DOI: 10.1016/j.mee.2006.01.133. Focused ion beam sculpted membranes for nanoscience tooling

Focused ion beam sculpted membranes for nanoscience tooling

10.1016/j.mee.2006.01.133

Crossref journal-article

Elsevier BV

Microelectronic Engineering (78)

Bibliography

Biance, A.-L., Gierak, J., Bourhis, Ã., Madouri, A., Lafosse, X., Patriarche, G., Oukhaled, G., Ulysse, C., Galas, J.-C., Chen, Y., & Auvray, L. (2006). Focused ion beam sculpted membranes for nanoscience tooling. Microelectronic Engineering, 83(4â9), 1474â1477.

Authors 11

A.-L. Biance (first)
J. Gierak (additional)
É. Bourhis (additional)
A. Madouri (additional)
X. Lafosse (additional)
G. Patriarche (additional)
G. Oukhaled (additional)
C. Ulysse (additional)
J.-C. Galas (additional)
Y. Chen (additional)
L. Auvray (additional)

References 6 Referenced 54

10.1038/35084037 / Nature by Li (2001)
10.1038/nmat941 / Nat. Mater. by Storm (2003)
10.1016/j.mee.2004.12.038 / Microelectron. Eng. by Gierak (2005)
10.1116/1.1622935 / J. Vac. Sci. Technol. B by Schenkel (2003)
Kistlaar et al., Micro Nano Eng. (2005).
10.1073/pnas.93.24.13770 / Proc. Natl. Acad. Sci. USA by Kasianowicz (1996)

Dates

Type	When
Created	19 years, 6 months ago (Feb. 21, 2006, 2:14 a.m.)
Deposited	6 years, 7 months ago (Jan. 18, 2019, 12:24 a.m.)
Indexed	1 month, 3 weeks ago (July 16, 2025, 8:41 a.m.)
Issued	19 years, 5 months ago (April 1, 2006)
Published	19 years, 5 months ago (April 1, 2006)
Published Print	19 years, 5 months ago (April 1, 2006)

Funders 0

None

BibTeX

@article{Biance_2006, title={Focused ion beam sculpted membranes for nanoscience tooling}, volume={83}, ISSN={0167-9317}, url={http://dx.doi.org/10.1016/j.mee.2006.01.133}, DOI={10.1016/j.mee.2006.01.133}, number={4–9}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Biance, A.-L. and Gierak, J. and Bourhis, É. and Madouri, A. and Lafosse, X. and Patriarche, G. and Oukhaled, G. and Ulysse, C. and Galas, J.-C. and Chen, Y. and Auvray, L.}, year={2006}, month=apr, pages={1474–1477} }

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