DOI: 10.1016/j.nimb.2005.03.074. Three-dimensional high-performance nano-tools fabricated using focused-ion-beam chemical-vapor-deposition

Three-dimensional high-performance nano-tools fabricated using focused-ion-beam chemical-vapor-deposition

10.1016/j.nimb.2005.03.074

Crossref journal-article

Elsevier BV

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (78)

Bibliography

Kometani, R., Hoshino, T., Kanda, K., Haruyama, Y., Kaito, T., Fujita, J., Ishida, M., Ochiai, Y., & Matsui, S. (2005). Three-dimensional high-performance nano-tools fabricated using focused-ion-beam chemical-vapor-deposition. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 232(1â4), 362â366.

Authors 9

Reo Kometani (first)
Takayuki Hoshino (additional)
Kazuhiro Kanda (additional)
Yuichi Haruyama (additional)
Takashi Kaito (additional)
Jun-ichi Fujita (additional)
Masahiko Ishida (additional)
Yukinori Ochiai (additional)
Shinji Matsui (additional)

References 5 Referenced 25

10.1063/1.1403275 / Appl. Phys. Lett. by Akita (2001)
10.1116/1.1319689 / J. Vac. Sci. Technol. by Matsui (2000)
10.1143/JJAP.42.4107 / J. Appl. Phys. by Kometani (2003)
10.1116/1.1643056 / J. Vac. Sci. Technol. by Kometani (2004)
10.1143/JJAP.43.7187 / J. Appl. Phys. by Kometani (2004)

Dates

Type	When
Created	20 years, 3 months ago (May 18, 2005, 7:58 a.m.)
Deposited	3 years, 1 month ago (June 26, 2022, 7:37 a.m.)
Indexed	11 months, 1 week ago (Sept. 12, 2024, 7:53 a.m.)
Issued	20 years, 3 months ago (May 1, 2005)
Published	20 years, 3 months ago (May 1, 2005)
Published Print	20 years, 3 months ago (May 1, 2005)

Funders 0

None

BibTeX

@article{Kometani_2005, title={Three-dimensional high-performance nano-tools fabricated using focused-ion-beam chemical-vapor-deposition}, volume={232}, ISSN={0168-583X}, url={http://dx.doi.org/10.1016/j.nimb.2005.03.074}, DOI={10.1016/j.nimb.2005.03.074}, number={1–4}, journal={Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms}, publisher={Elsevier BV}, author={Kometani, Reo and Hoshino, Takayuki and Kanda, Kazuhiro and Haruyama, Yuichi and Kaito, Takashi and Fujita, Jun-ichi and Ishida, Masahiko and Ochiai, Yukinori and Matsui, Shinji}, year={2005}, month=may, pages={362–366} }

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