DOI: 10.1016/j.tsf.2013.02.119. Ultimate nanopatterning of Si substrate using filtered liquid metal alloy ion source-focused ion beam

Ultimate nanopatterning of Si substrate using filtered liquid metal alloy ion source-focused ion beam

10.1016/j.tsf.2013.02.119

Crossref journal-article

Elsevier BV

Thin Solid Films (78)

Bibliography

Benkouider, A., Berbezier, I., Ronda, A., Favre, L., Gomes, E. R., Marcus, I. C., Alonso, I., Delobbe, A., & Sudraud, P. (2013). Ultimate nanopatterning of Si substrate using filtered liquid metal alloy ion source-focused ion beam. Thin Solid Films, 543, 69â73.

Authors 9

A. Benkouider (first)
I. Berbezier (additional)
A. Ronda (additional)
L. Favre (additional)
E. Ruiz Gomes (additional)
I.C. Marcus (additional)
I. Alonso (additional)
A. Delobbe (additional)
P. Sudraud (additional)

References 13 Referenced 12

10.1063/1.1828597 / Appl. Phys. Lett. by Karmous (2004)
10.1088/0957-4484/22/7/075301 / Nanotechnol. J. by Graham (2011)
10.1116/1.3533938 / J. Vac. Sci. Technol., B by Murphy (2011)
10.1166/nnl.2011.1256 / Nanosci. Nanotechnol. Lett. by Sgarlata (2011)
10.1021/cg200433r / Cryst. Growth Des. by Carmen Marcus (2011)
10.1063/1.4730620 / Appl. Phys. Lett. by Aouassa (2012)
10.1016/j.tsf.2007.11.102 / Thin Solid Films by Hyun Kim (2008)
10.1088/0960-1317/14/4/R01 / J. Micromech. Microeng. by Tseng (2004)
10.1557/mrs2007.62 / Mater. Res. Soc. Bull. by Volkert (2007)
{'key': '10.1016/j.tsf.2013.02.119_bb0050', 'first-page': 'C110', 'volume': '129', 'author': 'Gamo', 'year': '1982', 'journal-title': 'J. Electrochem. Soc.'} / J. Electrochem. Soc. by Gamo (1982)
10.1063/1.1147167 / Rev. Sci. Instrum. by Rusli (1996)
10.1016/S0038-1101(01)00164-2 / Solid-state Electron. by Ganetsos (2001)
10.1116/1.3253471 / J. Vac. Sci. Technol., B by Mazarov (2009)

Dates

Type	When
Created	12 years, 5 months ago (March 5, 2013, 5:03 p.m.)
Deposited	6 years, 10 months ago (Oct. 18, 2018, 3:58 a.m.)
Indexed	11 months, 4 weeks ago (Aug. 22, 2024, 1:28 p.m.)
Issued	11 years, 11 months ago (Sept. 1, 2013)
Published	11 years, 11 months ago (Sept. 1, 2013)
Published Print	11 years, 11 months ago (Sept. 1, 2013)

Funders 0

None

BibTeX

@article{Benkouider_2013, title={Ultimate nanopatterning of Si substrate using filtered liquid metal alloy ion source-focused ion beam}, volume={543}, ISSN={0040-6090}, url={http://dx.doi.org/10.1016/j.tsf.2013.02.119}, DOI={10.1016/j.tsf.2013.02.119}, journal={Thin Solid Films}, publisher={Elsevier BV}, author={Benkouider, A. and Berbezier, I. and Ronda, A. and Favre, L. and Gomes, E. Ruiz and Marcus, I.C. and Alonso, I. and Delobbe, A. and Sudraud, P.}, year={2013}, month=sep, pages={69–73} }

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