DOI: 10.1016/j.ijmachtools.2008.06.008. XPS analysis of the groove wearing marks on flank face of diamond tool in nanometric cutting of silicon wafer

XPS analysis of the groove wearing marks on flank face of diamond tool in nanometric cutting of silicon wafer

10.1016/j.ijmachtools.2008.06.008

Crossref journal-article

Elsevier BV

International Journal of Machine Tools and Manufacture (78)

Bibliography

Zong, W. J., Sun, T., Li, D., Cheng, K., & Liang, Y. C. (2008). XPS analysis of the groove wearing marks on flank face of diamond tool in nanometric cutting of silicon wafer. International Journal of Machine Tools and Manufacture, 48(15), 1678â1687.

Authors 5

W.J. Zong (first)
T. Sun (additional)
D. Li (additional)
K. Cheng (additional)
Y.C. Liang (additional)

References 33 Referenced 89

10.1023/A:1006694310171 / Journal of Materials Science Letters / Ductile and brittle modes in single-point-diamond-turning of silicon probed by Raman scattering by Pizani (1999)
10.1007/s001700070004 / International Journal of Advanced Manufacturing Technology / Effect of crystalline orientation in the ductile-regime machining of silicon by Hung (2000)
10.1016/S0020-7403(01)00024-8 / International Journal of Mechanical Sciences / Towards a deeper understanding of plastic deformation in mono-crystalline silicon by Zhang (2001)
10.1016/S0921-5093(00)01031-5 / Materials Science and Engineering / On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications by Yan (2001)
10.1016/0301-679X(95)00019-Z / Tribology International / Energy scaling transitions in machining of silicon by diamond by Puttick (1995)
10.1016/S0924-0136(98)00090-9 / Journal of Materials Processing Technology / Effect of ultraprecision grinding on the microstructural change in silicon monocrystals by Zarudi (1998)
10.1016/S0043-1648(98)00378-0 / Wear / An understanding of the chemical effect on the nano-wear deformation in mono-crystalline silicon components by Zhang (1999)
10.1016/S0924-0136(01)01218-3 / Journal of Materials Processing Technology / Ductile regime turning at large tool feed by Yan (2002)
10.1016/S0022-3093(00)00236-2 / Journal of Non-Crystalline Solids / Surface amorphization in diamond turning of silicon crystal investigated by transmission electron microscopy by Jasinevicius (2000)
10.1016/S0141-6359(00)00069-6 / Precision Engineering / An empirical survey on the influence of machining parameters on tool wear in diamond turning of large single-crystal silicon optics by Born (2001)
10.1016/S0924-0136(02)00124-3 / Journal of Materials Processing Technology / Ductile behaviour in single-point diamond-turning of single-crystal silicon by Chao (2002)
10.1007/s00170-003-1593-2 / International Journal of Advanced Manufacturing Technology / An experimental study of edge radius effect on cutting single crystal silicon by Fang (2003)
10.1016/S0043-1648(03)00076-0 / Wear / Some observations on the wear of diamond tools in ultra-precision cutting of single-crystal silicon by Yan (2003)
10.1016/j.wear.2004.03.012 / Wear / Effect of crystallographic orientation on wear of diamond tools for nano-scale ductile cutting of silicon by Uddin (2004)
10.1016/j.wear.2004.12.020 / Wear / Tool wear characteristics and their effects on nanoscale ductile mode cutting of silicon wafer by Li (2005)
{'key': '10.1016/j.ijmachtools.2008.06.008_bib16', 'article-title': 'Annealing treatment of amorphous silicon generated by single point diamond turning', 'author': 'Jasinevicius', 'year': '2006', 'journal-title': 'International Journal of Advanced Manufacturing Technology'} / International Journal of Advanced Manufacturing Technology / Annealing treatment of amorphous silicon generated by single point diamond turning by Jasinevicius (2006)
10.1007/s00170-005-0245-0 / International Journal of Advanced Manufacturing Technology / The upper bound of tool edge radius for nanoscale ductile mode cutting of silicon wafer by Arefin (2007)
10.1007/s00170-005-0364-7 / International Journal of Advanced Manufacturing Technology / A study of the effect of tool cutting edge radius on ductile cutting of silicon wafers by Liu (2007)
10.1016/j.wear.2006.05.022 / Wear / 3D characterisation of tool wear whilst diamond turning silicon by Cardenas (2007)
10.1115/1.2673567 / Journal of Manufacturing Science and Engineering / Study of the mechanism of groove wear of the diamond tool in nanoscale ductile mode cutting of monocrystalline silicon by Cai (2007)
10.1016/S0020-7683(03)00119-7 / International Journal of Solids and Structures / A mechanics prediction of the behaviour of mono-crystalline silicon under nano-indentation by Vodenitcharova (2003)
10.1088/0957-4484/15/5/049 / Nanotechnology / Atomistic simulations of structural transformation of silicon surfaces under nanoindentation by Sanz-Navarro (2004)
10.1016/0254-0584(95)01673-I / Materials Chemistry and Physics / Carbon-mediated effects in silicon and in silicon-related materials by Skorupa (1996)
10.1016/S0921-5093(99)00077-5 / Materials Science and Engineering / Fracture anisotropy in silicon single crystal by Ebrahimi (1999)
10.1016/j.diamond.2005.10.066 / Diamond and Related Materials / Contact accuracy and orientations affecting tool sharpness of diamond cutting tools by mechanical lapping by Zong (2006)
10.1016/j.diamond.2005.01.020 / Diamond and Related Materials / Characterisation of a-C:H and oxygen-containing Si:C:H films by Raman spectroscopy and XPS by Veres (2005)
10.1016/S0368-2048(00)00180-8 / Journal of Electron Spectroscopy and Related Phenomena / Structural determination of sintered Si3N4/SiC nanocomposite using the XPS differential charge effect by Ténégal (2000)
10.1016/j.susc.2005.03.010 / Surface Science / XPS and STM study of SiC synthesized by acetylene and disilane reaction with the Si(100)2×1 surface by Santoni (2005)
P. Cristian, Kinetics of diamond–silicon reaction under high pressure–high temperature conditions, Ph.D. Dissertation, Texas Christian University, 2004.
10.1016/S0301-679X(98)00064-4 / Tribology International / Atomic scale deformation in silicon monocrystals induced by two-body and three body contact sliding by Zhang (1998)
10.1016/S0925-9635(97)00269-0 / Diamond and Related Materials / The re-arrangement of broken bonds in damaged diamond: graphitization versus annealing back to diamond by Reznik (1998)
10.1016/j.ijmachtools.2004.11.014 / International Journal of Machine Tools and Manufacture / The material removal mechanism in mechanical lapping of diamond cutting tools by Zong (2005)
10.1016/S0043-1648(03)00178-9 / Wear / Modeling and simulation of the tool wear in nanometric cutting by Cheng (2003)

Dates

Type	When
Created	17 years, 2 months ago (June 23, 2008, 12:22 p.m.)
Deposited	6 years, 7 months ago (Dec. 27, 2018, 1:23 p.m.)
Indexed	4 weeks, 2 days ago (July 27, 2025, 3:15 a.m.)
Issued	16 years, 8 months ago (Dec. 1, 2008)
Published	16 years, 8 months ago (Dec. 1, 2008)
Published Print	16 years, 8 months ago (Dec. 1, 2008)

Funders 0

None

BibTeX

@article{Zong_2008, title={XPS analysis of the groove wearing marks on flank face of diamond tool in nanometric cutting of silicon wafer}, volume={48}, ISSN={0890-6955}, url={http://dx.doi.org/10.1016/j.ijmachtools.2008.06.008}, DOI={10.1016/j.ijmachtools.2008.06.008}, number={15}, journal={International Journal of Machine Tools and Manufacture}, publisher={Elsevier BV}, author={Zong, W.J. and Sun, T. and Li, D. and Cheng, K. and Liang, Y.C.}, year={2008}, month=dec, pages={1678–1687} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        27
      ]
    ],
    "date-time": "2025-07-27T07:15:24Z",
    "timestamp": 1753600524115
  },
  "reference-count": 33,
  "publisher": "Elsevier BV",
  "issue": "15",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2008,
            12,
            1
          ]
        ],
        "date-time": "2008-12-01T00:00:00Z",
        "timestamp": 1228089600000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2008,
        12
      ]
    ]
  },
  "DOI": "10.1016/j.ijmachtools.2008.06.008",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2008,
        6,
        23
      ]
    ],
    "date-time": "2008-06-23T16:22:34Z",
    "timestamp": 1214238154000
  },
  "page": "1678-1687",
  "source": "Crossref",
  "is-referenced-by-count": 89,
  "title": "XPS analysis of the groove wearing marks on flank face of diamond tool in nanometric cutting of silicon wafer",
  "prefix": "10.1016",
  "volume": "48",
  "author": [
    {
      "given": "W.J.",
      "family": "Zong",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "T.",
      "family": "Sun",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "D.",
      "family": "Li",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "K.",
      "family": "Cheng",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Y.C.",
      "family": "Liang",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib1",
      "doi-asserted-by": "crossref",
      "first-page": "1185",
      "DOI": "10.1023/A:1006694310171",
      "article-title": "Ductile and brittle modes in single-point-diamond-turning of silicon probed by Raman scattering",
      "volume": "18",
      "author": "Pizani",
      "year": "1999",
      "journal-title": "Journal of Materials Science Letters"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib2",
      "doi-asserted-by": "crossref",
      "first-page": "871",
      "DOI": "10.1007/s001700070004",
      "article-title": "Effect of crystalline orientation in the ductile-regime machining of silicon",
      "volume": "16",
      "author": "Hung",
      "year": "2000",
      "journal-title": "International Journal of Advanced Manufacturing Technology"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib3",
      "doi-asserted-by": "crossref",
      "first-page": "1985",
      "DOI": "10.1016/S0020-7403(01)00024-8",
      "article-title": "Towards a deeper understanding of plastic deformation in mono-crystalline silicon",
      "volume": "43",
      "author": "Zhang",
      "year": "2001",
      "journal-title": "International Journal of Mechanical Sciences"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib4",
      "doi-asserted-by": "crossref",
      "first-page": "230",
      "DOI": "10.1016/S0921-5093(00)01031-5",
      "article-title": "On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications",
      "volume": "A297",
      "author": "Yan",
      "year": "2001",
      "journal-title": "Materials Science and Engineering"
    },
    {
      "issue": "6",
      "key": "10.1016/j.ijmachtools.2008.06.008_bib5",
      "doi-asserted-by": "crossref",
      "first-page": "349",
      "DOI": "10.1016/0301-679X(95)00019-Z",
      "article-title": "Energy scaling transitions in machining of silicon by diamond",
      "volume": "28",
      "author": "Puttick",
      "year": "1995",
      "journal-title": "Tribology International"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib6",
      "doi-asserted-by": "crossref",
      "first-page": "149",
      "DOI": "10.1016/S0924-0136(98)00090-9",
      "article-title": "Effect of ultraprecision grinding on the microstructural change in silicon monocrystals",
      "volume": "84",
      "author": "Zarudi",
      "year": "1998",
      "journal-title": "Journal of Materials Processing Technology"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib7",
      "doi-asserted-by": "crossref",
      "first-page": "669",
      "DOI": "10.1016/S0043-1648(98)00378-0",
      "article-title": "An understanding of the chemical effect on the nano-wear deformation in mono-crystalline silicon components",
      "volume": "225\u2013229",
      "author": "Zhang",
      "year": "1999",
      "journal-title": "Wear"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib8",
      "doi-asserted-by": "crossref",
      "first-page": "363",
      "DOI": "10.1016/S0924-0136(01)01218-3",
      "article-title": "Ductile regime turning at large tool feed",
      "volume": "121",
      "author": "Yan",
      "year": "2002",
      "journal-title": "Journal of Materials Processing Technology"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib9",
      "doi-asserted-by": "crossref",
      "first-page": "174",
      "DOI": "10.1016/S0022-3093(00)00236-2",
      "article-title": "Surface amorphization in diamond turning of silicon crystal investigated by transmission electron microscopy",
      "volume": "272",
      "author": "Jasinevicius",
      "year": "2000",
      "journal-title": "Journal of Non-Crystalline Solids"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib10",
      "doi-asserted-by": "crossref",
      "first-page": "247",
      "DOI": "10.1016/S0141-6359(00)00069-6",
      "article-title": "An empirical survey on the influence of machining parameters on tool wear in diamond turning of large single-crystal silicon optics",
      "volume": "25",
      "author": "Born",
      "year": "2001",
      "journal-title": "Precision Engineering"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib11",
      "doi-asserted-by": "crossref",
      "first-page": "187",
      "DOI": "10.1016/S0924-0136(02)00124-3",
      "article-title": "Ductile behaviour in single-point diamond-turning of single-crystal silicon",
      "volume": "127",
      "author": "Chao",
      "year": "2002",
      "journal-title": "Journal of Materials Processing Technology"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib12",
      "doi-asserted-by": "crossref",
      "first-page": "703",
      "DOI": "10.1007/s00170-003-1593-2",
      "article-title": "An experimental study of edge radius effect on cutting single crystal silicon",
      "volume": "22",
      "author": "Fang",
      "year": "2003",
      "journal-title": "International Journal of Advanced Manufacturing Technology"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib13",
      "doi-asserted-by": "crossref",
      "first-page": "1380",
      "DOI": "10.1016/S0043-1648(03)00076-0",
      "article-title": "Some observations on the wear of diamond tools in ultra-precision cutting of single-crystal silicon",
      "volume": "255",
      "author": "Yan",
      "year": "2003",
      "journal-title": "Wear"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib14",
      "doi-asserted-by": "crossref",
      "first-page": "751",
      "DOI": "10.1016/j.wear.2004.03.012",
      "article-title": "Effect of crystallographic orientation on wear of diamond tools for nano-scale ductile cutting of silicon",
      "volume": "257",
      "author": "Uddin",
      "year": "2004",
      "journal-title": "Wear"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib15",
      "doi-asserted-by": "crossref",
      "first-page": "1207",
      "DOI": "10.1016/j.wear.2004.12.020",
      "article-title": "Tool wear characteristics and their effects on nanoscale ductile mode cutting of silicon wafer",
      "author": "Li",
      "year": "2005",
      "journal-title": "Wear"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib16",
      "article-title": "Annealing treatment of amorphous silicon generated by single point diamond turning",
      "author": "Jasinevicius",
      "year": "2006",
      "journal-title": "International Journal of Advanced Manufacturing Technology"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib17",
      "doi-asserted-by": "crossref",
      "first-page": "655",
      "DOI": "10.1007/s00170-005-0245-0",
      "article-title": "The upper bound of tool edge radius for nanoscale ductile mode cutting of silicon wafer",
      "volume": "31",
      "author": "Arefin",
      "year": "2007",
      "journal-title": "International Journal of Advanced Manufacturing Technology"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib18",
      "doi-asserted-by": "crossref",
      "first-page": "631",
      "DOI": "10.1007/s00170-005-0364-7",
      "article-title": "A study of the effect of tool cutting edge radius on ductile cutting of silicon wafers",
      "volume": "32",
      "author": "Liu",
      "year": "2007",
      "journal-title": "International Journal of Advanced Manufacturing Technology"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib19",
      "doi-asserted-by": "crossref",
      "first-page": "340",
      "DOI": "10.1016/j.wear.2006.05.022",
      "article-title": "3D characterisation of tool wear whilst diamond turning silicon",
      "volume": "262",
      "author": "Cardenas",
      "year": "2007",
      "journal-title": "Wear"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib20",
      "doi-asserted-by": "crossref",
      "first-page": "281",
      "DOI": "10.1115/1.2673567",
      "article-title": "Study of the mechanism of groove wear of the diamond tool in nanoscale ductile mode cutting of monocrystalline silicon",
      "volume": "129",
      "author": "Cai",
      "year": "2007",
      "journal-title": "Journal of Manufacturing Science and Engineering"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib21",
      "doi-asserted-by": "crossref",
      "first-page": "2989",
      "DOI": "10.1016/S0020-7683(03)00119-7",
      "article-title": "A mechanics prediction of the behaviour of mono-crystalline silicon under nano-indentation",
      "volume": "40",
      "author": "Vodenitcharova",
      "year": "2003",
      "journal-title": "International Journal of Solids and Structures"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib22",
      "doi-asserted-by": "crossref",
      "first-page": "692",
      "DOI": "10.1088/0957-4484/15/5/049",
      "article-title": "Atomistic simulations of structural transformation of silicon surfaces under nanoindentation",
      "volume": "15",
      "author": "Sanz-Navarro",
      "year": "2004",
      "journal-title": "Nanotechnology"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib23",
      "doi-asserted-by": "crossref",
      "first-page": "101",
      "DOI": "10.1016/0254-0584(95)01673-I",
      "article-title": "Carbon-mediated effects in silicon and in silicon-related materials",
      "volume": "44",
      "author": "Skorupa",
      "year": "1996",
      "journal-title": "Materials Chemistry and Physics"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib24",
      "doi-asserted-by": "crossref",
      "first-page": "116",
      "DOI": "10.1016/S0921-5093(99)00077-5",
      "article-title": "Fracture anisotropy in silicon single crystal",
      "volume": "A268",
      "author": "Ebrahimi",
      "year": "1999",
      "journal-title": "Materials Science and Engineering"
    },
    {
      "issue": "9",
      "key": "10.1016/j.ijmachtools.2008.06.008_bib25",
      "doi-asserted-by": "crossref",
      "first-page": "1424",
      "DOI": "10.1016/j.diamond.2005.10.066",
      "article-title": "Contact accuracy and orientations affecting tool sharpness of diamond cutting tools by mechanical lapping",
      "volume": "15",
      "author": "Zong",
      "year": "2006",
      "journal-title": "Diamond and Related Materials"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib26",
      "doi-asserted-by": "crossref",
      "first-page": "1051",
      "DOI": "10.1016/j.diamond.2005.01.020",
      "article-title": "Characterisation of a-C:H and oxygen-containing Si:C:H films by Raman spectroscopy and XPS",
      "volume": "14",
      "author": "Veres",
      "year": "2005",
      "journal-title": "Diamond and Related Materials"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib27",
      "doi-asserted-by": "crossref",
      "first-page": "241",
      "DOI": "10.1016/S0368-2048(00)00180-8",
      "article-title": "Structural determination of sintered Si3N4/SiC nanocomposite using the XPS differential charge effect",
      "volume": "109",
      "author": "T\u00e9n\u00e9gal",
      "year": "2000",
      "journal-title": "Journal of Electron Spectroscopy and Related Phenomena"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib28",
      "doi-asserted-by": "crossref",
      "first-page": "125",
      "DOI": "10.1016/j.susc.2005.03.010",
      "article-title": "XPS and STM study of SiC synthesized by acetylene and disilane reaction with the Si(100)2\u00d71 surface",
      "volume": "582",
      "author": "Santoni",
      "year": "2005",
      "journal-title": "Surface Science"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib29",
      "unstructured": "P. Cristian, Kinetics of diamond\u2013silicon reaction under high pressure\u2013high temperature conditions, Ph.D. Dissertation, Texas Christian University, 2004."
    },
    {
      "issue": "8",
      "key": "10.1016/j.ijmachtools.2008.06.008_bib30",
      "doi-asserted-by": "crossref",
      "first-page": "425",
      "DOI": "10.1016/S0301-679X(98)00064-4",
      "article-title": "Atomic scale deformation in silicon monocrystals induced by two-body and three body contact sliding",
      "volume": "31",
      "author": "Zhang",
      "year": "1998",
      "journal-title": "Tribology International"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib31",
      "doi-asserted-by": "crossref",
      "first-page": "317",
      "DOI": "10.1016/S0925-9635(97)00269-0",
      "article-title": "The re-arrangement of broken bonds in damaged diamond: graphitization versus annealing back to diamond",
      "volume": "7",
      "author": "Reznik",
      "year": "1998",
      "journal-title": "Diamond and Related Materials"
    },
    {
      "issue": "7\u20138",
      "key": "10.1016/j.ijmachtools.2008.06.008_bib32",
      "doi-asserted-by": "crossref",
      "first-page": "783",
      "DOI": "10.1016/j.ijmachtools.2004.11.014",
      "article-title": "The material removal mechanism in mechanical lapping of diamond cutting tools",
      "volume": "45",
      "author": "Zong",
      "year": "2005",
      "journal-title": "International Journal of Machine Tools and Manufacture"
    },
    {
      "key": "10.1016/j.ijmachtools.2008.06.008_bib33",
      "doi-asserted-by": "crossref",
      "first-page": "1427",
      "DOI": "10.1016/S0043-1648(03)00178-9",
      "article-title": "Modeling and simulation of the tool wear in nanometric cutting",
      "volume": "255",
      "author": "Cheng",
      "year": "2003",
      "journal-title": "Wear"
    }
  ],
  "container-title": "International Journal of Machine Tools and Manufacture",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:S089069550800120X?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:S089069550800120X?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2018,
        12,
        27
      ]
    ],
    "date-time": "2018-12-27T18:23:00Z",
    "timestamp": 1545934980000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/S089069550800120X"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2008,
        12
      ]
    ]
  },
  "references-count": 33,
  "journal-issue": {
    "issue": "15",
    "published-print": {
      "date-parts": [
        [
          2008,
          12
        ]
      ]
    }
  },
  "alternative-id": [
    "S089069550800120X"
  ],
  "URL": "http://dx.doi.org/10.1016/j.ijmachtools.2008.06.008",
  "relation": {},
  "ISSN": [
    "0890-6955"
  ],
  "subject": [],
  "container-title-short": "International Journal of Machine Tools and Manufacture",
  "published": {
    "date-parts": [
      [
        2008,
        12
      ]
    ]
  }
}