DOI: 10.1016/j.ultramic.2004.11.018. Conventional and back-side focused ion beam milling for off-axis electron holography of electrostatic potentials in transistors

Conventional and back-side focused ion beam milling for off-axis electron holography of electrostatic potentials in transistors

10.1016/j.ultramic.2004.11.018

Crossref journal-article

Elsevier BV

Ultramicroscopy (78)

Bibliography

Dunin-Borkowski, R. E., Newcomb, S. B., Kasama, T., McCartney, M. R., Weyland, M., & Midgley, P. A. (2005). Conventional and back-side focused ion beam milling for off-axis electron holography of electrostatic potentials in transistors. Ultramicroscopy, 103(1), 67â81.

Authors 6

Rafal E. Dunin-Borkowski (first)
Simon B. Newcomb (additional)
Takeshi Kasama (additional)
Martha R. McCartney (additional)
Matthew Weyland (additional)
Paul A. Midgley (additional)

References 29 Referenced 41

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{'key': '10.1016/j.ultramic.2004.11.018_bib5', 'first-page': '617', 'article-title': 'Paper presented at Microscopy of Semiconducting Materials, Cambridge, 2003', 'volume': '180', 'author': 'Donnet', 'year': '2003', 'journal-title': 'Inst. Phys. Conf. Ser.'} / Inst. Phys. Conf. Ser. / Paper presented at Microscopy of Semiconducting Materials, Cambridge, 2003 by Donnet (2003)
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10.1103/PhysRevB.70.165313 / Phys. Rev. B by Houben (2004)

Dates

Type	When
Created	20 years, 7 months ago (Dec. 29, 2004, 12:13 a.m.)
Deposited	5 years, 4 months ago (April 4, 2020, 9:37 p.m.)
Indexed	4 months ago (April 22, 2025, 2:04 a.m.)
Issued	20 years, 4 months ago (April 1, 2005)
Published	20 years, 4 months ago (April 1, 2005)
Published Print	20 years, 4 months ago (April 1, 2005)

Funders 0

None

BibTeX

@article{Dunin_Borkowski_2005, title={Conventional and back-side focused ion beam milling for off-axis electron holography of electrostatic potentials in transistors}, volume={103}, ISSN={0304-3991}, url={http://dx.doi.org/10.1016/j.ultramic.2004.11.018}, DOI={10.1016/j.ultramic.2004.11.018}, number={1}, journal={Ultramicroscopy}, publisher={Elsevier BV}, author={Dunin-Borkowski, Rafal E. and Newcomb, Simon B. and Kasama, Takeshi and McCartney, Martha R. and Weyland, Matthew and Midgley, Paul A.}, year={2005}, month=apr, pages={67–81} }

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