DOI: 10.1016/j.micron.2006.01.008. Comparison of Si and Ge low-loss spectra to interpret the Ge contrast in EFTEM images of Si1−x Gex nanostructures

Comparison of Si and Ge low-loss spectra to interpret the Ge contrast in EFTEM images of Si1−x Gex nanostructures

10.1016/j.micron.2006.01.008

Crossref journal-article

Elsevier BV

Micron (78)

Bibliography

Pantel, R., Cheynet, M. C., & Tichelaar, F. D. (2006). Comparison of Si and Ge low-loss spectra to interpret the Ge contrast in EFTEM images of Si1âx Gex nanostructures. Micron, 37(7), 657â665.

Authors 3

R. Pantel (first)
M.C. Cheynet (additional)
F.D. Tichelaar (additional)

References 22 Referenced 8

Ahn, C.C., Krivanek, O.L., 1983. EELS Atlas: A reference guide of electron energy loss spectra covering all stable elements Gatan, Inc. 780 Commonwealth Drive, Warrendale, PA 15086, USA.
{'key': '10.1016/j.micron.2006.01.008_bib2', 'first-page': '93', 'article-title': 'A high performance low complexity SiGe HBT for BICMOS integration', 'author': 'Chantre', 'year': '1998', 'journal-title': 'BCTM Technol. Dig.'} / BCTM Technol. Dig. / A high performance low complexity SiGe HBT for BICMOS integration by Chantre (1998)
Denoyer, L., Duscher, S., 1996. EST Electronic Structure Tools software allows calculating the dielectric function in a Power Computer environment. EST has been developed within Gram 32 graphic software for EELS and UV spectroscopy and chromatography commercialized by Galactic Industries.
10.1017/S1431927600017815 / Microsc. Microanal. / Thickness measurement of Focused ion beam thinned silicon crystals using convergent beam electron diffraction and electron energy loss spectroscopy by Delille (1999)
10.1046/j.1365-2818.1998.00370.x / J. Microscopy / Quantitative analysis of valence electron energy-loss spectra of aluminium nitride by Dorneich (1998)
{'year': '1996', 'series-title': 'Electron Energy Loss Spectroscopy in the Electron Microscope', 'author': 'Egerton', 'key': '10.1016/j.micron.2006.01.008_bib6'} / Electron Energy Loss Spectroscopy in the Electron Microscope by Egerton (1996)
Galactic Industries, 1996. Gram/32 325 Main Street Salem, NH 03079, USA.
{'issue': 'Suppl. 2', 'key': '10.1016/j.micron.2006.01.008_bib8', 'first-page': 'CD828', 'article-title': 'Low Energy FIB TEM samples preparation', 'volume': '11', 'author': 'Giannuzzi', 'year': '2005', 'journal-title': 'Microsc. Microanal.'} / Microsc. Microanal. / Low Energy FIB TEM samples preparation by Giannuzzi (2005)
10.1109/22.668665 / IEEE Trans. Microwave Theory Technol. / A new contender for Si-based RF and microwave circuit application by Gressler (1998)
10.1103/PhysRevLett.29.1508 / Phys. Rev. Lett. / Photoemission valence band densities of states for Si, Ge and GaAs using synchrotron radiation by Grobman (1972)
10.1016/S0304-3991(96)00106-4 / Ultramicroscopy / Quantitative analysis of EFTEM elemental distribution images by Hofer (1997)
Jouan, S., Planche, R., Baudry, H., Ribot, P., Chroboczek, J.A., Dutartre, D., Gloria, D., Laurens, M., Llinares, P., Marty, M., Monroy, A., C. Morin, C., Pantel, R., Perrotin, A., De Pontcharra, J., Regolini, J.L., Vincent, G. and Chantre, A., 1999. A high speed low 1/f noise SiGe HBT technology using epitaxially-aligned polysilicon emitters. IEEE Trans. Electron Devices 46 (7), 1525–1531; M. Jurczak, T. Skotnicki, M. Paoli, B. Tormen, J. Martins, J.L. Regolini, D. Dutartre, P. Ribot, D. Lenoble, R. Pantel and S. Monfray., 2000. Silicon on Nothing (SON) an innovative Process for Advanced CMOS. IEEE Trans. Electron Devices 47 (11), 2179–2187. (10.1109/16.772506)
10.1016/j.micron.2004.11.001 / Micron / Advantages of a monochromator for the band gap measurement using electron energy loss spectroscopy by Kimoto (2005)
Moulder, J.F., Stickle, W.F., Sobol, P.E., Bomber, K.D., 1985. In: Chastain, J., King, R.L. (Eds.), Handbook of X-Ray Photoelectron Spectroscopy. Physical Electronics Inc., 6509 Flying Cloud Drive Eden Prairie, Minnesota 55344, USA.
10.1017/S1431927602000533 / Microsc. Microanal. / Insights into the electronic structure of ceramics through quantitative analysis of valence electron energy loss spectroscopy by Müllejans (2000)
10.1017/S1431927602107744 / Microsc. Microanal. / Inelastic electron scattering observation using energy filtered transmission electron microscopy for silicon-germanium nanostructures imaging by Pantel (2002)
10.1016/S0968-4328(03)00034-9 / Micron / Inelastic electron scattering observation using energy filtered transmission electron microscopy for silicon-germanium nanostructures imaging by Pantel (2003)
{'year': '1996', 'series-title': 'FIB workshop notes ESREF Conference Enschede Netherlands', 'author': 'Pantel', 'key': '10.1016/j.micron.2006.01.008_bib18'} / FIB workshop notes ESREF Conference Enschede Netherlands by Pantel (1996)
Stöger-Pollach, M., Franco, H., Schattschneider, P., Lazar, S., Schaffer, B., Grogger, W., Zandbergen, H.W., 2006. Cerenkov losses: A limit for bandgap determination and Kramer-Kronig analysis. Micron, this volume. (10.1016/j.micron.2006.01.001)
{'year': '1979', 'series-title': 'Handbook of X-Ray Photoelectron Spectroscopy', 'author': 'Wagner', 'key': '10.1016/j.micron.2006.01.008_bib20'} / Handbook of X-Ray Photoelectron Spectroscopy by Wagner (1979)
{'year': '1968', 'series-title': 'Soft X-Rays Spectra', 'author': 'Wiech', 'key': '10.1016/j.micron.2006.01.008_bib21'} / Soft X-Rays Spectra by Wiech (1968)
Zanchi, G., Schamm, S., 2000. Epsilon software allows calculating the dielectric function in a Macintosh environment. It was developed within EL/P software from Gatan.

Dates

Type	When
Created	19 years, 6 months ago (Feb. 20, 2006, 10:57 a.m.)
Deposited	4 years, 1 month ago (July 24, 2021, 12:35 a.m.)
Indexed	11 months, 2 weeks ago (Sept. 16, 2024, 10:46 a.m.)
Issued	18 years, 11 months ago (Oct. 1, 2006)
Published	18 years, 11 months ago (Oct. 1, 2006)
Published Print	18 years, 11 months ago (Oct. 1, 2006)

Funders 0

None

BibTeX

@article{Pantel_2006, title={Comparison of Si and Ge low-loss spectra to interpret the Ge contrast in EFTEM images of Si1−x Gex nanostructures}, volume={37}, ISSN={0968-4328}, url={http://dx.doi.org/10.1016/j.micron.2006.01.008}, DOI={10.1016/j.micron.2006.01.008}, number={7}, journal={Micron}, publisher={Elsevier BV}, author={Pantel, R. and Cheynet, M.C. and Tichelaar, F.D.}, year={2006}, month=oct, pages={657–665} }

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