DOI: 10.1016/j.ultramic.2008.09.007. Exploration of the ultimate patterning potential achievable with focused ion beams

Exploration of the ultimate patterning potential achievable with focused ion beams

10.1016/j.ultramic.2008.09.007

Crossref journal-article

Elsevier BV

Ultramicroscopy (78)

Bibliography

Gierak, J., Bourhis, E., Faini, G., Patriarche, G., Madouri, A., Jede, R., Bruchhaus, L., Bauerdick, S., Schiedt, B., Biance, A. L., & Auvray, L. (2009). Exploration of the ultimate patterning potential achievable with focused ion beams. Ultramicroscopy, 109(5), 457â462.

Authors 11

J. Gierak (first)
E. Bourhis (additional)
G. Faini (additional)
G. Patriarche (additional)
A. Madouri (additional)
R. Jede (additional)
L. Bruchhaus (additional)
S. Bauerdick (additional)
B. Schiedt (additional)
A.L. Biance (additional)
L. Auvray (additional)

References 22 Referenced 16

10.1016/j.mser.2006.10.001 / Mater. Sci. Eng. by Xie (2006)
10.1116/1.570253 / J. Vac. Sci. Technol. by Seliger (1979)
10.1002/imic.200790064 / Imaging Microsc. by Gnauck (2006)
10.1088/0960-1317/11/4/301 / J. Micromech. Microeng. by Reyntjens (2001)
10.1557/mrs2007.65 / MRS Bull. by Langford (2007)
10.1557/mrs2007.63 / MRS Bull. by Mayer (2007)
10.1016/0039-6028(90)90315-Y / Surf. Sci. by Laruelle (1990)
10.1143/JJAP.32.6268 / Jpn. J. Appl. Phys. by Yamamoto (1993)
J. Gierak, Etude d’un profil de défauts induit par implantation d’ions focalisés dans une structure de type GaAs/GaAlAs, Mémoire d’ingénieur CNAM chaire de Physique—Electronique,1996.
10.1016/S0042-207X(96)00227-8 / Vacuum by Forbes (1997)
Nano fabrication with focused ion beams, European Commission—Community Research 〈www.cordis.lu/nanotechnology/src/pressroom-pub.htm〉.
10.1016/S0167-9317(04)00086-3 / Microelectron. Eng. by Van Es (2004)
10.1147/rd.324.0441 / IBM J. Res. Dev. by Hatzakis (1988)
Progress report Raith GmbH, Private Communication.
P.W. Hawkes, B. Lencová, E-nanonewsletter (2006), 〈www.phantomsnet.net〉.
10.1116/1.590407 / J. Vac. Sci. Technol. by Rau (1998)
10.1016/S0168-9002(98)01541-1 / Nucl. Instrum. Methods by Gierak (1999)
FEI Focus, Technical Newsletter, Fall, 1993.
10.1116/1.589650 / J. Vac. Sci. Technol. B by Gierak (1997)
J.F. Ziegler, SRIM—The Stopping and Range of Ions in Matter 〈www.srim.org/〉.
10.1016/j.mee.2006.01.133 / Microelectron. Eng. by Biance (2006)
10.1016/j.mee.2007.01.059 / Microelectron. Eng. by Gierak (2007)

Dates

Type	When
Created	16 years, 10 months ago (Oct. 14, 2008, 10:44 p.m.)
Deposited	6 years, 7 months ago (Dec. 24, 2018, 11:30 p.m.)
Indexed	11 months, 4 weeks ago (Aug. 22, 2024, 1:30 p.m.)
Issued	16 years, 4 months ago (April 1, 2009)
Published	16 years, 4 months ago (April 1, 2009)
Published Print	16 years, 4 months ago (April 1, 2009)

Funders 0

None

BibTeX

@article{Gierak_2009, title={Exploration of the ultimate patterning potential achievable with focused ion beams}, volume={109}, ISSN={0304-3991}, url={http://dx.doi.org/10.1016/j.ultramic.2008.09.007}, DOI={10.1016/j.ultramic.2008.09.007}, number={5}, journal={Ultramicroscopy}, publisher={Elsevier BV}, author={Gierak, J. and Bourhis, E. and Faini, G. and Patriarche, G. and Madouri, A. and Jede, R. and Bruchhaus, L. and Bauerdick, S. and Schiedt, B. and Biance, A.L. and Auvray, L.}, year={2009}, month=apr, pages={457–462} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        8,
        22
      ]
    ],
    "date-time": "2024-08-22T17:30:02Z",
    "timestamp": 1724347802805
  },
  "reference-count": 22,
  "publisher": "Elsevier BV",
  "issue": "5",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2009,
            4,
            1
          ]
        ],
        "date-time": "2009-04-01T00:00:00Z",
        "timestamp": 1238544000000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2009,
        4
      ]
    ]
  },
  "DOI": "10.1016/j.ultramic.2008.09.007",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2008,
        10,
        15
      ]
    ],
    "date-time": "2008-10-15T02:44:52Z",
    "timestamp": 1224038692000
  },
  "page": "457-462",
  "source": "Crossref",
  "is-referenced-by-count": 16,
  "title": "Exploration of the ultimate patterning potential achievable with focused ion beams",
  "prefix": "10.1016",
  "volume": "109",
  "author": [
    {
      "given": "J.",
      "family": "Gierak",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "E.",
      "family": "Bourhis",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "G.",
      "family": "Faini",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "G.",
      "family": "Patriarche",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "A.",
      "family": "Madouri",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "R.",
      "family": "Jede",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "L.",
      "family": "Bruchhaus",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "S.",
      "family": "Bauerdick",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "B.",
      "family": "Schiedt",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "A.L.",
      "family": "Biance",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "L.",
      "family": "Auvray",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/j.ultramic.2008.09.007_bib1",
      "doi-asserted-by": "crossref",
      "first-page": "1",
      "DOI": "10.1016/j.mser.2006.10.001",
      "volume": "R54",
      "author": "Xie",
      "year": "2006",
      "journal-title": "Mater. Sci. Eng."
    },
    {
      "key": "10.1016/j.ultramic.2008.09.007_bib2",
      "doi-asserted-by": "crossref",
      "first-page": "1610",
      "DOI": "10.1116/1.570253",
      "volume": "16",
      "author": "Seliger",
      "year": "1979",
      "journal-title": "J. Vac. Sci. Technol."
    },
    {
      "key": "10.1016/j.ultramic.2008.09.007_bib3",
      "doi-asserted-by": "crossref",
      "first-page": "34",
      "DOI": "10.1002/imic.200790064",
      "volume": "4",
      "author": "Gnauck",
      "year": "2006",
      "journal-title": "Imaging Microsc."
    },
    {
      "key": "10.1016/j.ultramic.2008.09.007_bib4",
      "doi-asserted-by": "crossref",
      "first-page": "287",
      "DOI": "10.1088/0960-1317/11/4/301",
      "volume": "11",
      "author": "Reyntjens",
      "year": "2001",
      "journal-title": "J. Micromech. Microeng."
    },
    {
      "key": "10.1016/j.ultramic.2008.09.007_bib5",
      "doi-asserted-by": "crossref",
      "DOI": "10.1557/mrs2007.65",
      "volume": "32",
      "author": "Langford",
      "year": "2007",
      "journal-title": "MRS Bull."
    },
    {
      "key": "10.1016/j.ultramic.2008.09.007_bib6",
      "doi-asserted-by": "crossref",
      "DOI": "10.1557/mrs2007.63",
      "volume": "32",
      "author": "Mayer",
      "year": "2007",
      "journal-title": "MRS Bull."
    },
    {
      "key": "10.1016/j.ultramic.2008.09.007_bib7",
      "doi-asserted-by": "crossref",
      "first-page": "306",
      "DOI": "10.1016/0039-6028(90)90315-Y",
      "volume": "228",
      "author": "Laruelle",
      "year": "1990",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "10.1016/j.ultramic.2008.09.007_bib8",
      "doi-asserted-by": "crossref",
      "first-page": "6268",
      "DOI": "10.1143/JJAP.32.6268",
      "volume": "32",
      "author": "Yamamoto",
      "year": "1993",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "10.1016/j.ultramic.2008.09.007_bib9",
      "unstructured": "J. Gierak, Etude d\u2019un profil de d\u00e9fauts induit par implantation d\u2019ions focalis\u00e9s dans une structure de type GaAs/GaAlAs, M\u00e9moire d\u2019ing\u00e9nieur CNAM chaire de Physique\u2014Electronique,1996."
    },
    {
      "key": "10.1016/j.ultramic.2008.09.007_bib10",
      "doi-asserted-by": "crossref",
      "first-page": "85",
      "DOI": "10.1016/S0042-207X(96)00227-8",
      "volume": "48",
      "author": "Forbes",
      "year": "1997",
      "journal-title": "Vacuum"
    },
    {
      "key": "10.1016/j.ultramic.2008.09.007_bib11",
      "unstructured": "Nano fabrication with focused ion beams, European Commission\u2014Community Research \u3008www.cordis.lu/nanotechnology/src/pressroom-pub.htm\u3009."
    },
    {
      "key": "10.1016/j.ultramic.2008.09.007_bib12",
      "doi-asserted-by": "crossref",
      "first-page": "132",
      "DOI": "10.1016/S0167-9317(04)00086-3",
      "volume": "73\u201374",
      "author": "Van Es",
      "year": "2004",
      "journal-title": "Microelectron. Eng."
    },
    {
      "key": "10.1016/j.ultramic.2008.09.007_bib13",
      "doi-asserted-by": "crossref",
      "first-page": "441",
      "DOI": "10.1147/rd.324.0441",
      "volume": "4",
      "author": "Hatzakis",
      "year": "1988",
      "journal-title": "IBM J. Res. Dev."
    },
    {
      "key": "10.1016/j.ultramic.2008.09.007_bib14",
      "unstructured": "Progress report Raith GmbH, Private Communication."
    },
    {
      "key": "10.1016/j.ultramic.2008.09.007_bib15",
      "unstructured": "P.W. Hawkes, B. Lencov\u00e1, E-nanonewsletter (2006), \u3008www.phantomsnet.net\u3009."
    },
    {
      "key": "10.1016/j.ultramic.2008.09.007_bib16",
      "doi-asserted-by": "crossref",
      "first-page": "3784",
      "DOI": "10.1116/1.590407",
      "volume": "B6",
      "author": "Rau",
      "year": "1998",
      "journal-title": "J. Vac. Sci. Technol."
    },
    {
      "key": "10.1016/j.ultramic.2008.09.007_bib17",
      "doi-asserted-by": "crossref",
      "first-page": "91",
      "DOI": "10.1016/S0168-9002(98)01541-1",
      "volume": "1\u20132",
      "author": "Gierak",
      "year": "1999",
      "journal-title": "Nucl. Instrum. Methods"
    },
    {
      "key": "10.1016/j.ultramic.2008.09.007_bib18",
      "unstructured": "FEI Focus, Technical Newsletter, Fall, 1993."
    },
    {
      "key": "10.1016/j.ultramic.2008.09.007_bib19",
      "doi-asserted-by": "crossref",
      "first-page": "2373",
      "DOI": "10.1116/1.589650",
      "volume": "6",
      "author": "Gierak",
      "year": "1997",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "10.1016/j.ultramic.2008.09.007_bib20",
      "unstructured": "J.F. Ziegler, SRIM\u2014The Stopping and Range of Ions in Matter \u3008www.srim.org/\u3009."
    },
    {
      "key": "10.1016/j.ultramic.2008.09.007_bib21",
      "doi-asserted-by": "crossref",
      "first-page": "1474",
      "DOI": "10.1016/j.mee.2006.01.133",
      "volume": "4\u20139",
      "author": "Biance",
      "year": "2006",
      "journal-title": "Microelectron. Eng."
    },
    {
      "key": "10.1016/j.ultramic.2008.09.007_bib22",
      "doi-asserted-by": "crossref",
      "first-page": "779",
      "DOI": "10.1016/j.mee.2007.01.059",
      "volume": "5\u20138",
      "author": "Gierak",
      "year": "2007",
      "journal-title": "Microelectron. Eng."
    }
  ],
  "container-title": "Ultramicroscopy",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0304399108002520?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0304399108002520?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2018,
        12,
        25
      ]
    ],
    "date-time": "2018-12-25T04:30:01Z",
    "timestamp": 1545712201000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/S0304399108002520"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2009,
        4
      ]
    ]
  },
  "references-count": 22,
  "journal-issue": {
    "issue": "5",
    "published-print": {
      "date-parts": [
        [
          2009,
          4
        ]
      ]
    }
  },
  "alternative-id": [
    "S0304399108002520"
  ],
  "URL": "http://dx.doi.org/10.1016/j.ultramic.2008.09.007",
  "relation": {},
  "ISSN": [
    "0304-3991"
  ],
  "subject": [],
  "container-title-short": "Ultramicroscopy",
  "published": {
    "date-parts": [
      [
        2009,
        4
      ]
    ]
  }
}