DOI: 10.1016/j.ijmachtools.2005.12.008. Prediction of cutting forces in the micro-machining of silicon using a “hybrid molecular dynamic-finite element analysis” force model

Prediction of cutting forces in the micro-machining of silicon using a “hybrid molecular dynamic-finite element analysis” force model

10.1016/j.ijmachtools.2005.12.008

Crossref journal-article

Elsevier BV

International Journal of Machine Tools and Manufacture (78)

Bibliography

Aly, M. F., Ng, E., Veldhuis, S. C., & Elbestawi, M. A. (2006). Prediction of cutting forces in the micro-machining of silicon using a âhybrid molecular dynamic-finite element analysisâ force model. International Journal of Machine Tools and Manufacture, 46(14), 1727â1739.

Authors 4

M.F. Aly (first)
E. Ng (additional)
S.C. Veldhuis (additional)
M.A. Elbestawi (additional)

References 17 Referenced 0

10.1115/1.3121404 / Transactions of the ASME, Applied Mechanics Review / Machining and grinding: a historical review of the classical papers by Komanduri (1993)
10.1243/PIME_PROC_1995_209_051_02 / Proceedings of the Institute of Mechanical Engineers, Part B / A numerical method for determining temperature distributions in machining with coolant. Part 1: Modeling the process by Li (1995)
10.1243/0954405011519484 / Proceedings of the Institute of Mechanical Engineers, Part B / L. Raff, A review on the molecular dynamics simulation of machining at the atomic scale by Komanduri (2001)
10.1109/84.661392 / Journal of Micromechanical Systems / Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films by Tsuchiya (1998)
T. Yi, C. Kim, Microscale material testing: etchant effect on the tensile strength, in: Proceedings of the International Conference on Solid-state Sensors and Actuators, Sendai, Japan, 1999, pp. 518–525.
I. Stowers, J. Belak, D. Lucca, R. Komanduri, R. Rhorer, T. Moriwaki, K. Okuda, N. Ikawa, S. Shimada, H. Tanaka, T. Dow, J. Drescher, Molecular dynamics simulation of the chip forming process in single crystal copper and comparison with experimental data, in: Proceedings of ASPE Annual Conference, 1991, pp. 100–103.
J. Belak, I. Stowers, A molecular dynamics model of the orthogonal cutting process, Proceedings of ASPE Annual Conference, New York, 1990, pp. 76–81.
10.1088/0953-8984/7/24/003 / Journal of Physics: Condensation of Matter / A simulation study of induced disorder, failure and fracture of perfect metal crystals under uniaxial tension by Lynden-Bell (1995)
10.1103/PhysRevB.37.6991 / Physics Review B / New empirical approach for the structure and energy of covalent systems by Tersoff (1988)
10.1103/PhysRevB.39.5566 / Physics Review B / Modeling solid-state chemistry: interatomic potentials for multicomponent systems by Tersoff (1989)
10.1103/PhysRevB.31.5262 / Physics Review B / Computer simulation of local order in condensed phases of silicon by Stillinger (1985)
D.W. Heermann, Computer Simulation Methods in Theoretical Physics, Berlin, 1986. (10.1007/978-3-642-96971-3)
10.1016/S0921-5093(02)00156-9 / Materials Science and Engineering A / Molecular dynamic simulations of uniaxial tension at nanoscale of semiconductor materials for micro-electro-mechanical systems (MEMS) applications by Komanduri (2003)
K. Sato, M. Shikida, T. Yoshioka, T. Ando, T. Kawabata, Micro tensile-test of silicon film having different crystallographic orientations, in: Proceedings of the International Conference Solid-State Sensors and Actuators, Chicago, IL, 1997, pp. 595–611. (10.1109/SENSOR.1997.613721)
{'key': '10.1016/j.ijmachtools.2005.12.008_bib15', 'first-page': '706', 'article-title': 'Measurement', 'volume': '10', 'author': 'Yi', 'year': '1999', 'journal-title': 'Science and Technology'} / Science and Technology / Measurement by Yi (1999)
10.1016/0010-4655(90)90030-5 / Computer Physics Communications / Hybrid molecular dynamics by Heermann (1990)
10.1109/84.536620 / Micro-electromechanical Systems / Fracture testing of bulk silicon microcantilever beams subjected to a side load by Wilson (1996)

Dates

Type	When
Created	19 years, 7 months ago (Jan. 31, 2006, 7:39 a.m.)
Deposited	7 months, 4 weeks ago (Jan. 7, 2025, 10:22 a.m.)
Indexed	7 months, 3 weeks ago (Jan. 8, 2025, 2:40 p.m.)
Issued	18 years, 10 months ago (Nov. 1, 2006)
Published	18 years, 10 months ago (Nov. 1, 2006)
Published Print	18 years, 10 months ago (Nov. 1, 2006)

Funders 0

None

BibTeX

@article{Aly_2006, title={Prediction of cutting forces in the micro-machining of silicon using a “hybrid molecular dynamic-finite element analysis” force model}, volume={46}, ISSN={0890-6955}, url={http://dx.doi.org/10.1016/j.ijmachtools.2005.12.008}, DOI={10.1016/j.ijmachtools.2005.12.008}, number={14}, journal={International Journal of Machine Tools and Manufacture}, publisher={Elsevier BV}, author={Aly, M.F. and Ng, E. and Veldhuis, S.C. and Elbestawi, M.A.}, year={2006}, month=nov, pages={1727–1739} }

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