DOI: 10.1016/j.ijmachtools.2006.02.016. Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation

Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation

10.1016/j.ijmachtools.2006.02.016

Crossref journal-article

Elsevier BV

International Journal of Machine Tools and Manufacture (78)

Bibliography

Cai, M. B., Li, X. P., & Rahman, M. (2007). Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation. International Journal of Machine Tools and Manufacture, 47(1), 75â80.

Authors 3

M.B. Cai (first)
X.P. Li (additional)
M. Rahman (additional)

References 26 Referenced 140

10.1111/j.1151-2916.1990.tb05142.x / Journal of American Ceramic Society / Ductile-regime machining of germanium and silicon by Blake (1990)
10.1016/0301-679X(95)00019-Z / Tribology International / Energy scaling transitions in machining of silicon by diamond by Puttick (1995)
10.1016/S0007-8506(07)62782-6 / Annals of the CIRP / Diamond cutting of silicon with nanometric finish by Fang (1998)
10.1016/S0924-0136(97)00210-0 / Journal of Materials Processing Technology / Diamond turning of silicon substrates in ductile-regime by Leung (1998)
10.1016/S0921-5093(00)01031-5 / Material Science and Engineering A / On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications by Yan (2001)
{'key': '10.1016/j.ijmachtools.2006.02.016_bib6', 'first-page': '251', 'article-title': 'Modeling of ductile cutting of tungsten carbide', 'volume': 'XXIX', 'author': 'Liu', 'year': '2001', 'journal-title': 'Transactions of NAMRI/SME'} / Transactions of NAMRI/SME / Modeling of ductile cutting of tungsten carbide by Liu (2001)
10.1557/PROC-140-119 / Material Research Society Symposium / Interface tribology by nonequilibrium molecular dynamics fabrication technology by Hoover (1989)
{'key': '10.1016/j.ijmachtools.2006.02.016_bib8', 'series-title': 'Proceedings American Society of Precision Engineering', 'first-page': '76', 'article-title': 'Molecular dynamics model of the orthogonal cutting process', 'author': 'Belak', 'year': '1990'} / Proceedings American Society of Precision Engineering / Molecular dynamics model of the orthogonal cutting process by Belak (1990)
10.1016/S0007-8506(07)60769-0 / Annals of the CIRP / Brittle/ductile transition phenomena observed in computer simulations of machining defect-free monocrystalline silicon by Inamura (1997)
10.1016/S0007-8506(07)63136-9 / Annals of the CIRP / Crack initiation in machining monocrystalline silicon by Inamura (1999)
10.1016/S0007-8506(07)62051-4 / Annals of the CIRP / An atomistic analysis of nanometric chip removal as affected by tool–work interaction in diamond turning by Ikawa (1991)
{'key': '10.1016/j.ijmachtools.2006.02.016_bib12', 'first-page': '283', 'article-title': 'Molecular dynamics analysis of nanometric cutting process', 'volume': '29', 'author': 'Shimada', 'year': '1995', 'journal-title': 'International Journal of the Japan. Society of Precision Engineering'} / International Journal of the Japan. Society of Precision Engineering / Molecular dynamics analysis of nanometric cutting process by Shimada (1995)
10.1016/S0007-8506(07)62162-3 / Annals of the CIRP / Structure of micromachined surface simulated by molecular dynamics analysis by Shimada (1994)
10.1016/S0007-8506(07)62224-0 / Annals of the CIRP / Molecular dynamics simulation for abrasive process by Rentch (1994)
10.1016/S0043-1648(98)00229-4 / Wear / Effect of tool geometry in nanometric cutting: a molecular dynamics simulation approach by Komanduri (1998)
10.1080/13642810108208555 / Philosophical Magazine B / Molecular dynamics simulation of the nanometric cutting of silicon by Komanduri (2001)
10.1016/S0301-679X(98)00064-4 / Tribology International / Atomic scale deformation in silicon monocrystals induced by two-body and three-body contact sliding by Zhang (1998)
10.1299/jsmea.42.546 / JSME International Journal / On the mechanics and physics in the nano-indentation of silicon monocrystals by Zhang (1999)
10.1088/0957-4484/11/3/302 / Nanotechnology / Three-dimensional molecular dynamics analysis of processing using a pin tool on the atomic scale by Fang (2000)
10.1088/0957-4484/14/3/307 / Nanotechnology / Molecular dynamics simulation of nanoscale machining of copper by Ye (2003)
{'key': '10.1016/j.ijmachtools.2006.02.016_bib21', 'series-title': 'Computer Simulation of Liquid', 'author': 'Allen', 'year': '1986'} / Computer Simulation of Liquid by Allen (1986)
10.1103/PhysRevB.39.5566 / Physical Review B / Modeling solid-state chemistry: interatomic potentials for multicomponent systems by Tersoff (1989)
10.1088/0957-4484/11/3/307 / Nanotechnology / Molecular dynamics simulation of phase transformation in silicon monocrystals due to nano-indentation by Cheong (2000)
{'key': '10.1016/j.ijmachtools.2006.02.016_bib24', 'series-title': 'Molecular Dynamics Simulation: Elementary Methods', 'author': 'Haile', 'year': '1992'} / Molecular Dynamics Simulation: Elementary Methods by Haile (1992)
10.1103/PhysRevB.65.014107 / Physical Review B / Representation of mechanical loads in molecular dynamics simulation by Fabrizio (2001)
{'key': '10.1016/j.ijmachtools.2006.02.016_bib26', 'first-page': '113', 'article-title': 'Machined surface and subsurface in relation to cutting edge radius in nanoscale ductile cutting of silicon', 'volume': '33', 'author': 'Arefin', 'year': '2005', 'journal-title': 'Transactions of NAMRI/SME'} / Transactions of NAMRI/SME / Machined surface and subsurface in relation to cutting edge radius in nanoscale ductile cutting of silicon by Arefin (2005)

Dates

Type	When
Created	19 years, 4 months ago (April 18, 2006, 11:19 a.m.)
Deposited	6 years, 7 months ago (Jan. 16, 2019, 6:57 p.m.)
Indexed	6 hours, 2 minutes ago (Sept. 1, 2025, 6:32 a.m.)
Issued	18 years, 8 months ago (Jan. 1, 2007)
Published	18 years, 8 months ago (Jan. 1, 2007)
Published Print	18 years, 8 months ago (Jan. 1, 2007)

Funders 0

None

BibTeX

@article{Cai_2007, title={Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation}, volume={47}, ISSN={0890-6955}, url={http://dx.doi.org/10.1016/j.ijmachtools.2006.02.016}, DOI={10.1016/j.ijmachtools.2006.02.016}, number={1}, journal={International Journal of Machine Tools and Manufacture}, publisher={Elsevier BV}, author={Cai, M.B. and Li, X.P. and Rahman, M.}, year={2007}, month=jan, pages={75–80} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        9,
        1
      ]
    ],
    "date-time": "2025-09-01T10:32:58Z",
    "timestamp": 1756722778104
  },
  "reference-count": 26,
  "publisher": "Elsevier BV",
  "issue": "1",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2007,
            1,
            1
          ]
        ],
        "date-time": "2007-01-01T00:00:00Z",
        "timestamp": 1167609600000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2007,
        1
      ]
    ]
  },
  "DOI": "10.1016/j.ijmachtools.2006.02.016",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2006,
        4,
        18
      ]
    ],
    "date-time": "2006-04-18T15:19:35Z",
    "timestamp": 1145373575000
  },
  "page": "75-80",
  "source": "Crossref",
  "is-referenced-by-count": 140,
  "title": "Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation",
  "prefix": "10.1016",
  "volume": "47",
  "author": [
    {
      "given": "M.B.",
      "family": "Cai",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "X.P.",
      "family": "Li",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "M.",
      "family": "Rahman",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "issue": "4",
      "key": "10.1016/j.ijmachtools.2006.02.016_bib1",
      "doi-asserted-by": "crossref",
      "first-page": "949",
      "DOI": "10.1111/j.1151-2916.1990.tb05142.x",
      "article-title": "Ductile-regime machining of germanium and silicon",
      "volume": "73",
      "author": "Blake",
      "year": "1990",
      "journal-title": "Journal of American Ceramic Society"
    },
    {
      "issue": "6",
      "key": "10.1016/j.ijmachtools.2006.02.016_bib2",
      "doi-asserted-by": "crossref",
      "first-page": "349",
      "DOI": "10.1016/0301-679X(95)00019-Z",
      "article-title": "Energy scaling transitions in machining of silicon by diamond",
      "volume": "28",
      "author": "Puttick",
      "year": "1995",
      "journal-title": "Tribology International"
    },
    {
      "issue": "1",
      "key": "10.1016/j.ijmachtools.2006.02.016_bib3",
      "doi-asserted-by": "crossref",
      "first-page": "45",
      "DOI": "10.1016/S0007-8506(07)62782-6",
      "article-title": "Diamond cutting of silicon with nanometric finish",
      "volume": "47",
      "author": "Fang",
      "year": "1998",
      "journal-title": "Annals of the CIRP"
    },
    {
      "key": "10.1016/j.ijmachtools.2006.02.016_bib4",
      "doi-asserted-by": "crossref",
      "first-page": "42",
      "DOI": "10.1016/S0924-0136(97)00210-0",
      "article-title": "Diamond turning of silicon substrates in ductile-regime",
      "volume": "73",
      "author": "Leung",
      "year": "1998",
      "journal-title": "Journal of Materials Processing Technology"
    },
    {
      "issue": "1/2",
      "key": "10.1016/j.ijmachtools.2006.02.016_bib5",
      "doi-asserted-by": "crossref",
      "first-page": "230",
      "DOI": "10.1016/S0921-5093(00)01031-5",
      "article-title": "On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications",
      "volume": "297",
      "author": "Yan",
      "year": "2001",
      "journal-title": "Material Science and Engineering A"
    },
    {
      "key": "10.1016/j.ijmachtools.2006.02.016_bib6",
      "first-page": "251",
      "article-title": "Modeling of ductile cutting of tungsten carbide",
      "volume": "XXIX",
      "author": "Liu",
      "year": "2001",
      "journal-title": "Transactions of NAMRI/SME"
    },
    {
      "key": "10.1016/j.ijmachtools.2006.02.016_bib7",
      "doi-asserted-by": "crossref",
      "first-page": "119",
      "DOI": "10.1557/PROC-140-119",
      "article-title": "Interface tribology by nonequilibrium molecular dynamics fabrication technology",
      "volume": "140",
      "author": "Hoover",
      "year": "1989",
      "journal-title": "Material Research Society Symposium"
    },
    {
      "key": "10.1016/j.ijmachtools.2006.02.016_bib8",
      "series-title": "Proceedings American Society of Precision Engineering",
      "first-page": "76",
      "article-title": "Molecular dynamics model of the orthogonal cutting process",
      "author": "Belak",
      "year": "1990"
    },
    {
      "key": "10.1016/j.ijmachtools.2006.02.016_bib9",
      "doi-asserted-by": "crossref",
      "first-page": "31",
      "DOI": "10.1016/S0007-8506(07)60769-0",
      "article-title": "Brittle/ductile transition phenomena observed in computer simulations of machining defect-free monocrystalline silicon",
      "volume": "46",
      "author": "Inamura",
      "year": "1997",
      "journal-title": "Annals of the CIRP"
    },
    {
      "key": "10.1016/j.ijmachtools.2006.02.016_bib10",
      "doi-asserted-by": "crossref",
      "first-page": "81",
      "DOI": "10.1016/S0007-8506(07)63136-9",
      "article-title": "Crack initiation in machining monocrystalline silicon",
      "volume": "48",
      "author": "Inamura",
      "year": "1999",
      "journal-title": "Annals of the CIRP"
    },
    {
      "key": "10.1016/j.ijmachtools.2006.02.016_bib11",
      "doi-asserted-by": "crossref",
      "first-page": "551",
      "DOI": "10.1016/S0007-8506(07)62051-4",
      "article-title": "An atomistic analysis of nanometric chip removal as affected by tool\u2013work interaction in diamond turning",
      "volume": "40",
      "author": "Ikawa",
      "year": "1991",
      "journal-title": "Annals of the CIRP"
    },
    {
      "key": "10.1016/j.ijmachtools.2006.02.016_bib12",
      "first-page": "283",
      "article-title": "Molecular dynamics analysis of nanometric cutting process",
      "volume": "29",
      "author": "Shimada",
      "year": "1995",
      "journal-title": "International Journal of the Japan. Society of Precision Engineering"
    },
    {
      "key": "10.1016/j.ijmachtools.2006.02.016_bib13",
      "doi-asserted-by": "crossref",
      "first-page": "51",
      "DOI": "10.1016/S0007-8506(07)62162-3",
      "article-title": "Structure of micromachined surface simulated by molecular dynamics analysis",
      "volume": "43",
      "author": "Shimada",
      "year": "1994",
      "journal-title": "Annals of the CIRP"
    },
    {
      "key": "10.1016/j.ijmachtools.2006.02.016_bib14",
      "doi-asserted-by": "crossref",
      "first-page": "327",
      "DOI": "10.1016/S0007-8506(07)62224-0",
      "article-title": "Molecular dynamics simulation for abrasive process",
      "volume": "43",
      "author": "Rentch",
      "year": "1994",
      "journal-title": "Annals of the CIRP"
    },
    {
      "key": "10.1016/j.ijmachtools.2006.02.016_bib15",
      "doi-asserted-by": "crossref",
      "first-page": "84",
      "DOI": "10.1016/S0043-1648(98)00229-4",
      "article-title": "Effect of tool geometry in nanometric cutting: a molecular dynamics simulation approach",
      "volume": "219",
      "author": "Komanduri",
      "year": "1998",
      "journal-title": "Wear"
    },
    {
      "key": "10.1016/j.ijmachtools.2006.02.016_bib16",
      "doi-asserted-by": "crossref",
      "first-page": "1989",
      "DOI": "10.1080/13642810108208555",
      "article-title": "Molecular dynamics simulation of the nanometric cutting of silicon",
      "volume": "81",
      "author": "Komanduri",
      "year": "2001",
      "journal-title": "Philosophical Magazine B"
    },
    {
      "key": "10.1016/j.ijmachtools.2006.02.016_bib17",
      "doi-asserted-by": "crossref",
      "first-page": "425",
      "DOI": "10.1016/S0301-679X(98)00064-4",
      "article-title": "Atomic scale deformation in silicon monocrystals induced by two-body and three-body contact sliding",
      "volume": "31",
      "author": "Zhang",
      "year": "1998",
      "journal-title": "Tribology International"
    },
    {
      "key": "10.1016/j.ijmachtools.2006.02.016_bib18",
      "doi-asserted-by": "crossref",
      "first-page": "546",
      "DOI": "10.1299/jsmea.42.546",
      "article-title": "On the mechanics and physics in the nano-indentation of silicon monocrystals",
      "volume": "42",
      "author": "Zhang",
      "year": "1999",
      "journal-title": "JSME International Journal"
    },
    {
      "key": "10.1016/j.ijmachtools.2006.02.016_bib19",
      "doi-asserted-by": "crossref",
      "first-page": "148",
      "DOI": "10.1088/0957-4484/11/3/302",
      "article-title": "Three-dimensional molecular dynamics analysis of processing using a pin tool on the atomic scale",
      "volume": "11",
      "author": "Fang",
      "year": "2000",
      "journal-title": "Nanotechnology"
    },
    {
      "key": "10.1016/j.ijmachtools.2006.02.016_bib20",
      "doi-asserted-by": "crossref",
      "first-page": "390",
      "DOI": "10.1088/0957-4484/14/3/307",
      "article-title": "Molecular dynamics simulation of nanoscale machining of copper",
      "volume": "14",
      "author": "Ye",
      "year": "2003",
      "journal-title": "Nanotechnology"
    },
    {
      "key": "10.1016/j.ijmachtools.2006.02.016_bib21",
      "series-title": "Computer Simulation of Liquid",
      "author": "Allen",
      "year": "1986"
    },
    {
      "key": "10.1016/j.ijmachtools.2006.02.016_bib22",
      "doi-asserted-by": "crossref",
      "first-page": "5566",
      "DOI": "10.1103/PhysRevB.39.5566",
      "article-title": "Modeling solid-state chemistry: interatomic potentials for multicomponent systems",
      "volume": "39",
      "author": "Tersoff",
      "year": "1989",
      "journal-title": "Physical Review B"
    },
    {
      "key": "10.1016/j.ijmachtools.2006.02.016_bib23",
      "doi-asserted-by": "crossref",
      "first-page": "173",
      "DOI": "10.1088/0957-4484/11/3/307",
      "article-title": "Molecular dynamics simulation of phase transformation in silicon monocrystals due to nano-indentation",
      "volume": "11",
      "author": "Cheong",
      "year": "2000",
      "journal-title": "Nanotechnology"
    },
    {
      "key": "10.1016/j.ijmachtools.2006.02.016_bib24",
      "series-title": "Molecular Dynamics Simulation: Elementary Methods",
      "author": "Haile",
      "year": "1992"
    },
    {
      "key": "10.1016/j.ijmachtools.2006.02.016_bib25",
      "doi-asserted-by": "crossref",
      "first-page": "014107",
      "DOI": "10.1103/PhysRevB.65.014107",
      "article-title": "Representation of mechanical loads in molecular dynamics simulation",
      "volume": "65",
      "author": "Fabrizio",
      "year": "2001",
      "journal-title": "Physical Review B"
    },
    {
      "key": "10.1016/j.ijmachtools.2006.02.016_bib26",
      "first-page": "113",
      "article-title": "Machined surface and subsurface in relation to cutting edge radius in nanoscale ductile cutting of silicon",
      "volume": "33",
      "author": "Arefin",
      "year": "2005",
      "journal-title": "Transactions of NAMRI/SME"
    }
  ],
  "container-title": "International Journal of Machine Tools and Manufacture",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0890695506000642?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0890695506000642?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2019,
        1,
        16
      ]
    ],
    "date-time": "2019-01-16T23:57:46Z",
    "timestamp": 1547683066000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/S0890695506000642"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2007,
        1
      ]
    ]
  },
  "references-count": 26,
  "journal-issue": {
    "issue": "1",
    "published-print": {
      "date-parts": [
        [
          2007,
          1
        ]
      ]
    }
  },
  "alternative-id": [
    "S0890695506000642"
  ],
  "URL": "http://dx.doi.org/10.1016/j.ijmachtools.2006.02.016",
  "relation": {},
  "ISSN": [
    "0890-6955"
  ],
  "subject": [],
  "container-title-short": "International Journal of Machine Tools and Manufacture",
  "published": {
    "date-parts": [
      [
        2007,
        1
      ]
    ]
  }
}