DOI: 10.1016/j.micron.2004.03.004. The application of FIB milling for specimen preparation from crystalline germanium

The application of FIB milling for specimen preparation from crystalline germanium

10.1016/j.micron.2004.03.004

Crossref journal-article

Elsevier BV

Micron (78)

Bibliography

Rubanov, S., & Munroe, P. R. (2004). The application of FIB milling for specimen preparation from crystalline germanium. Micron, 35(7), 549â556.

Authors 2

S Rubanov (first)
P.R Munroe (additional)

References 19 Referenced 28

10.1063/1.93643 / Appl. Phys. Lett. / Characterisation of damage in ion implanted Ge by Appleton (1982)
FIB Workstation User's Guide, 1996.
10.1063/1.332385 / J. Appl. Phys. / Ion implantation damage and annealing in germanium by Holland (1983)
{'key': '10.1016/j.micron.2004.03.004_BIB4', 'first-page': '501', 'article-title': 'Cross-sectional transmission electron microscopy of precisely selected regions from semiconductor devices', 'volume': '100', 'author': 'Kirk', 'year': '1989', 'journal-title': 'Inst. Phys. Conf. Ser.'} / Inst. Phys. Conf. Ser. / Cross-sectional transmission electron microscopy of precisely selected regions from semiconductor devices by Kirk (1989)
10.1557/PROC-523-03 / Mater. Res. Soc. Symp. Proc. / Transmission electron microscopy of semiconductor based products by Mardinly (1998)
10.1557/PROC-199-271 / Mater. Res. Soc. Proc. / Cross-sectional TEM specimen preparation of semiconductor devices by focused ion beam etching by Park (1990)
Rubanov S. 2002, PhD Thesis, University of New South Wales.
10.1023/A:1010950201525 / J. Mater. Sci. Lett. / Investigation of the structure of damage layers in TEM samples prepared using a FIB by Rubanov (2001)
10.1016/S0167-577X(02)01202-8 / Mater. Lett. / The effect of the Au sputter coating films in minimising damage in FIB-produced TEM specimens by Rubanov (2003)
10.1111/j.0022-2720.2004.01327.x / J Micros / FIB-induced damage in dilicon by Rubanov (2004)
{'key': '10.1016/j.micron.2004.03.004_BIB11', 'article-title': 'Damage in III–V compounds during focused ion beam milling', 'author': 'Rubanov', 'year': '2004', 'journal-title': 'Ultramicroscopy'} / Ultramicroscopy / Damage in III–V compounds during focused ion beam milling by Rubanov (2004)
10.1116/1.588033 / J. Vaccine Sci. Technol. B / Focused ion-beam line profiles: a study of some factors affecting beam broadening by Templeton (1995)
10.1016/S0968-4328(99)00008-6 / Micron / Microfabrication techniques using focused ion beams and emergent applications by Vasile (1999)
{'key': '10.1016/j.micron.2004.03.004_BIB15', 'first-page': '667', 'volume': 'CP449', 'author': 'Venables', 'year': '1998', 'journal-title': 'AIP Conf. Proc.'} / AIP Conf. Proc. by Venables (1998)
10.1063/1.331636 / J. Appl. Phys. / The effects of self-ion bombardment (30–500 keV) on the surface topography of single-crystal germanium by Wilson (1982)
10.1063/1.102009 / Appl. Phys. Lett. / Radiation-induced formation of cavities in amorphous germanium by Wang (1989)
10.1557/PROC-199-205 / Mater. Res. Soc. Proc. / Fabrication of planar and cross-sectional TEM specimens using a focused ion beam by Young (1990)
{'key': '10.1016/j.micron.2004.03.004_BIB19', 'article-title': 'Formation of self-organized nanostructures on Ge during focused ion beam sputtering', 'volume': '13', 'author': 'Zhou', 'year': '2004', 'journal-title': 'Proc. Micros. Semiconducting Mater.'} / Proc. Micros. Semiconducting Mater. / Formation of self-organized nanostructures on Ge during focused ion beam sputtering by Zhou (2004)
Ziegler J.; 2000, see: www.SRIM.org.

Dates

Type	When
Created	21 years, 4 months ago (April 21, 2004, 8:59 a.m.)
Deposited	6 years, 6 months ago (Feb. 10, 2019, 7:27 a.m.)
Indexed	5 months ago (March 19, 2025, 11:35 a.m.)
Issued	20 years, 10 months ago (Oct. 1, 2004)
Published	20 years, 10 months ago (Oct. 1, 2004)
Published Print	20 years, 10 months ago (Oct. 1, 2004)

Funders 0

None

BibTeX

@article{Rubanov_2004, title={The application of FIB milling for specimen preparation from crystalline germanium}, volume={35}, ISSN={0968-4328}, url={http://dx.doi.org/10.1016/j.micron.2004.03.004}, DOI={10.1016/j.micron.2004.03.004}, number={7}, journal={Micron}, publisher={Elsevier BV}, author={Rubanov, S and Munroe, P.R}, year={2004}, month=oct, pages={549–556} }

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