DOI: 10.1016/j.ultramic.2007.08.008. 3-D analysis of semiconductor dopant distributions in a patterned structure using LEAP

3-D analysis of semiconductor dopant distributions in a patterned structure using LEAP

10.1016/j.ultramic.2007.08.008

Crossref journal-article

Elsevier BV

Ultramicroscopy (78)

Bibliography

Moore, J. S., Jones, K. S., Kennel, H., & Corcoran, S. (2008). 3-D analysis of semiconductor dopant distributions in a patterned structure using LEAP. Ultramicroscopy, 108(6), 536â539.

Authors 4

J.S. Moore (first)
K.S. Jones (additional)
H. Kennel (additional)
S. Corcoran (additional)

References 8 Referenced 17

10.1063/1.327686 / J. Appl. Phys. by Kellogg (1980)
10.1017/S1431927604040565 / Microsc. Microanal. by Kelly (2004)
International Technology Roadmap for Semiconductors: Front End Processes, 2005, p. 37.
10.1016/j.ultramic.2004.10.011 / Ultramicroscopy by Miller (2005)
10.1016/j.ultramic.2006.06.008 / Ultramicroscopy by Thompson (2007)
10.1016/S0927-0256(98)00020-2 / Comput. Mater. Sci. by Law (1998)
10.1109/IEDM.2002.1175976 / IEDM Tech. Digest by Kennel (2002)
{'key': '10.1016/j.ultramic.2007.08.008_bib8', 'series-title': 'Atom Probe Field Ion Microscopy', 'author': 'Miller', 'year': '1996'} / Atom Probe Field Ion Microscopy by Miller (1996)

Dates

Type	When
Created	17 years, 11 months ago (Aug. 31, 2007, 3:14 a.m.)
Deposited	6 years, 7 months ago (Jan. 4, 2019, 11:51 a.m.)
Indexed	1 year, 4 months ago (April 1, 2024, 1:21 p.m.)
Issued	17 years, 3 months ago (May 1, 2008)
Published	17 years, 3 months ago (May 1, 2008)
Published Print	17 years, 3 months ago (May 1, 2008)

Funders 0

None

BibTeX

@article{Moore_2008, title={3-D analysis of semiconductor dopant distributions in a patterned structure using LEAP}, volume={108}, ISSN={0304-3991}, url={http://dx.doi.org/10.1016/j.ultramic.2007.08.008}, DOI={10.1016/j.ultramic.2007.08.008}, number={6}, journal={Ultramicroscopy}, publisher={Elsevier BV}, author={Moore, J.S. and Jones, K.S. and Kennel, H. and Corcoran, S.}, year={2008}, month=may, pages={536–539} }

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