DOI: 10.1016/j.ultramic.2010.07.012. Design of an aberration corrected low-voltage SEM

Design of an aberration corrected low-voltage SEM

10.1016/j.ultramic.2010.07.012

Crossref journal-article

Elsevier BV

Ultramicroscopy (78)

Bibliography

van Aken, R. H., Maas, D. J., Hagen, C. W., Barth, J. E., & Kruit, P. (2010). Design of an aberration corrected low-voltage SEM. Ultramicroscopy, 110(11), 1411â1419.

Authors 5

R.H. van Aken (first)
D.J. Maas (additional)
C.W. Hagen (additional)
J.E. Barth (additional)
P. Kruit (additional)

References 19 Referenced 6

{'key': '10.1016/j.ultramic.2010.07.012_bib1', 'first-page': '114', 'article-title': 'Sphärische und chromatische Korrektur von Elektronen-Linsen', 'volume': '2', 'author': 'Scherzer', 'year': '1947', 'journal-title': 'Optik'} / Optik / Sphärische und chromatische Korrektur von Elektronen-Linsen by Scherzer (1947)
10.1016/S0167-9317(99)00127-6 / Microelectronic Engineering / Fabrication of ultra-thin free-standing chromium foils supported by a Si3N4 membrane-structure with search pattern by Stepanov (1999)
10.1016/j.mee.2008.12.009 / Microelectronic Engineering / Simple and reliable technology for manufacturing metal-composite nanomem-branes with giant aspect ratio by Matovic (2009)
10.1016/S0304-3991(02)00287-5 / Ultramicroscopy / Low-energy foil aberration corrector by van Aken (2002)
10.1016/j.nima.2003.11.157 / Nuclear Instruments and Methods in Physics Research A / Aberration integrals for the low-voltage foil corrector by van Aken (2004)
10.1016/j.nima.2004.05.035 / Nuclear Instruments and Methods in Physics Research A / Erratum to: aberration integrals for the low-voltage foil corrector by van Aken (2004)
B. Lencová, G. Wisselink, Electron Optical Design Program Package Elens 3.7, 2002.
10.1016/S0168-9002(03)01368-8 / Nuclear Instruments and Methods in Physics Research A / GEANT 4—a simulation toolkit by Agostinelli (2003)
10.1088/0022-3727/41/21/215310 / Journal of Physics D: Applied Physics / Refinement of Monte Carlo simulations of electron-specimen interaction in low-voltage SEM by Kieft (2008)
{'key': '10.1016/j.ultramic.2010.07.012_bib10', 'first-page': '101', 'article-title': 'Addition of different contributions to the charged particle probe size', 'volume': '101', 'author': 'Barth', 'year': '1996', 'journal-title': 'Optik'} / Optik / Addition of different contributions to the charged particle probe size by Barth (1996)
10.1116/1.2907780 / Journal of Vacuum Science and Technology B / Probe current, probe size, and the practical brightness for probe forming systems by Bronsgeest (2008)
10.1016/S0168-9002(98)01531-9 / Nuclear Instruments and Methods in Physics Research A / Dependence of the chromatic aberration spot size on the form of the energy distribution of the charged particles by Barth (1999)
10.1063/1.367186 / Journal of Applied Physics / Calculation of the electron-optical characteristics of electron beams transmitted into vacuum from a sharp tip-thin foil junction by van Bakel (1998)
10.1016/0168-9002(95)00056-9 / Nuclear Instruments and Methods in Physics Research A / Aberration correction in a low voltage SEM by a multipole corrector by Zach (1995)
K. Honda, S. Takashima, Chromatic and spherical aberration correction in the LSI inspection scanning electron microscope, JEOL News 〈www.jeoleuro.com/news/news38/jnews38l_pdf_low/p36.pdf〉 38 (2003) 36.
10.1017/S1431927603011061 / Microscopy and Microanalysis / Electrostatic aberration correction in low-voltage SEM by Maas (2003)
A. Henstra, M.P.C.M. Krijn, Electrostatic device for correcting chromatic aberration in a particle-optical apparatus, Patent Application, International Publication No. WO 99/27558, International Application No. PCT/IB98/01607, June 1999.
10.1016/j.mee.2009.01.083 / Microelectronic Engineering / Developing an aberration-corrected Schottky emission SEM and method for measuring aberration by Kawasaki (2009)
R.H. van Aken, Low-energy electron beams through ultra-thin foils, applications for electron microscopy, Ph.D. Thesis, Delft University of Technology, 2005.

Dates

Type	When
Created	15 years ago (Aug. 5, 2010, 12:47 a.m.)
Deposited	6 years, 2 months ago (June 1, 2019, 1:59 a.m.)
Indexed	3 years, 4 months ago (March 29, 2022, 8:25 a.m.)
Issued	14 years, 10 months ago (Oct. 1, 2010)
Published	14 years, 10 months ago (Oct. 1, 2010)
Published Print	14 years, 10 months ago (Oct. 1, 2010)

Funders 0

None

BibTeX

@article{van_Aken_2010, title={Design of an aberration corrected low-voltage SEM}, volume={110}, ISSN={0304-3991}, url={http://dx.doi.org/10.1016/j.ultramic.2010.07.012}, DOI={10.1016/j.ultramic.2010.07.012}, number={11}, journal={Ultramicroscopy}, publisher={Elsevier BV}, author={van Aken, R.H. and Maas, D.J. and Hagen, C.W. and Barth, J.E. and Kruit, P.}, year={2010}, month=oct, pages={1411–1419} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2022,
        3,
        29
      ]
    ],
    "date-time": "2022-03-29T12:25:39Z",
    "timestamp": 1648556739905
  },
  "reference-count": 19,
  "publisher": "Elsevier BV",
  "issue": "11",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2010,
            10,
            1
          ]
        ],
        "date-time": "2010-10-01T00:00:00Z",
        "timestamp": 1285891200000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2010,
        10
      ]
    ]
  },
  "DOI": "10.1016/j.ultramic.2010.07.012",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2010,
        8,
        5
      ]
    ],
    "date-time": "2010-08-05T04:47:19Z",
    "timestamp": 1280983639000
  },
  "page": "1411-1419",
  "source": "Crossref",
  "is-referenced-by-count": 6,
  "title": "Design of an aberration corrected low-voltage SEM",
  "prefix": "10.1016",
  "volume": "110",
  "author": [
    {
      "given": "R.H.",
      "family": "van Aken",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "D.J.",
      "family": "Maas",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "C.W.",
      "family": "Hagen",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "J.E.",
      "family": "Barth",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "P.",
      "family": "Kruit",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/j.ultramic.2010.07.012_bib1",
      "first-page": "114",
      "article-title": "Sph\u00e4rische und chromatische Korrektur von Elektronen-Linsen",
      "volume": "2",
      "author": "Scherzer",
      "year": "1947",
      "journal-title": "Optik"
    },
    {
      "key": "10.1016/j.ultramic.2010.07.012_bib2",
      "doi-asserted-by": "crossref",
      "first-page": "435",
      "DOI": "10.1016/S0167-9317(99)00127-6",
      "article-title": "Fabrication of ultra-thin free-standing chromium foils supported by a Si3N4 membrane-structure with search pattern",
      "volume": "46",
      "author": "Stepanov",
      "year": "1999",
      "journal-title": "Microelectronic Engineering"
    },
    {
      "key": "10.1016/j.ultramic.2010.07.012_bib3",
      "doi-asserted-by": "crossref",
      "first-page": "906",
      "DOI": "10.1016/j.mee.2008.12.009",
      "article-title": "Simple and reliable technology for manufacturing metal-composite nanomem-branes with giant aspect ratio",
      "volume": "86",
      "author": "Matovic",
      "year": "2009",
      "journal-title": "Microelectronic Engineering"
    },
    {
      "key": "10.1016/j.ultramic.2010.07.012_bib4",
      "doi-asserted-by": "crossref",
      "first-page": "321",
      "DOI": "10.1016/S0304-3991(02)00287-5",
      "article-title": "Low-energy foil aberration corrector",
      "volume": "93",
      "author": "van Aken",
      "year": "2002",
      "journal-title": "Ultramicroscopy"
    },
    {
      "key": "10.1016/j.ultramic.2010.07.012_bib5",
      "doi-asserted-by": "crossref",
      "first-page": "205",
      "DOI": "10.1016/j.nima.2003.11.157",
      "article-title": "Aberration integrals for the low-voltage foil corrector",
      "volume": "519",
      "author": "van Aken",
      "year": "2004",
      "journal-title": "Nuclear Instruments and Methods in Physics Research A"
    },
    {
      "key": "10.1016/j.ultramic.2010.07.012_bib6",
      "doi-asserted-by": "crossref",
      "first-page": "660",
      "DOI": "10.1016/j.nima.2004.05.035",
      "article-title": "Erratum to: aberration integrals for the low-voltage foil corrector",
      "volume": "527",
      "author": "van Aken",
      "year": "2004",
      "journal-title": "Nuclear Instruments and Methods in Physics Research A"
    },
    {
      "key": "10.1016/j.ultramic.2010.07.012_bib7",
      "unstructured": "B. Lencov\u00e1, G. Wisselink, Electron Optical Design Program Package Elens 3.7, 2002."
    },
    {
      "key": "10.1016/j.ultramic.2010.07.012_bib8",
      "doi-asserted-by": "crossref",
      "first-page": "250",
      "DOI": "10.1016/S0168-9002(03)01368-8",
      "article-title": "GEANT 4\u2014a simulation toolkit",
      "volume": "506",
      "author": "Agostinelli",
      "year": "2003",
      "journal-title": "Nuclear Instruments and Methods in Physics Research A"
    },
    {
      "key": "10.1016/j.ultramic.2010.07.012_bib9",
      "doi-asserted-by": "crossref",
      "first-page": "215310",
      "DOI": "10.1088/0022-3727/41/21/215310",
      "article-title": "Refinement of Monte Carlo simulations of electron-specimen interaction in low-voltage SEM",
      "volume": "41",
      "author": "Kieft",
      "year": "2008",
      "journal-title": "Journal of Physics D: Applied Physics"
    },
    {
      "key": "10.1016/j.ultramic.2010.07.012_bib10",
      "first-page": "101",
      "article-title": "Addition of different contributions to the charged particle probe size",
      "volume": "101",
      "author": "Barth",
      "year": "1996",
      "journal-title": "Optik"
    },
    {
      "key": "10.1016/j.ultramic.2010.07.012_bib11",
      "doi-asserted-by": "crossref",
      "first-page": "949",
      "DOI": "10.1116/1.2907780",
      "article-title": "Probe current, probe size, and the practical brightness for probe forming systems",
      "volume": "26",
      "author": "Bronsgeest",
      "year": "2008",
      "journal-title": "Journal of Vacuum Science and Technology B"
    },
    {
      "key": "10.1016/j.ultramic.2010.07.012_bib12",
      "doi-asserted-by": "crossref",
      "first-page": "86",
      "DOI": "10.1016/S0168-9002(98)01531-9",
      "article-title": "Dependence of the chromatic aberration spot size on the form of the energy distribution of the charged particles",
      "volume": "427",
      "author": "Barth",
      "year": "1999",
      "journal-title": "Nuclear Instruments and Methods in Physics Research A"
    },
    {
      "key": "10.1016/j.ultramic.2010.07.012_bib13",
      "doi-asserted-by": "crossref",
      "first-page": "4279",
      "DOI": "10.1063/1.367186",
      "article-title": "Calculation of the electron-optical characteristics of electron beams transmitted into vacuum from a sharp tip-thin foil junction",
      "volume": "83",
      "author": "van Bakel",
      "year": "1998",
      "journal-title": "Journal of Applied Physics"
    },
    {
      "key": "10.1016/j.ultramic.2010.07.012_bib14",
      "doi-asserted-by": "crossref",
      "first-page": "316",
      "DOI": "10.1016/0168-9002(95)00056-9",
      "article-title": "Aberration correction in a low voltage SEM by a multipole corrector",
      "volume": "363",
      "author": "Zach",
      "year": "1995",
      "journal-title": "Nuclear Instruments and Methods in Physics Research A"
    },
    {
      "key": "10.1016/j.ultramic.2010.07.012_bib15",
      "unstructured": "K. Honda, S. Takashima, Chromatic and spherical aberration correction in the LSI inspection scanning electron microscope, JEOL News \u3008www.jeoleuro.com/news/news38/jnews38l_pdf_low/p36.pdf\u3009 38 (2003) 36."
    },
    {
      "key": "10.1016/j.ultramic.2010.07.012_bib16",
      "doi-asserted-by": "crossref",
      "first-page": "24",
      "DOI": "10.1017/S1431927603011061",
      "article-title": "Electrostatic aberration correction in low-voltage SEM",
      "volume": "9",
      "author": "Maas",
      "year": "2003",
      "journal-title": "Microscopy and Microanalysis"
    },
    {
      "key": "10.1016/j.ultramic.2010.07.012_bib17",
      "unstructured": "A. Henstra, M.P.C.M. Krijn, Electrostatic device for correcting chromatic aberration in a particle-optical apparatus, Patent Application, International Publication No. WO 99/27558, International Application No. PCT/IB98/01607, June 1999."
    },
    {
      "key": "10.1016/j.ultramic.2010.07.012_bib18",
      "doi-asserted-by": "crossref",
      "first-page": "1017",
      "DOI": "10.1016/j.mee.2009.01.083",
      "article-title": "Developing an aberration-corrected Schottky emission SEM and method for measuring aberration",
      "volume": "86",
      "author": "Kawasaki",
      "year": "2009",
      "journal-title": "Microelectronic Engineering"
    },
    {
      "key": "10.1016/j.ultramic.2010.07.012_bib19",
      "unstructured": "R.H. van Aken, Low-energy electron beams through ultra-thin foils, applications for electron microscopy, Ph.D. Thesis, Delft University of Technology, 2005."
    }
  ],
  "container-title": "Ultramicroscopy",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0304399110002123?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0304399110002123?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2019,
        6,
        1
      ]
    ],
    "date-time": "2019-06-01T05:59:29Z",
    "timestamp": 1559368769000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/S0304399110002123"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2010,
        10
      ]
    ]
  },
  "references-count": 19,
  "journal-issue": {
    "issue": "11",
    "published-print": {
      "date-parts": [
        [
          2010,
          10
        ]
      ]
    }
  },
  "alternative-id": [
    "S0304399110002123"
  ],
  "URL": "http://dx.doi.org/10.1016/j.ultramic.2010.07.012",
  "relation": {},
  "ISSN": [
    "0304-3991"
  ],
  "subject": [],
  "container-title-short": "Ultramicroscopy",
  "published": {
    "date-parts": [
      [
        2010,
        10
      ]
    ]
  }
}