DOI: 10.1016/j.ijmachtools.2006.05.006. Crack initiation in relation to the tool edge radius and cutting conditions in nanoscale cutting of silicon

Crack initiation in relation to the tool edge radius and cutting conditions in nanoscale cutting of silicon

10.1016/j.ijmachtools.2006.05.006

Crossref journal-article

Elsevier BV

International Journal of Machine Tools and Manufacture (78)

Bibliography

Cai, M. B., Li, X. P., Rahman, M., & Tay, A. A. O. (2007). Crack initiation in relation to the tool edge radius and cutting conditions in nanoscale cutting of silicon. International Journal of Machine Tools and Manufacture, 47(3â4), 562â569.

Authors 4

M.B. Cai (first)
X.P. Li (additional)
M. Rahman (additional)
A.A.O. Tay (additional)

References 26 Referenced 54

10.1111/j.1151-2916.1990.tb05142.x / Journal of American Ceramic Society / Ductile-regime machining of germanium and silicon by Blake (1990)
10.1016/0301-679X(95)00019-Z / Tribology International / Energy scaling transitions in machining of silicon by diamond by Puttick (1995)
10.1016/S0007-8506(07)62782-6 / Annals of the CIRP / Diamond cutting of silicon with nanometric finish by Fang (1998)
10.1016/S0924-0136(97)00210-0 / Journal of Materials Processing Technology / Diamond turning of silicon substrates in ductile-regime by Leung (1998)
10.1016/S0921-5093(00)01031-5 / Material Science and Engineering A / On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications by Yan (2001)
{'key': '10.1016/j.ijmachtools.2006.05.006_bib6', 'first-page': '251', 'article-title': 'Modeling of ductile cutting of tungsten carbide', 'volume': 'XXIX', 'author': 'Liu', 'year': '2001', 'journal-title': 'Transactions of NAMRI/SME'} / Transactions of NAMRI/SME / Modeling of ductile cutting of tungsten carbide by Liu (2001)
10.1557/PROC-140-119 / Material Research Society Symposium / Interface tribology by nonequilibrium molecular dynamics fabrication technology by Hoover (1989)
J. Belak, I.F. Stowers, Molecular dynamics model of the orthogonal cutting process, Proceedings American Society of Precision Engineering, Rochester, New York, 1990, pp. 76–79.
10.1016/S0007-8506(07)60769-0 / Annals of the CIRP / Brittle/ductile transition phenomena observed in computer simulations of machining defect-free monocrystalline silicon by Inamura (1997)
10.1016/S0007-8506(07)63136-9 / Annals of the CIRP / Crack iniation in machining monocrystalline silicon by Inamura (1999)
10.1016/S0007-8506(07)62051-4 / Annals of the CIRP / An atomistic analysis of nanometric chip removal as affected by tool–work interaction in diamond turning by Ikawa (1991)
{'key': '10.1016/j.ijmachtools.2006.05.006_bib12', 'first-page': '283', 'article-title': 'Molecular dynamics analysis of nanometric cutting process', 'volume': '29', 'author': 'Shimada', 'year': '1995', 'journal-title': 'International Journal of the Japanese Society of Precision Engineering'} / International Journal of the Japanese Society of Precision Engineering / Molecular dynamics analysis of nanometric cutting process by Shimada (1995)
10.1016/S0007-8506(07)62162-3 / Annals of the CIRP / Structure of micromachined surface simulated by molecular dynamics analysis by Shimada (1994)
10.1016/S0007-8506(07)62224-0 / Annals of the CIRP / Molecular dynamics simulation for abrasive process by Rentch (1994)
10.1016/S0043-1648(98)00229-4 / Wear / Effect of tool geometry in nanometric cutting: a molecular dynamics simulation approach by Komanduri (1998)
10.1080/13642810108208555 / Philosophical Magazine B / Molecular dynamics simulation of the nanometric cutting of silicon by Komanduri (2001)
10.1016/S0301-679X(98)00064-4 / Tribology International / Atomic scale deformation in silicon monocrystals induced by two-body and three-body contact sliding by Zhang (1998)
10.1299/jsmea.42.546 / JSME International Journal / On the mechanics and physics in the nano-indentation of silicon monocrystals by Zhang (1999)
10.1088/0957-4484/11/3/302 / Nanotechnology / Three-dimensional molecular dynamics analysis of processing using a pin tool on the atomic scale by Fang (2000)
10.1088/0957-4484/14/3/307 / Nanotechnology / Molecular dynamics simulation of nanoscale machining of copper by Ye (2003)
{'key': '10.1016/j.ijmachtools.2006.05.006_bib21', 'series-title': 'Computer Simulation of Liquid', 'author': 'Allen', 'year': '1986'} / Computer Simulation of Liquid by Allen (1986)
10.1103/PhysRevB.39.5566 / Physical Review B / Modeling solid-state chemistry: interatomic potentials for multicomponent systems by Tersoff (1989)
10.1088/0957-4484/11/3/307 / Nanotechnology / Molecular dynamics simulation of phase transformation in silicon monocrystals due to nano-indentation by Cheong (2000)
{'key': '10.1016/j.ijmachtools.2006.05.006_bib24', 'series-title': 'Molecular Dynamics Simulation: Elementary Methods', 'author': 'Haile', 'year': '1992'} / Molecular Dynamics Simulation: Elementary Methods by Haile (1992)
10.1103/PhysRevB.65.014107 / Physical Review B / Representation of mechanical loads in molecular dynamics simulation by Fabrizio (2001)
10.1504/IJMTM.2005.007697 / International Journal of Manufacturing Technology and Management / Molecular dynamics simulation of the effect of tool edge radius on cutting forces and cutting region in nanoscale ductile cutting of silicon by Cai (2005)

Dates

Type	When
Created	19 years, 1 month ago (July 25, 2006, 10:25 p.m.)
Deposited	6 years, 7 months ago (Jan. 14, 2019, 11:26 a.m.)
Indexed	2 months, 2 weeks ago (June 14, 2025, 11:10 a.m.)
Issued	18 years, 5 months ago (March 1, 2007)
Published	18 years, 5 months ago (March 1, 2007)
Published Print	18 years, 5 months ago (March 1, 2007)

Funders 0

None

BibTeX

@article{Cai_2007, title={Crack initiation in relation to the tool edge radius and cutting conditions in nanoscale cutting of silicon}, volume={47}, ISSN={0890-6955}, url={http://dx.doi.org/10.1016/j.ijmachtools.2006.05.006}, DOI={10.1016/j.ijmachtools.2006.05.006}, number={3–4}, journal={International Journal of Machine Tools and Manufacture}, publisher={Elsevier BV}, author={Cai, M.B. and Li, X.P. and Rahman, M. and Tay, A.A.O.}, year={2007}, month=mar, pages={562–569} }

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