DOI: 10.1016/j.cirp.2011.03.057. Nanometric cutting of single crystal silicon surfaces modified by ion implantation

Nanometric cutting of single crystal silicon surfaces modified by ion implantation

10.1016/j.cirp.2011.03.057

Crossref journal-article

Elsevier BV

CIRP Annals (78)

Bibliography

Fang, F. Z., Chen, Y. H., Zhang, X. D., Hu, X. T., & Zhang, G. X. (2011). Nanometric cutting of single crystal silicon surfaces modified by ion implantation. CIRP Annals, 60(1), 527â530.

Authors 5

F.Z. Fang (first)
Y.H. Chen (additional)
X.D. Zhang (additional)
X.T. Hu (additional)
G.X. Zhang (additional)

References 10 Referenced 106

10.1016/S0007-8506(07)60204-2 / Annals of CIRP Annals / Surfaces in precision engineering, microengineering and nanotechnology by De Chiffre (2003)
10.1016/S0020-7403(01)00024-8 / International Journal of Mechanical Sciences / Towards a deeper understanding of plastic deformation in mono-crystalline silicon by Zhang (2001)
10.1016/S0007-8506(07)62377-4 / Annals of CIRP Annals / Brittle–ductile transition phenomena in microindentation and micromachining by Shimada (1995)
10.1016/S0007-8506(07)62782-6 / Annals of CIRP Annals / Diamond cutting of silicon with nanometric finish by Fang (1998)
10.1016/S0007-8506(07)60876-2 / Annals of CIRP Annals / On-mirror surfaces obtained with and without polishing by Venkatesh (1997)
10.1063/1.1808484 / Journal of Applied Physics / Ion-beam-induced amorphization and recrystallization in silicon by Pelaz (2004)
10.1016/j.ijmachtools.2005.03.010 / International Journal of Machine Tools and Manufacture / Modelling and experimental investigation on nanometric cutting of monocrystalline silicon by Fang (2005)
10.1016/j.cirp.2007.05.015 / Annals of CIRP Annals / Requirements for ductile-mode machining based on deformation analysis of monocrystalline silicon by molecular dynamics simulation by Tanaka (2007)
{'key': '10.1016/j.cirp.2011.03.057_bib0045', 'first-page': '366', 'article-title': 'Energy variation of micro-cracking on single crystal silicon', 'volume': '6344', 'author': 'Fang', 'year': '2006', 'journal-title': 'Proceedings of SPIE'} / Proceedings of SPIE / Energy variation of micro-cracking on single crystal silicon by Fang (2006)
10.1016/S0043-1648(03)00076-0 / Wear / Some observation on the wear of diamond tools in ultra-precision cutting of single-crystal silicon by Yan (2003)

Dates

Type	When
Created	14 years, 4 months ago (April 18, 2011, 2:11 p.m.)
Deposited	6 years, 8 months ago (Dec. 3, 2018, 1:55 a.m.)
Indexed	2 weeks ago (Aug. 12, 2025, 5:58 p.m.)
Issued	14 years, 7 months ago (Jan. 1, 2011)
Published	14 years, 7 months ago (Jan. 1, 2011)
Published Print	14 years, 7 months ago (Jan. 1, 2011)

Funders 2

Natural Science Foundation of China 10.13039/501100001809 National Natural Science Foundation of China
Region: Asia
gov (National government)
Labels11
1. Chinese National Science Foundation
2. Natural Science Foundation of China
3. National Science Foundation of China
4. NNSF of China
5. NSF of China
6. 国家自然科学基金委员会
7. National Nature Science Foundation of China
8. Guójiā Zìrán Kēxué Jījīn Wěiyuánhuì
9. NSFC
10. NNSF
11. NNSFC
Awards1
1. 90923038
National High-tech R&D Program 863
Awards2
1. 2009AA044305
2. 2009AA044204

BibTeX

@article{Fang_2011, title={Nanometric cutting of single crystal silicon surfaces modified by ion implantation}, volume={60}, ISSN={0007-8506}, url={http://dx.doi.org/10.1016/j.cirp.2011.03.057}, DOI={10.1016/j.cirp.2011.03.057}, number={1}, journal={CIRP Annals}, publisher={Elsevier BV}, author={Fang, F.Z. and Chen, Y.H. and Zhang, X.D. and Hu, X.T. and Zhang, G.X.}, year={2011}, pages={527–530} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        12
      ]
    ],
    "date-time": "2025-08-12T21:58:37Z",
    "timestamp": 1755035917459
  },
  "reference-count": 10,
  "publisher": "Elsevier BV",
  "issue": "1",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2011,
            1,
            1
          ]
        ],
        "date-time": "2011-01-01T00:00:00Z",
        "timestamp": 1293840000000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "funder": [
    {
      "DOI": "10.13039/501100001809",
      "name": "Natural Science Foundation of China",
      "doi-asserted-by": "crossref",
      "award": [
        "90923038"
      ],
      "id": [
        {
          "id": "10.13039/501100001809",
          "id-type": "DOI",
          "asserted-by": "crossref"
        }
      ]
    },
    {
      "name": "National High-tech R&D Program 863",
      "award": [
        "2009AA044305",
        "2009AA044204"
      ]
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2011
      ]
    ]
  },
  "DOI": "10.1016/j.cirp.2011.03.057",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2011,
        4,
        18
      ]
    ],
    "date-time": "2011-04-18T18:11:11Z",
    "timestamp": 1303150271000
  },
  "page": "527-530",
  "source": "Crossref",
  "is-referenced-by-count": 106,
  "title": "Nanometric cutting of single crystal silicon surfaces modified by ion implantation",
  "prefix": "10.1016",
  "volume": "60",
  "author": [
    {
      "given": "F.Z.",
      "family": "Fang",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Y.H.",
      "family": "Chen",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "X.D.",
      "family": "Zhang",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "X.T.",
      "family": "Hu",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "G.X.",
      "family": "Zhang",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "issue": "2",
      "key": "10.1016/j.cirp.2011.03.057_bib0005",
      "doi-asserted-by": "crossref",
      "first-page": "561",
      "DOI": "10.1016/S0007-8506(07)60204-2",
      "article-title": "Surfaces in precision engineering, microengineering and nanotechnology",
      "volume": "52",
      "author": "De Chiffre",
      "year": "2003",
      "journal-title": "Annals of CIRP Annals"
    },
    {
      "issue": "9",
      "key": "10.1016/j.cirp.2011.03.057_bib0010",
      "doi-asserted-by": "crossref",
      "first-page": "1985",
      "DOI": "10.1016/S0020-7403(01)00024-8",
      "article-title": "Towards a deeper understanding of plastic deformation in mono-crystalline silicon",
      "volume": "43",
      "author": "Zhang",
      "year": "2001",
      "journal-title": "International Journal of Mechanical Sciences"
    },
    {
      "issue": "1",
      "key": "10.1016/j.cirp.2011.03.057_bib0015",
      "doi-asserted-by": "crossref",
      "first-page": "523",
      "DOI": "10.1016/S0007-8506(07)62377-4",
      "article-title": "Brittle\u2013ductile transition phenomena in microindentation and micromachining",
      "volume": "44",
      "author": "Shimada",
      "year": "1995",
      "journal-title": "Annals of CIRP Annals"
    },
    {
      "issue": "1",
      "key": "10.1016/j.cirp.2011.03.057_bib0020",
      "doi-asserted-by": "crossref",
      "first-page": "45",
      "DOI": "10.1016/S0007-8506(07)62782-6",
      "article-title": "Diamond cutting of silicon with nanometric finish",
      "volume": "47",
      "author": "Fang",
      "year": "1998",
      "journal-title": "Annals of CIRP Annals"
    },
    {
      "issue": "1",
      "key": "10.1016/j.cirp.2011.03.057_bib0025",
      "doi-asserted-by": "crossref",
      "first-page": "505",
      "DOI": "10.1016/S0007-8506(07)60876-2",
      "article-title": "On-mirror surfaces obtained with and without polishing",
      "volume": "46",
      "author": "Venkatesh",
      "year": "1997",
      "journal-title": "Annals of CIRP Annals"
    },
    {
      "issue": "11",
      "key": "10.1016/j.cirp.2011.03.057_bib0030",
      "doi-asserted-by": "crossref",
      "first-page": "5947",
      "DOI": "10.1063/1.1808484",
      "article-title": "Ion-beam-induced amorphization and recrystallization in silicon",
      "volume": "96",
      "author": "Pelaz",
      "year": "2004",
      "journal-title": "Journal of Applied Physics"
    },
    {
      "issue": "15",
      "key": "10.1016/j.cirp.2011.03.057_bib0035",
      "doi-asserted-by": "crossref",
      "first-page": "1681",
      "DOI": "10.1016/j.ijmachtools.2005.03.010",
      "article-title": "Modelling and experimental investigation on nanometric cutting of monocrystalline silicon",
      "volume": "45",
      "author": "Fang",
      "year": "2005",
      "journal-title": "International Journal of Machine Tools and Manufacture"
    },
    {
      "issue": "1",
      "key": "10.1016/j.cirp.2011.03.057_bib0040",
      "doi-asserted-by": "crossref",
      "first-page": "53",
      "DOI": "10.1016/j.cirp.2007.05.015",
      "article-title": "Requirements for ductile-mode machining based on deformation analysis of monocrystalline silicon by molecular dynamics simulation",
      "volume": "56",
      "author": "Tanaka",
      "year": "2007",
      "journal-title": "Annals of CIRP Annals"
    },
    {
      "key": "10.1016/j.cirp.2011.03.057_bib0045",
      "first-page": "366",
      "article-title": "Energy variation of micro-cracking on single crystal silicon",
      "volume": "6344",
      "author": "Fang",
      "year": "2006",
      "journal-title": "Proceedings of SPIE"
    },
    {
      "issue": "7\u201312",
      "key": "10.1016/j.cirp.2011.03.057_bib0050",
      "doi-asserted-by": "crossref",
      "first-page": "1380",
      "DOI": "10.1016/S0043-1648(03)00076-0",
      "article-title": "Some observation on the wear of diamond tools in ultra-precision cutting of single-crystal silicon",
      "volume": "255",
      "author": "Yan",
      "year": "2003",
      "journal-title": "Wear"
    }
  ],
  "container-title": "CIRP Annals",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0007850611000588?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0007850611000588?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2018,
        12,
        3
      ]
    ],
    "date-time": "2018-12-03T06:55:32Z",
    "timestamp": 1543820132000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/S0007850611000588"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2011
      ]
    ]
  },
  "references-count": 10,
  "journal-issue": {
    "issue": "1",
    "published-print": {
      "date-parts": [
        [
          2011
        ]
      ]
    }
  },
  "alternative-id": [
    "S0007850611000588"
  ],
  "URL": "http://dx.doi.org/10.1016/j.cirp.2011.03.057",
  "relation": {},
  "ISSN": [
    "0007-8506"
  ],
  "subject": [],
  "container-title-short": "CIRP Annals",
  "published": {
    "date-parts": [
      [
        2011
      ]
    ]
  }
}