2011,
          5
        ]
      ]
    }
  },
  "alternative-id": [
    "S0304399110003670"
  ],
  "URL": "http://dx.doi.org/10.1016/j.ultramic.2010.12.025",
  "relation": {},
  "ISSN": [
    "0304-3991"
  ],
  "subject": [],
  "container-title-short": "Ultramicroscopy",
  "published": {
    "date-parts": [
      [
        2011,
        5
      ]
    ]
  },
  "assertion": [
    {
      "value": "Elsevier",
      "name": "publisher",
      "label": "This article is maintained by"
    },
    {
      "value": "Atom probe analysis of a 3D finFET with high-k metal gate",
      "name": "articletitle",
      "label": "Article Title"
    },
    {
      "value": "Ultramicroscopy",
      "name": "journaltitle",
      "label": "Journal Title"
    },
    {
      "value": "https://doi.org/10.1016/j.ultramic.2010.12.025",
      "name": "articlelink",
      "label": "CrossRef DOI link to publisher maintained version"
    },
    {
      "value": "article",
      "name": "content_type",
      "label": "Content Type"
    },
    {
      "value": "Copyright \u00a9 2011 Elsevier B.V. All rights reserved.",
      "name": "copyright",
      "label": "Copyright"
    }
  ]
}