DOI: 10.1016/j.nimb.2011.01.127. Effect of nitrogen flow ratios on the microstructure and properties of (TiVCr)N coatings by reactive magnetic sputtering

Effect of nitrogen flow ratios on the microstructure and properties of (TiVCr)N coatings by reactive magnetic sputtering

10.1016/j.nimb.2011.01.127

Crossref journal-article

Elsevier BV

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (78)

Bibliography

Tsai, D.-C., Huang, Y.-L., Lin, S.-R., Jung, D.-R., & Shieu, F.-S. (2011). Effect of nitrogen flow ratios on the microstructure and properties of (TiVCr)N coatings by reactive magnetic sputtering. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 269(7), 685â691.

Authors 5

Du-Cheng Tsai (first)
Yen-Lin Huang (additional)
Sheng-Ru Lin (additional)
De-Ru Jung (additional)
Fuh-Sheng Shieu (additional)

References 42 Referenced 20

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Dates

Type	When
Created	14 years, 7 months ago (Feb. 4, 2011, 11:23 p.m.)
Deposited	6 years, 9 months ago (Dec. 4, 2018, 3:57 p.m.)
Indexed	1 year, 1 month ago (July 27, 2024, 5:10 p.m.)
Issued	14 years, 5 months ago (April 1, 2011)
Published	14 years, 5 months ago (April 1, 2011)
Published Print	14 years, 5 months ago (April 1, 2011)

Funders 0

None

BibTeX

@article{Tsai_2011, title={Effect of nitrogen flow ratios on the microstructure and properties of (TiVCr)N coatings by reactive magnetic sputtering}, volume={269}, ISSN={0168-583X}, url={http://dx.doi.org/10.1016/j.nimb.2011.01.127}, DOI={10.1016/j.nimb.2011.01.127}, number={7}, journal={Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms}, publisher={Elsevier BV}, author={Tsai, Du-Cheng and Huang, Yen-Lin and Lin, Sheng-Ru and Jung, De-Ru and Shieu, Fuh-Sheng}, year={2011}, month=apr, pages={685–691} }

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