DOI: 10.1016/j.ijmachtools.2005.03.010. Modelling and experimental investigation on nanometric cutting of monocrystalline silicon

Modelling and experimental investigation on nanometric cutting of monocrystalline silicon

10.1016/j.ijmachtools.2005.03.010

Crossref journal-article

Elsevier BV

International Journal of Machine Tools and Manufacture (78)

Bibliography

Fang, F. Z., Wu, H., & Liu, Y. C. (2005). Modelling and experimental investigation on nanometric cutting of monocrystalline silicon. International Journal of Machine Tools and Manufacture, 45(15), 1681â1686.

Authors 3

F.Z. Fang (first)
H. Wu (additional)
Y.C. Liu (additional)

References 34 Referenced 237

10.1016/0141-6359(91)90500-I / Precision Engineering / Ductile regime model for diamond turning of brittle materials by Blackley (1991)
10.1016/S0007-8506(07)60200-5 / Annals of the CIRP / Advancing cutting technology by Byrne (2003)
10.1016/S0007-8506(07)61598-4 / Annals of the CIRP / Effect of material properties on ultra-precise cutting processes by Furukawa (1988)
10.1016/0141-6359(95)00054-2 / Precision Engineering / Ductile-regime turning mechanism of single crystal silicon by Shibata (1996)
10.1016/S0007-8506(07)61935-0 / Annals of the CIRP / Bluntness of the tool and process forces in high-precision cutting by Taminiau (1991)
10.1016/S0007-8506(07)61936-2 / Annals of the CIRP / Energy dissipation in the ultra-precision machining of copper by Lucca (1991)
10.1007/s00170-003-1593-2 / International Journal of Advance Manufacturing Technology / An experimental study of edge radius effect on cutting single crystal silicon by Fang (2003)
10.1016/S0007-8506(07)61166-4 / Annals of the CIRP / Atomic-scale cutting in a computer using crystal models of copper and diamond by Inamura (1992)
{'issue': '1', 'key': '10.1016/j.ijmachtools.2005.03.010_bib9', 'first-page': '65', 'article-title': 'Mechanics and energy dissipation in nanoscale cutting', 'volume': '40', 'author': 'Inamura', 'year': '1993', 'journal-title': 'Annals of the CIRP'} / Annals of the CIRP / Mechanics and energy dissipation in nanoscale cutting by Inamura (1993)
10.1016/S0007-8506(07)62397-X / Annals of the CIRP / Effect of tool edge geometry on energy dissipation in ultaprecision machining by Lucca (1993)
10.1088/0960-1317/14/7/020 / Journal of Micromechanics and Microengineering / On minimum exit-burr in micro cutting by Fang (2004)
10.1016/S0007-8506(07)62403-2 / Annals of the CIRP / Ultra-precision machining of SiCw/Al composites by Yuan (1993)
10.1016/S0007-8506(07)62161-1 / Annals of the CIRP / On a possible mechanism of shear deformation in nanoscale cutting by Inamura (1994)
10.1016/S0007-8506(07)62782-6 / Annals of the CIRP / Diamond cutting of silicon with nanometric finish by Fang (1998)
10.1016/S0007-8506(07)62878-9 / Annals of the CIRP / Effect of tool edge geometry on the nanometric cutting of Ge by Lucca (1998)
10.1016/S0007-8506(07)63128-X / Annals of the CIRP / A fluid dynamic analysis model of the ultra-precision cutting mechanism by Kwon (1999)
10.1016/S0007-8506(07)62887-X / Annals of the CIRP / Ultra-precision cutting for ZKN7 glass by Fang (2000)
10.1016/S0007-8506(07)62984-9 / Annals of the CIRP / Nano-machining instrument for nano-cutting of brittle materials by Gao (2000)
F.Z. Fang, Cutting edge effect in micro machining, Presentation to the Cutting Committee Meeting (Part II) in 52nd CIRP General Assembly, Spain, 2002
10.1098/rspl.1881.0079 / Proceedings of the Royal Society of London / The action of cutting tools by Mallock (1881)
{'key': '10.1016/j.ijmachtools.2005.03.010_bib21', 'first-page': '299', 'article-title': 'Chip formation, friction and high quality machined surface', 'volume': '29', 'author': 'Ernst', 'year': '1941', 'journal-title': 'Surface Treatment of Metals'} / Surface Treatment of Metals / Chip formation, friction and high quality machined surface by Ernst (1941)
10.1115/1.4009380 / Journal of Applied Mechanics Review / Basic mechanics of the metal cutting process by Merchant (1944)
10.1103/PhysRevLett.56.632 / Physical Review Letters / New empirical model for the structural properties of silicon by Tresoff (1986)
10.1088/0957-4484/14/3/307 / Nanotechnology / Molecular dynamics simulation of nanoscale machining of copper by Ye (2003)
10.1088/0957-4484/15/5/019 / Nanotechnology / A nano-orthogonal cutting model based on a modified molecular dynamics technique by Lin (2004)
10.1016/S0921-5093(01)00960-1 / Materials Science and Engineering / MD Simulation of exit failure in nanometric cutting by Komanduri (2001)
10.1016/S0007-8506(07)61165-2 / Annals of the CIRP / Molecular dynamics analysis as compared with experimental results of micromachining by Shimada (1992)
10.1016/S0007-8506(07)62399-3 / Annals of the CIRP / Feasibility study on ultimate accuracy in microcutting using molecular dynamics simulation by Shimada (1993)
10.1016/S0007-8506(07)60769-0 / Annals of the CIRP / Brittle/ductile transition phenomena observed in computer simulations of machining defect-free monocrystalline silicon by Inamura (1997)
10.1016/S0007-8506(07)63133-3 / Annals of the CIRP / Orientation effects in nanometric cutting of single crystal materials: an MD simulation approach by Komanduri (1999)
10.1088/0957-4484/11/3/307 / Nanotechnology / Molecular dynamics simulation of phase transformations in silicon monocrystals due to nano-indentation by Cheong (2000)
10.1016/S0020-7403(01)00024-8 / International Journal of Mechanical Sciences / Towards a deeper understanding of plastic deformation in mono-crystalline silicon by Zhang (2001)
{'key': '10.1016/j.ijmachtools.2005.03.010_bib33', 'series-title': 'Fracture of Brittle Solids', 'author': 'Lawn', 'year': '1993'} / Fracture of Brittle Solids by Lawn (1993)
10.1557/JMR.1997.0010 / Journal of Materials Research / Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems devices by Bhushan (1997)

Dates

Type	When
Created	20 years, 3 months ago (May 24, 2005, 8:15 a.m.)
Deposited	4 years, 1 month ago (July 11, 2021, 12:06 a.m.)
Indexed	4 days, 6 hours ago (Aug. 28, 2025, 8:03 a.m.)
Issued	19 years, 9 months ago (Dec. 1, 2005)
Published	19 years, 9 months ago (Dec. 1, 2005)
Published Print	19 years, 9 months ago (Dec. 1, 2005)

Funders 0

None

BibTeX

@article{Fang_2005, title={Modelling and experimental investigation on nanometric cutting of monocrystalline silicon}, volume={45}, ISSN={0890-6955}, url={http://dx.doi.org/10.1016/j.ijmachtools.2005.03.010}, DOI={10.1016/j.ijmachtools.2005.03.010}, number={15}, journal={International Journal of Machine Tools and Manufacture}, publisher={Elsevier BV}, author={Fang, F.Z. and Wu, H. and Liu, Y.C.}, year={2005}, month=dec, pages={1681–1686} }

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