DOI: 10.1016/j.tsf.2013.02.019. Sputter deposition of transition-metal carbide films — A critical review from a chemical perspective

Sputter deposition of transition-metal carbide films — A critical review from a chemical perspective

10.1016/j.tsf.2013.02.019

Crossref journal-article

Elsevier BV

Thin Solid Films (78)

Bibliography

Jansson, U., & Lewin, E. (2013). Sputter deposition of transition-metal carbide films â A critical review from a chemical perspective. Thin Solid Films, 536, 1â24.

Authors 2

Ulf Jansson (first)
Erik Lewin (additional)

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Dates

Type	When
Created	12 years, 6 months ago (Feb. 21, 2013, 11:35 a.m.)
Deposited	6 years, 10 months ago (Oct. 18, 2018, 6:01 a.m.)
Indexed	3 weeks, 5 days ago (Aug. 6, 2025, 8:53 a.m.)
Issued	12 years, 3 months ago (June 1, 2013)
Published	12 years, 3 months ago (June 1, 2013)
Published Print	12 years, 3 months ago (June 1, 2013)

Funders 0

None

BibTeX

@article{Jansson_2013, title={Sputter deposition of transition-metal carbide films — A critical review from a chemical perspective}, volume={536}, ISSN={0040-6090}, url={http://dx.doi.org/10.1016/j.tsf.2013.02.019}, DOI={10.1016/j.tsf.2013.02.019}, journal={Thin Solid Films}, publisher={Elsevier BV}, author={Jansson, Ulf and Lewin, Erik}, year={2013}, month=jun, pages={1–24} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        6
      ]
    ],
    "date-time": "2025-08-06T12:53:35Z",
    "timestamp": 1754484815125
  },
  "reference-count": 145,
  "publisher": "Elsevier BV",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2013,
            6,
            1
          ]
        ],
        "date-time": "2013-06-01T00:00:00Z",
        "timestamp": 1370044800000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [
      "elsevier.com",
      "sciencedirect.com"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        2013,
        6
      ]
    ]
  },
  "DOI": "10.1016/j.tsf.2013.02.019",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2013,
        2,
        21
      ]
    ],
    "date-time": "2013-02-21T16:35:58Z",
    "timestamp": 1361464558000
  },
  "page": "1-24",
  "update-policy": "http://dx.doi.org/10.1016/elsevier_cm_policy",
  "source": "Crossref",
  "is-referenced-by-count": 235,
  "special_numbering": "C",
  "title": "Sputter deposition of transition-metal carbide films \u2014 A critical review from a chemical perspective",
  "prefix": "10.1016",
  "volume": "536",
  "author": [
    {
      "given": "Ulf",
      "family": "Jansson",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Erik",
      "family": "Lewin",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "issue": "5",
      "key": "10.1016/j.tsf.2013.02.019_bb0005",
      "doi-asserted-by": "crossref",
      "first-page": "1662",
      "DOI": "10.1016/j.tsf.2008.09.091",
      "volume": "517",
      "author": "Mart\u00ednez-Mart\u00ednez",
      "year": "2009",
      "journal-title": "Thin Solid Films"
    },
    {
      "issue": "10",
      "key": "10.1016/j.tsf.2013.02.019_bb0010",
      "doi-asserted-by": "crossref",
      "first-page": "807",
      "DOI": "10.1252/jcej.38.807",
      "volume": "38",
      "author": "Nagai",
      "year": "2005",
      "journal-title": "J. Chem. Eng. Jpn."
    },
    {
      "issue": "2",
      "key": "10.1016/j.tsf.2013.02.019_bb0015",
      "doi-asserted-by": "crossref",
      "first-page": "22902",
      "DOI": "10.1051/epjap/2009122",
      "volume": "49",
      "author": "\u00d6berg",
      "year": "2010",
      "journal-title": "Eur. Phys. J. Appl. Phys."
    },
    {
      "issue": "4",
      "key": "10.1016/j.tsf.2013.02.019_bb0020",
      "doi-asserted-by": "crossref",
      "first-page": "873",
      "DOI": "10.3390/en20400873",
      "volume": "2",
      "author": "Ham",
      "year": "2009",
      "journal-title": "Energies"
    },
    {
      "key": "10.1016/j.tsf.2013.02.019_bb0025",
      "doi-asserted-by": "crossref",
      "first-page": "956",
      "DOI": "10.1016/j.jnucmat.2004.10.037",
      "volume": "337\u2013339",
      "author": "De Temmerman",
      "year": "2005",
      "journal-title": "J. Nucl. Mater."
    },
    {
      "issue": "3",
      "key": "10.1016/j.tsf.2013.02.019_bb0030",
      "doi-asserted-by": "crossref",
      "first-page": "033510",
      "DOI": "10.1063/1.3060717",
      "volume": "105",
      "author": "Abad",
      "year": "2009",
      "journal-title": "J. Appl. Phys."
    },
    {
      "issue": "22\u201323",
      "key": "10.1016/j.tsf.2013.02.019_bb0035",
      "doi-asserted-by": "crossref",
      "first-page": "5790",
      "DOI": "10.1016/j.surfcoat.2008.06.040",
      "volume": "202",
      "author": "Vitu",
      "year": "2008",
      "journal-title": "Surf. Coat. Technol."
    },
    {
      "issue": "1\u20134",
      "key": "10.1016/j.tsf.2013.02.019_bb0040",
      "doi-asserted-by": "crossref",
      "first-page": "201",
      "DOI": "10.1016/S0079-6786(00)00006-6",
      "volume": "28",
      "author": "Barsoum",
      "year": "2000",
      "journal-title": "Prog. Solid State Chem."
    },
    {
      "issue": "8",
      "key": "10.1016/j.tsf.2013.02.019_bb0045",
      "doi-asserted-by": "crossref",
      "first-page": "1851",
      "DOI": "10.1016/j.tsf.2009.07.184",
      "volume": "518",
      "author": "Eklund",
      "year": "2010",
      "journal-title": "Thin Solid Films"
    },
    {
      "issue": "3",
      "key": "10.1016/j.tsf.2013.02.019_bb0050",
      "doi-asserted-by": "crossref",
      "first-page": "211",
      "DOI": "10.1080/10408438708242178",
      "volume": "13",
      "author": "Schwarz",
      "year": "1987",
      "journal-title": "Crit. Rev. Solid State Mater. Sci."
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    {
      "key": "10.1016/j.tsf.2013.02.019_bb0055",
      "first-page": "519",
      "volume": "vol. 2",
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      "year": "1994"
    },
    {
      "key": "10.1016/j.tsf.2013.02.019_bb0060",
      "series-title": "Transition Metal Carbides and Nitrides",
      "author": "Toth",
      "year": "1971"
    },
    {
      "key": "10.1016/j.tsf.2013.02.019_bb0065",
      "first-page": "33",
      "volume": "12",
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      "year": "1931",
      "journal-title": "Z. Physiol. Chem."
    },
    {
      "issue": "16",
      "key": "10.1016/j.tsf.2013.02.019_bb0070",
      "doi-asserted-by": "crossref",
      "first-page": "11685",
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      "DOI": "10.1016/j.surfcoat.2006.06.005",
      "volume": "201",
      "author": "Krzanowski",
      "year": "2006",
      "journal-title": "Surf. Coat. Technol."
    },
    {
      "issue": "3",
      "key": "10.1016/j.tsf.2013.02.019_bb0700",
      "doi-asserted-by": "crossref",
      "first-page": "446",
      "DOI": "10.1109/TCHMT.1987.1134748",
      "volume": "10",
      "author": "Nakamori",
      "year": "1987",
      "journal-title": "IEEE Trans. Compon. Hybrids Manuf. Technol."
    },
    {
      "issue": "12",
      "key": "10.1016/j.tsf.2013.02.019_bb0705",
      "doi-asserted-by": "crossref",
      "first-page": "3163",
      "DOI": "10.1557/JMR.2002.0457",
      "volume": "17",
      "author": "Endrino",
      "year": "2002",
      "journal-title": "J. Mater. Res."
    },
    {
      "key": "10.1016/j.tsf.2013.02.019_bb0710",
      "unstructured": "N. Nedfors, O. Tengstrand, A. Flink, P. Eklund, L. Hutman, U. Jansson, in manuscript (2013)."
    },
    {
      "issue": "2",
      "key": "10.1016/j.tsf.2013.02.019_bb0715",
      "doi-asserted-by": "crossref",
      "first-page": "299",
      "DOI": "10.1016/j.surfcoat.2010.06.051",
      "volume": "205",
      "author": "Lauridsen",
      "year": "2010",
      "journal-title": "Surf. Coat. Technol."
    },
    {
      "issue": "12",
      "key": "10.1016/j.tsf.2013.02.019_bb0720",
      "doi-asserted-by": "crossref",
      "first-page": "4720",
      "DOI": "10.1016/j.actamat.2012.04.044",
      "volume": "60",
      "author": "K\u00e1das",
      "year": "2012",
      "journal-title": "Acta Mater."
    },
    {
      "key": "10.1016/j.tsf.2013.02.019_bb0725",
      "unstructured": "O. Tengstrand, N. Nedfors, P. Eklund, A. Flink, U. Jansson, L. Hultman, in manuscript (2013)."
    }
  ],
  "container-title": "Thin Solid Films",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:S004060901300268X?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:S004060901300268X?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2018,
        10,
        18
      ]
    ],
    "date-time": "2018-10-18T10:01:46Z",
    "timestamp": 1539856906000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/S004060901300268X"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2013,
        6
      ]
    ]
  },
  "references-count": 145,
  "alternative-id": [
    "S004060901300268X"
  ],
  "URL": "http://dx.doi.org/10.1016/j.tsf.2013.02.019",
  "relation": {},
  "ISSN": [
    "0040-6090"
  ],
  "subject": [],
  "container-title-short": "Thin Solid Films",
  "published": {
    "date-parts": [
      [
        2013,
        6
      ]
    ]
  },
  "assertion": [
    {
      "value": "Elsevier",
      "name": "publisher",
      "label": "This article is maintained by"
    },
    {
      "value": "Sputter deposition of transition-metal carbide films \u2014 A critical review from a chemical perspective",
      "name": "articletitle",
      "label": "Article Title"
    },
    {
      "value": "Thin Solid Films",
      "name": "journaltitle",
      "label": "Journal Title"
    },
    {
      "value": "https://doi.org/10.1016/j.tsf.2013.02.019",
      "name": "articlelink",
      "label": "CrossRef DOI link to publisher maintained version"
    },
    {
      "value": "article",
      "name": "content_type",
      "label": "Content Type"
    },
    {
      "value": "Copyright \u00a9 2013 Elsevier B.V. All rights reserved.",
      "name": "copyright",
      "label": "Copyright"
    }
  ]
}