DOI: 10.1016/j.tsf.2009.10.142. Evolution of structure and properties of multi-component (AlCrTaTiZr)Ox films

Evolution of structure and properties of multi-component (AlCrTaTiZr)Ox films

10.1016/j.tsf.2009.10.142

Crossref journal-article

Elsevier BV

Thin Solid Films (78)

Bibliography

Lin, M.-I., Tsai, M.-H., Shen, W.-J., & Yeh, J.-W. (2010). Evolution of structure and properties of multi-component (AlCrTaTiZr)Ox films. Thin Solid Films, 518(10), 2732â2737.

Authors 4

Miao-I. Lin (first)
Ming-Hung Tsai (additional)
Wan-Jui Shen (additional)
Jien-Wei Yeh (additional)

References 33 Referenced 97

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Dates

Type	When
Created	15 years, 9 months ago (Oct. 30, 2009, 4:28 a.m.)
Deposited	6 years, 3 months ago (May 23, 2019, 9:58 a.m.)
Indexed	6 minutes ago (Aug. 26, 2025, 2:37 a.m.)
Issued	15 years, 5 months ago (March 1, 2010)
Published	15 years, 5 months ago (March 1, 2010)
Published Print	15 years, 5 months ago (March 1, 2010)

Funders 0

None

BibTeX

@article{Lin_2010, title={Evolution of structure and properties of multi-component (AlCrTaTiZr)Ox films}, volume={518}, ISSN={0040-6090}, url={http://dx.doi.org/10.1016/j.tsf.2009.10.142}, DOI={10.1016/j.tsf.2009.10.142}, number={10}, journal={Thin Solid Films}, publisher={Elsevier BV}, author={Lin, Miao-I. and Tsai, Ming-Hung and Shen, Wan-Jui and Yeh, Jien-Wei}, year={2010}, month=mar, pages={2732–2737} }

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