Crossref
journal-article
Elsevier BV
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (78)
References
51
Referenced
29
{'key': '10.1016/j.nimb.2007.12.008_bib1', 'series-title': 'High Resolution Focused Ion Beams', 'author': 'Orloff', 'year': '2003'}
/ High Resolution Focused Ion Beams by Orloff (2003){'key': '10.1016/j.nimb.2007.12.008_bib2', 'series-title': 'Focused Ion Beams from Liquid Metal Ion Sources', 'author': 'Prewett', 'year': '1991'}
/ Focused Ion Beams from Liquid Metal Ion Sources by Prewett (1991)10.1088/0022-3727/20/9/021
/ J. Phys. D: Appl. Phys. by Prewett (1987)10.1116/1.585279
/ J. Vac. Sci. Technol. B by Tao (1991)- R. Boylan, M. Ward, D. Tuggle, in: Proceedings of the International Symposium for Testing and Failure Analysis, ASM International, Los Angeles, 1989, p. 249.
10.1116/1.586705
/ J. Vac. Sci. Technol. B by Yamaguchi (1993)10.1116/1.1515310
/ J. Vac. Sci. Technol. B by Gonzalez (2002)10.1016/S0169-4332(01)00520-7
/ Appl. Surf. Sci. by Bischoff (2001)10.1063/1.114659
/ Appl. Phys. Lett. by Steckl (1995)10.1088/0960-1317/11/4/301
/ J. Micromech. Microeng. by Reyntjens (2001)10.1116/1.584049
/ J. Vac. Sci. Technol. B by Swanson (1988)10.1063/1.124843
/ Appl. Phys. Lett. by Chao (1999)- L. Bischoff, B. Schmidt, K.-H. Heinig, T. Müller and S. Hellwig, in: Proceedings of the International Workshop on Nanostructures for Electronics and Optics – NEOP, Dresden, Germany, October 6–9, 2002.
10.1063/1.2158967
/ J. Appl. Phys. by Fassbender (2006)10.1116/1.583937
/ J. Vac. Sci. Technol. B by Melngailis (1987)10.1098/rspa.1964.0151
/ Proc. R. Soc. A by Taylor (1964)10.1007/BF00614764
/ Appl. Phys. A by Kingham (1984)10.1116/1.570316
/ J. Vac. Sci. Technol. by Wagner (1979)10.1016/S0168-583X(99)00859-9
/ Nucl. Instr. and Meth. Phys. Res. B by Bischoff (2000)10.1016/j.ultramic.2004.11.020
/ Ultramicroscopy by Bischoff (2005)10.1088/0022-3727/25/8/022
/ J. Phys. D: Appl. Phys. by Mair (1992){'key': '10.1016/j.nimb.2007.12.008_bib22', 'series-title': 'Statistical Mechanics of the Liquid Surface', 'author': 'Crox', 'year': '1980'}
/ Statistical Mechanics of the Liquid Surface by Crox (1980)10.1117/12.935103
/ Proc. SPIE by Prewett (1983){'key': '10.1016/j.nimb.2007.12.008_bib24', 'first-page': '335', 'volume': '59', 'author': 'Knauer', 'year': '1981', 'journal-title': 'Optik'}
/ Optik by Knauer (1981)10.1088/0022-3727/31/24/009
/ J. Phys. D: Appl. Phys. by Kim (1998)10.1088/0022-3727/29/8/019
/ J. Phys. D: Appl. Phys. by Mair (1996)10.1016/0167-5087(83)91005-0
/ Nucl. Instr. and Meth. Phys. Res. by Swanson (1983)10.1007/BF00624600
/ Appl. Phys. A by Marriott (1987)10.1063/1.338227
/ J. Appl. Phys. by Ishitani (1987)-
L. Bischoff, Ch. Akhmadaliev, German Patent Application DE 10 2007 027 097.8; L. Bischoff et al., Ultramicroscopy 107 (2007) 865.
(
10.1016/j.ultramic.2007.02.022
) 10.1016/0039-6028(65)90014-2
/ Surf. Sci. by Brandon (1964)10.1016/0167-9317(93)90054-9
/ Microelectron. Eng. by Bischoff (1993)10.1063/1.97830
/ Appl. Phys. Lett. by White (1987)10.1116/1.587463
/ J. Vac. Sci. Technol. B by Bischoff (1994)10.1088/0022-3727/27/2/038
/ J. Phys. D: Appl. Phys. by Hesse (1994)10.1143/JJAP.38.7148
/ Jpn. J. Appl. Phys. Part 1 by Hausmann (1999)10.1016/j.msec.2005.09.026
/ Mater. Sci. Eng. C by Akhmadaliev (2006)10.1063/1.2400068
/ Appl. Phys. Lett. by Akhmadaliev (2006)10.1016/j.mee.2007.01.226
/ Microelectron. Eng. by Bischoff (2007)10.1063/1.1396319
/ Appl. Phys. Lett. by Posselt (2001)10.1063/1.1533092
/ J. Appl. Phys. by Posselt (2003)10.1063/1.2360238
/ Appl. Phys. Lett. by Posselt (2006)10.1016/S0141-6359(00)00064-7
/ Precis. Eng. by Adams (2001)10.1103/PhysRev.184.383
/ Phys. Rev. by Sigmund (1969)10.1016/0022-3115(94)00376-9
/ J. Nucl. Mater. by Garcia-Rosales (1994)- J. Schmidt, H. Tritschler and L. Bischoff, in: Proceedings of the International Conference on Micro and Nano Systems, ICMNS 2002, Kumning, China, August 11–14, 2002.
10.1002/crat.200410313
/ Cryst. Res. Technol. by Gorbunov (2005)10.1016/S0169-4332(99)00060-4
/ Appl. Surf. Sci. by Knapp (1999)10.1116/1.591067
/ J. Vac. Sci. Technol. B by Chao (1999)10.1016/S0030-4018(00)01153-6
/ Opt. Commun. by Martin (2001)10.1002/pssa.200420005
/ Phys. Status Solidi (a) by Grenzer (2005)
Dates
Type | When |
---|---|
Created | 17 years, 6 months ago (Jan. 30, 2008, 9:59 a.m.) |
Deposited | 6 years, 7 months ago (Dec. 31, 2018, 8:31 p.m.) |
Indexed | 11 months, 2 weeks ago (Sept. 6, 2024, 6:53 a.m.) |
Issued | 17 years, 4 months ago (April 1, 2008) |
Published | 17 years, 4 months ago (April 1, 2008) |
Published Print | 17 years, 4 months ago (April 1, 2008) |
@article{Bischoff_2008, title={Application of mass-separated focused ion beams in nano-technology}, volume={266}, ISSN={0168-583X}, url={http://dx.doi.org/10.1016/j.nimb.2007.12.008}, DOI={10.1016/j.nimb.2007.12.008}, number={8}, journal={Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms}, publisher={Elsevier BV}, author={Bischoff, L.}, year={2008}, month=apr, pages={1846–1851} }