DOI: 10.1016/j.tsf.2007.11.102. Effect of stage control parameters on the FIB milling process

Effect of stage control parameters on the FIB milling process

10.1016/j.tsf.2007.11.102

Crossref journal-article

Elsevier BV

Thin Solid Films (78)

Bibliography

Kim, J. H., Boo, J.-H., & Kim, Y.-J. (2008). Effect of stage control parameters on the FIB milling process. Thin Solid Films, 516(19), 6710â6714.

Authors 3

Joon Hyun Kim (first)
Jin-Hyo Boo (additional)
Youn-Jea Kim (additional)

References 7 Referenced 13

10.1111/j.0022-2720.2004.01327.x / J. Microsc. by Rubanov (2004)
10.1088/0960-1317/14/4/R01 / J. Micromechanics Microengineering by Tseng (2004)
10.1016/S0040-6090(97)00583-X / Thin Solid Films by Presser (1997)
10.1093/jmicro/dfh080 / J. Electron Microsc. by Naoko (2004)
10.1007/s001700070005 / Adv. Manuf. Technol. by Fu (2000)
10.1007/s00339-002-1890-x / Appl. Phys., A by Lugstein (2003)
10.1116/1.1640396 / J. Vac. Sci. Technol., B by Tseng (2004)

Dates

Type	When
Created	17 years, 8 months ago (Nov. 26, 2007, 12:09 p.m.)
Deposited	3 years, 2 months ago (June 18, 2022, 3:51 p.m.)
Indexed	1 year, 6 months ago (Feb. 13, 2024, 4:21 p.m.)
Issued	17 years ago (Aug. 1, 2008)
Published	17 years ago (Aug. 1, 2008)
Published Print	17 years ago (Aug. 1, 2008)

Funders 0

None

BibTeX

@article{Kim_2008, title={Effect of stage control parameters on the FIB milling process}, volume={516}, ISSN={0040-6090}, url={http://dx.doi.org/10.1016/j.tsf.2007.11.102}, DOI={10.1016/j.tsf.2007.11.102}, number={19}, journal={Thin Solid Films}, publisher={Elsevier BV}, author={Kim, Joon Hyun and Boo, Jin-Hyo and Kim, Youn-Jea}, year={2008}, month=aug, pages={6710–6714} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        2,
        13
      ]
    ],
    "date-time": "2024-02-13T21:21:26Z",
    "timestamp": 1707859286260
  },
  "reference-count": 7,
  "publisher": "Elsevier BV",
  "issue": "19",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2008,
            8,
            1
          ]
        ],
        "date-time": "2008-08-01T00:00:00Z",
        "timestamp": 1217548800000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2008,
        8
      ]
    ]
  },
  "DOI": "10.1016/j.tsf.2007.11.102",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2007,
        11,
        26
      ]
    ],
    "date-time": "2007-11-26T17:09:02Z",
    "timestamp": 1196096942000
  },
  "page": "6710-6714",
  "source": "Crossref",
  "is-referenced-by-count": 13,
  "title": "Effect of stage control parameters on the FIB milling process",
  "prefix": "10.1016",
  "volume": "516",
  "author": [
    {
      "given": "Joon Hyun",
      "family": "Kim",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Jin-Hyo",
      "family": "Boo",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Youn-Jea",
      "family": "Kim",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/j.tsf.2007.11.102_bib1",
      "doi-asserted-by": "crossref",
      "first-page": "213",
      "DOI": "10.1111/j.0022-2720.2004.01327.x",
      "volume": "214",
      "author": "Rubanov",
      "year": "2004",
      "journal-title": "J. Microsc."
    },
    {
      "key": "10.1016/j.tsf.2007.11.102_bib2",
      "doi-asserted-by": "crossref",
      "first-page": "R15",
      "DOI": "10.1088/0960-1317/14/4/R01",
      "volume": "14",
      "author": "Tseng",
      "year": "2004",
      "journal-title": "J. Micromechanics Microengineering"
    },
    {
      "key": "10.1016/j.tsf.2007.11.102_bib3",
      "doi-asserted-by": "crossref",
      "first-page": "369",
      "DOI": "10.1016/S0040-6090(97)00583-X",
      "volume": "308",
      "author": "Presser",
      "year": "1997",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/j.tsf.2007.11.102_bib4",
      "doi-asserted-by": "crossref",
      "first-page": "451",
      "DOI": "10.1093/jmicro/dfh080",
      "volume": "53",
      "author": "Naoko",
      "year": "2004",
      "journal-title": "J. Electron Microsc."
    },
    {
      "key": "10.1016/j.tsf.2007.11.102_bib5",
      "doi-asserted-by": "crossref",
      "first-page": "877",
      "DOI": "10.1007/s001700070005",
      "volume": "16",
      "author": "Fu",
      "year": "2000",
      "journal-title": "Adv. Manuf. Technol."
    },
    {
      "key": "10.1016/j.tsf.2007.11.102_bib6",
      "doi-asserted-by": "crossref",
      "first-page": "545",
      "DOI": "10.1007/s00339-002-1890-x",
      "volume": "76",
      "author": "Lugstein",
      "year": "2003",
      "journal-title": "Appl. Phys., A"
    },
    {
      "key": "10.1016/j.tsf.2007.11.102_bib7",
      "doi-asserted-by": "crossref",
      "first-page": "82",
      "DOI": "10.1116/1.1640396",
      "volume": "22",
      "author": "Tseng",
      "year": "2004",
      "journal-title": "J. Vac. Sci. Technol., B"
    }
  ],
  "container-title": "Thin Solid Films",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:S004060900701913X?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:S004060900701913X?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2022,
        6,
        18
      ]
    ],
    "date-time": "2022-06-18T19:51:54Z",
    "timestamp": 1655581914000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/S004060900701913X"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2008,
        8
      ]
    ]
  },
  "references-count": 7,
  "journal-issue": {
    "issue": "19",
    "published-print": {
      "date-parts": [
        [
          2008,
          8
        ]
      ]
    }
  },
  "alternative-id": [
    "S004060900701913X"
  ],
  "URL": "http://dx.doi.org/10.1016/j.tsf.2007.11.102",
  "relation": {},
  "ISSN": [
    "0040-6090"
  ],
  "subject": [],
  "container-title-short": "Thin Solid Films",
  "published": {
    "date-parts": [
      [
        2008,
        8
      ]
    ]
  }
}