DOI: 10.1016/j.nimb.2006.03.195. Characterization of r.f. sputtered thin Mo, W and Si films as precursors to multilayer X-ray mirrors

Characterization of r.f. sputtered thin Mo, W and Si films as precursors to multilayer X-ray mirrors

10.1016/j.nimb.2006.03.195

Crossref journal-article

Elsevier BV

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (78)

Authors 3

D. Bhattacharyya (first)
D. Joseph (additional)
A.K. Poswal (additional)

References 42 Referenced 4

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{'key': '10.1016/j.nimb.2006.03.195_bib34', 'series-title': 'X-ray Electrons and Analytical Chemistry', 'author': 'Liebhafsky', 'year': '1972'} / X-ray Electrons and Analytical Chemistry by Liebhafsky (1972)
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10.1063/1.117397 / Appl. Phys. Lett. by Koh (1996)

Dates

Type	When
Created	19 years, 2 months ago (June 23, 2006, 9:37 a.m.)
Deposited	4 years, 1 month ago (July 28, 2021, 3:13 p.m.)
Indexed	1 week, 2 days ago (Aug. 23, 2025, 9:12 p.m.)
Issued	19 years, 1 month ago (Aug. 1, 2006)
Published	19 years, 1 month ago (Aug. 1, 2006)
Published Print	19 years, 1 month ago (Aug. 1, 2006)

Funders 0

None

BibTeX

@article{Bhattacharyya_2006, title={Characterization of r.f. sputtered thin Mo, W and Si films as precursors to multilayer X-ray mirrors}, volume={248}, ISSN={0168-583X}, url={http://dx.doi.org/10.1016/j.nimb.2006.03.195}, DOI={10.1016/j.nimb.2006.03.195}, number={2}, journal={Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms}, publisher={Elsevier BV}, author={Bhattacharyya, D. and Joseph, D. and Poswal, A.K.}, year={2006}, month=aug, pages={264–272} }

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    "date-parts": [
      [
        2006,
        8
      ]
    ]
  }
}